Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International



Home > Press > Tegal and CIMAC Enter Partnership to Bring Greater Efficiency and Throughput to Semiconductor Processing Equipment

Abstract:
Software Development for Tegal AMS PVD tool and Enhancements to Current Generation Tegal Endeavor AT PVD Cluster Tool Highlight Partnership

Tegal and CIMAC Enter Partnership to Bring Greater Efficiency and Throughput to Semiconductor Processing Equipment

San Jose, CA | Posted on August 19th, 2008

Semiconductor equipment supplier Tegal Corporation (NASDAQ:TGAL) and CIMAC, a leading software service solutions provider, announced today that they have entered into a partnership to create enhanced operating systems and user interfaces for Tegal AMS PVD thin film deposition systems.

The Tegal AMS™ PVD systems provide industry-leading performance for the reactive sputtering of aluminum nitride (AlN) films used to fabricate piezoelectric devices such as BAW and FBAR filters for the cell phone handset market. The AMS platform is one of Tegal's most recent product offerings for depositing and etching materials vital to MEMS device development and commercial manufacturing. CIMAC is providing software development for the tool operating system, the GUI user interface, and SECS/GEM communications.

Cluster Tool Enhancements

CIMAC has also been developing software enhancements for Tegal's current generation Endeavor line of PVD cluster tools. These enhancements include the development and deployment of improved SECS/GEM communications, and also software upgrades for managing the tool efficiency and throughput benefits created when a second vacuum load lock is added to the system.

"Our partnership with CIMAC has been both cost-effective and efficient," commented Jim Apffel, engineering director at Tegal. "We've been able to put our efforts toward our core competencies of PVD cluster tools and let CIMAC enhance the product lines with their expertise in software."

"This is a perfect example of our value added service," commented Yezala Abayneh, President & CEO of CIMAC. "For over 10 years we have been partnering with equipment suppliers to enhance the productivity of their current generation tools and to bring to market new tools with state-of-the art software capabilities."

About Tegal

Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits. www.tegal.com

####

About CIMAC
CIMAC (pronounced See' mack) has been a leader in Factory Automation and MES (Manufacturing Execution Systems) solutions for the semiconductor industry over the last ten years. Founded in 1997 CIMAC engineers and program mangers are experts in the fields of Fab Connectivity & Control (FCC), Factory Software Systems (FSM), IT Services (ITS), Quality Assurance & ACM (QA) and Equipment Capability (ECM).

For more information, please click here

Contacts:
CIMAC
Company Contact:
Brandon Lee
408-985-4300

or
Agency Contact:
Bruce Kirkpatrick
925-244-9100

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Gene therapy relieves back pain, repairs damaged disc in mice: Study suggests nanocarriers loaded with DNA could replace opioids May 17th, 2024

Shedding light on perovskite hydrides using a new deposition technique: Researchers develop a methodology to grow single-crystal perovskite hydrides, enabling accurate hydride conductivity measurements May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Software

Visualizing nanoscale structures in real time: Open-source software enables researchers to see materials in 3D while they're still on the electron microscope August 19th, 2022

Luisier wins SNSF Advanced Grant to develop simulation tools for nanoscale devices July 8th, 2022

CEA and Spectronite Develop Software Radio For Spectrally Efficient Backhaul Solutions: Adapted for Spectronite’s X-Series Modem for 5G Systems, the Technology Enables Carrier Aggregation that Provides Radio Links with 10Gb/s Capacity March 4th, 2022

Oxford Instruments’ Atomfab® system is production-qualified at a market-leading GaN power electronics device manufacturer December 17th, 2021

Chip Technology

Diamond glitter: A play of colors with artificial DNA crystals May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024

Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024

Announcements

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Diamond glitter: A play of colors with artificial DNA crystals May 17th, 2024

Finding quantum order in chaos May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Tools

First direct imaging of small noble gas clusters at room temperature: Novel opportunities in quantum technology and condensed matter physics opened by noble gas atoms confined between graphene layers January 12th, 2024

New laser setup probes metamaterial structures with ultrafast pulses: The technique could speed up the development of acoustic lenses, impact-resistant films, and other futuristic materials November 17th, 2023

Ferroelectrically modulate the Fermi level of graphene oxide to enhance SERS response November 3rd, 2023

The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023

Alliances/Trade associations/Partnerships/Distributorships

Manchester graphene spin-out signs $1billion game-changing deal to help tackle global sustainability challenges: Landmark deal for the commercialisation of graphene April 14th, 2023

Chicago Quantum Exchange welcomes six new partners highlighting quantum technology solutions, from Chicago and beyond September 23rd, 2022

CEA & Partners Present ‘Powerful Step Towards Industrialization’ Of Linear Si Quantum Dot Arrays Using FDSOI Material at VLSI Symposium: Invited paper reports 3-step characterization chain and resulting methodologies and metrics that accelerate learning, provide data on device pe June 17th, 2022

University of Illinois Chicago joins Brookhaven Lab's Quantum Center June 10th, 2022

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project