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JEOL JSM-7600F Analytical FE SEM
JEOL JSM-7600F Analytical FE SEM

Abstract:
JEOL to Remotely Demonstrate New High Throughput, Ultrahigh Resolution Analytical FE SEM at Semicon West 2009

Remote Demos of JEOL Analytical SEM at Semicon

Peabody, MA | Posted on June 30th, 2009

JEOL, a leading supplier of electron microscopes for ultrahigh resolution imaging and analysis, will demonstrate its new ultrahigh resolution, analytical Thermal Field Emission Scanning Electron Microscope (SEM), the JSM-7600F, via live remote viewing and control from Semicon West, San Francisco, July 14-16.

The SEM will be remotely operated from JEOL's booth #606 to demonstrate ultrahigh imaging resolution at up to 1,000,000X magnification, and X-ray analytical mapping of individual layers, elemental composition, contaminants, particulates, and process defects in semiconductor devices.

The only fully-analytical field emission SEM to feature a large chamber with large specimen exchange airlock and LN2 anti-contaminator, the JSM-7600F accommodates specimens up to 200mm in diameter, and features a highly stable 5-axis motor drive eucentric stage that can be tilted from -5 to 70o.

The microscope's electron column produces the highest beam current available on any FEG SEM, and provides superior imaging of nonconductive samples that traditionally charge. The JSM-7600F minimizes beam damage on heat sensitive samples, i.e. low-K dielectrics, and offers improved stability for unattended data acquisition, particle analysis, EBSD, and X-ray mapping.

The JEOL JSM-7600F is fully outfitted for comprehensive analysis techniques and can simultaneously view and acquire images and data from four different types of imaging detectors. The SEM also does double duty as a direct write e-beam lithography tool when outfitted with a high speed beam blanker and a pattern generator (see previous release at www.jeolusa.com/NEWSEVENTS/PressReleases/tabid/314/newsid735/148/West-Virginia-University-Advancing-Nanoscience-with-New-E-beam-SEM/Default.aspx)

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About JEOL
Since 1949, the JEOL legacy has been one of outstanding innovation in developing instruments used to advance scientific research and technology. JEOL has 60 years of expertise in the field of electron microscopy, more than 50 years in mass spectrometry and NMR spectrometry, and more than 40 years of e-beam lithography leadership.

JEOL USA, Inc., a wholly-owned subsidiary of JEOL Ltd. Japan, was incorporated in the United States in 1962. The primary business of JEOL USA is sales of new instruments and peripherals and support of a vast installed base of instruments throughout the United States, Canada, Mexico, and South America.

For more information, please click here

Contacts:
Patricia Corkum
Marketing Manager
JEOL USA
978-536-2273


Pamela Mansfield
Marketing Communications
JEOL USA
11 Dearborn Road
Peabody, MA 01966

Copyright © JEOL

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