Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International



Home > Press > Imec and Holst Centre develop low-temperature organic-inorganic complementary thin-film technology

Complementary TFT: (a) Output characteristics of typical solution-processed oxide and evaporated pentacene transistors, (b) inverter characteristics of the hybrid technology at different power voltages. The inset shows a photograph of an inverter. (c) Cross section of the hybrid technology.
Complementary TFT: (a) Output characteristics of typical solution-processed oxide and evaporated pentacene transistors, (b) inverter characteristics of the hybrid technology at different power voltages. The inset shows a photograph of an inverter. (c) Cross section of the hybrid technology.

Abstract:
Imec and Holst Centre report the fabrication of high-performance solution-processed n-type metal-oxide thin-film transistors (TFTs) after post-annealing at temperatures as low as 250°C. Using these oxide n-TFTs in combination with pentacene p-TFTs, a completely scalable integration process is developed for hybrid inorganic-organic complementary logic on foil. A bidirectional RFID circuit, recently presented at ISSCC, proves the ability of the technology to realize complex, fast and low-voltage circuitry.

Imec and Holst Centre develop low-temperature organic-inorganic complementary thin-film technology

Leuven, Belgium | Posted on March 16th, 2012

The development of a thin-film equivalent for Si CMOS circuitry is one of the key objectives of thin-film electronics. Combining n-channel transistors and p-channel transistors in a CMOS architecture allows low static power dissipation, simplified and more robust circuit design and low noise. A very promising approach to realize complementary thin-film logic is to integrate oxide n-TFTs with organic p-TFTs. The preferred technique to make n-type metal-oxide TFTs is solution-based processing, allowing a simple and high-throughput fabrication process. However, solution processing of metal oxides is typically done at high temperatures (350-500°C), making the technique incompatible with flexible substrates such as polyimide.

Imec and Holst Centre have now demonstrated high-performance solution-based n-type metal oxide TFTs processed directly on polyimide foil and annealed at 250°C. The n-type indium-based oxide transistors were photolithographically fabricated in a bottom Au gate - top Ti S/D contact geometry with channel lengths down to 2-10μm and 100nm of high-k Al2O3 acting as the gate dielectric. The oxide active layer is deposited by spin-coating and subsequently baked in air at a temperature as low as 250°C. Excellent transistor performances have been achieved on polyimide foil with saturation mobilities exceeding 2cm²/Vs, leakage currents below 1pA and Ion/Ioff ratios up to 108. This solution-based unipolar oxide TFT technology is well suited for application in e.g. active-matrix organic light-emitting diode (AMOLED) backplanes.

In a next step, a hybrid organic-inorganic complementary technology has been developed that combines the high-performance n-TFT with a thermally evaporated pentacene p-TFT. The latter has a mobility of up to 1cm2/Vs. A gold layer acts as the gate for both the organic p- and inorganic n-TFT, high-k Al2O3 is used to form the dielectric layer. First, the complementary TFT technology was implemented on a rigid substrate. Using this technology, hybrid complementary circuit building blocks, such as inverters and ring oscillators were realized. Supply voltages as low as 2V resulted in good circuit behavior, indicating that the presented technology is suited for future low-voltage applications. This complementary TFT technology enabled to make the world's first RFID circuit (using TFTs) that allows reader-talks-first communication, as recently presented at ISSCC 2012.

####

For more information, please click here

Contacts:
Barbara Kalkis
Maestro Marketing & PR

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Gene therapy relieves back pain, repairs damaged disc in mice: Study suggests nanocarriers loaded with DNA could replace opioids May 17th, 2024

Shedding light on perovskite hydrides using a new deposition technique: Researchers develop a methodology to grow single-crystal perovskite hydrides, enabling accurate hydride conductivity measurements May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Thin films

Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024

Understanding the mechanism of non-uniform formation of diamond film on tools: Paving the way to a dry process with less environmental impact March 24th, 2023

New study introduces the best graphite films: The work by Distinguished Professor Feng Ding at UNIST has been published in the October 2022 issue of Nature Nanotechnology November 4th, 2022

Thin-film, high-frequency antenna array offers new flexibility for wireless communications November 5th, 2021

Chip Technology

Diamond glitter: A play of colors with artificial DNA crystals May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024

Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024

Discoveries

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Diamond glitter: A play of colors with artificial DNA crystals May 17th, 2024

Finding quantum order in chaos May 17th, 2024

Advances in priming B cell immunity against HIV pave the way to future HIV vaccines, shows quartet of new studies May 17th, 2024

Announcements

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Diamond glitter: A play of colors with artificial DNA crystals May 17th, 2024

Finding quantum order in chaos May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Alliances/Trade associations/Partnerships/Distributorships

Manchester graphene spin-out signs $1billion game-changing deal to help tackle global sustainability challenges: Landmark deal for the commercialisation of graphene April 14th, 2023

Chicago Quantum Exchange welcomes six new partners highlighting quantum technology solutions, from Chicago and beyond September 23rd, 2022

CEA & Partners Present ‘Powerful Step Towards Industrialization’ Of Linear Si Quantum Dot Arrays Using FDSOI Material at VLSI Symposium: Invited paper reports 3-step characterization chain and resulting methodologies and metrics that accelerate learning, provide data on device pe June 17th, 2022

University of Illinois Chicago joins Brookhaven Lab's Quantum Center June 10th, 2022

RFID

Nanowire 'inks' enable paper-based printable electronics: Highly conductive films make functional circuits without adding high heat January 4th, 2017

Conformal transfer of graphene for reproducible device fabrication August 11th, 2015

GLOBALFOUNDRIES Launches Industry’s First 22nm FD-SOI Technology Platform: 22FDX offers the best combination of performance, power consumption and cost for IoT, mainstream mobile, RF connectivity, and networking July 13th, 2015

New micro-supercapacitor structure inspired by the intricate design of leaves: A team of scientists in Korea has devised a new method for making a graphene film for supercapacitors July 2nd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project