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September 17th, 2007

BOC affiliate to develop processes using CO2 cryogenic cleaning systems

Abstract:
Eco-Snow Systems, one of the leading suppliers of dry, CO2-based wafer-cleaning tools and process equipment, has formed a joint venture development programme with Belgian nanoelectronics research centre IMEC, to develop and study photoresist and particle removal processes using CO2-based cryogenic cleaning systems.

An affiliate of the Linde acquired BOC Group plc, Eco-Snow will partner IMEC to assess the effectiveness of solid aerosol cleaning in conjunction with solvent-based, non-oxidizing wet chemistries in removing ion-implanted photoresist and post low-k etch resist in front-and-back-end-of-line integrated device manufacturing process.

Source:
gasworld.com

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