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February 23rd, 2005

Promising Nanotechnology Application for Chip Industry

Abstract:
Using technical resources at the recently opened Advanced Materials Research Center, Austin-based Xidex Corporation and SEMATECH have developed one of Texas' first commercial applications of nanotechnology for semiconductor production.

The process uses carbon nanotubes (CNTs) as surface sensors for scanning probe microscopes (SPMs), which can peer down to the level of molecules and groups of atoms, and which can be used to measure the dimensions of extremely small features in semiconductor devices.

Source:
marketwire

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