Nanotechnology Now - Press Release: Aerotech piezo nanopositioners with high resolution, linearity and repeatability for extreme precision test and inspection

Home > Press > Aerotech piezo nanopositioners with high resolution, linearity and repeatability for extreme precision test and inspection

XY piezo nanopositioning stages provide high resonant frequency and stiffness for high throughput in demanding applications.

Abstract:
A new series of XY piezo nanopositioners for extreme precision applications has been introduced by Aerotech (www.aerotech.com). The QNP-XY stages provide the highest resonant frequency and stiffness of positioners with comparable size and travel, the company reports. This allows users to achieve higher throughput in exacting processes.

Aerotech piezo nanopositioners with high resolution, linearity and repeatability for extreme precision test and inspection

Stone Ridge, NY | Posted on September 14th, 2015

With resolution to 0.15 nm, linearity to 0.007% and repeatability to 2 nm, the stages meet the most demanding requirements of applications from microscopy to optics alignment. They are offered in travel ranges from 100 µm to 600 µm.

Applications include: Test & Inspection • Industrial and Academic Laboratories • Nanometrology • Microscopy • Semiconductors • Microelectronics • Optics • Photonics • Data Storage • Precision Mechanics • Metals • Life Sciences • Medical Devices

QNP piezo stages are guided by frictionless precision flexures that are optimized using finite element analysis for fast closed-loop response. The integrated XY package minimizes stack height and moving mass, resulting in superior static and dynamic multi-axis performance.

When coupled with Aerotech’s Q-series controllers and drives, the stages demonstrate sub-nanometer positioning resolution and in-position stability, and high-positioning bandwidth. They are available with or without capacitance sensor feedback and a wide range of software options.

####

About Aerotech
Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions. Its products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.

For more information, please click here

Contacts:
Product Sales Contacts:
Australia
Coherent Scientific Pty Ltd
Phone: +61 8 8150 5200
Fax: +61 8 8352 2020

CHINA
AEROTECH CHINA
Runfree Xu
Phone: +86 (21) 3319 7715

www.aerotech.com

TAIWAN
AEROTECH TAIWAN
Phone: +886 (0)2 8751 6690

www.aerotech.com

INDIA
LIBERTY INTERNATIONAL
Phone: +91 079-2692-6360
FAX: +91 079-2692-6380

www.aerotech.com

JAPAN
AEROTECH JAPAN
Phone: +81 (0)50 5830 6821
Fax: +81 (0)43 306 3773

www.aerotech.com

MALAYSIA
Plant & Mill Motion Control Sdn Bhd
Phone: +(604) 645 1861
Fax: +(604) 644 8543

www.aerotech.com

SINGAPORE
Plant & Mill Supplies Pte Ltd
Singapore Office
Phone: +(65) 6542 4211
Fax: +(65) 6542 1318

www.aerotech.com

THAILAND
PMC Technology Co.
Phone: +(662) 667 4501
Fax: +(662) 667 4506

www.aerotech.com