Home > Press > JSR Joins SEMATECH’s Resist Center at UAlbany NanoCollege
Abstract:
Collaboration to provide cost-effective semiconductor materials for 22nm nodes
SEMATECH, a global consortium of chipmakers, and JSR Corporation, an advanced materials supplier to chip-makers and others, and its U.S. operation, JSR Micro, Inc. announced today that it has become the newest member of SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.
JSR will collaborate with SEMATECH engineers on key resist issues in extreme ultraviolet (EUV) lithography. Focus areas will include:
· Working to reduce or eliminate line edge roughness (LER) in lithographic images below 22 nm
· Discovering ultimate resolution of newly formulated photoresists
· Testing various imaging materials for EUV sensitivity
SEMATECH and JSR have partnered previously in several technology development programs, including 300 mm test wafers, low-k films, and advanced resists, including double exposure materials.
"We have a successful history of partnership with SEMATECH and we are excited to continue that history in the field of EUV," said Hozumi Sato, managing director of JSR Corporation, responsible for the Research and Development. "Combining resources to create next generation of EUV materials is not only good for JSR and SEMATECH, but will benefit the industry as a whole."
"We're looking forward to working with JSR in our mutual effort to develop leading‑edge resists and materials, and accelerate process availability for EUV pilot line manufacturing," said John Warlaumont, vice president of Advanced Technology at SEMATECH. "Our successful experience in our previous partnerships will contribute greatly to RMDC's effectiveness."
"The addition of JSR to the roster of global companies at CNSE's Albany NanoTech Complex will further enhance the SEMATECH-CNSE partnership in driving leading-edge nanoelectronics innovations," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "This collaboration is enabling advances in a host of technologies, including EUV lithography, which are critical to industry."
At the RMDC, leading resist and materials suppliers participate in focused, cooperative R&D with SEMATECH member companies. Together, the RMDC provides the hardware and research expertise required by materials suppliers and member companies to develop EUV resist processes that meet the stringent resolution, linewidth roughness, and sensitivity specifications needed for EUV insertion at member companies.
####
About SEMATECH
For over 20 years, SEMATECH® (www.sematech.org), the international consortium of leading semiconductor manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.
About JSR Corporation
Tokyo based JSR Corporation is an advanced manufacturer in polymer chemistry, it operates a wide range of global businesses ranging from the petrochemical business, including the manufacture of synthetic rubber, to the cutting-edge information and electronic materials business, including the manufacture of semiconductor materials and liquid crystal display materials. For more information, visit www.jsr.co.jp.
About CNSE
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE’s Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech. For more information, visit www.cnse.albany.edu.
For more information, please click here
Contacts:
SEMATECH
Erica McGill, 518-649-1041
JSR Corporation (Japan)
Yoshiko Takeda, 81-3-6218-3517
CNSE
Steve Janack, 518-956-7322
JSR Micro, Inc. (US)
Missy Bindseil, 408-543-8945
Copyright © SEMATECH
If you have a comment, please Contact us.Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Related News Press |
News and information
Simulating magnetization in a Heisenberg quantum spin chain April 5th, 2024
NRL charters Navy’s quantum inertial navigation path to reduce drift April 5th, 2024
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Academic/Education
Rice University launches Rice Synthetic Biology Institute to improve lives January 12th, 2024
Multi-institution, $4.6 million NSF grant to fund nanotechnology training September 9th, 2022
Chip Technology
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024
HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024
Nanoelectronics
Interdisciplinary: Rice team tackles the future of semiconductors Multiferroics could be the key to ultralow-energy computing October 6th, 2023
Key element for a scalable quantum computer: Physicists from Forschungszentrum Jülich and RWTH Aachen University demonstrate electron transport on a quantum chip September 23rd, 2022
Reduced power consumption in semiconductor devices September 23rd, 2022
Atomic level deposition to extend Moore’s law and beyond July 15th, 2022
Announcements
NRL charters Navy’s quantum inertial navigation path to reduce drift April 5th, 2024
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Research partnerships
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Researchers’ approach may protect quantum computers from attacks March 8th, 2024
'Sudden death' of quantum fluctuations defies current theories of superconductivity: Study challenges the conventional wisdom of superconducting quantum transitions January 12th, 2024
The latest news from around the world, FREE | ||
Premium Products | ||
Only the news you want to read!
Learn More |
||
Full-service, expert consulting
Learn More |
||