Nanotechnology Now - Press Release: PIHera: Largest Family of Piezo Stage Scanners with 10X Greater Positioning Area

Home > Press > PIHera: Largest Family of Piezo Stage Scanners with 10X Greater Positioning Area

Abstract:
PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nano-biotechnology, life science and photonics applications, provides the PIHera family of compact X, XY and Z flexure-guided piezo nanopositioning stages, offering record travel ranges to 1.8 millimeters.

PIHera: Largest Family of Piezo Stage Scanners with 10X Greater Positioning Area

Auburn, MA | Posted on March 31st, 2015

Largest Variety: 60 Models / X, XY, Z, XYZ / 50 to 1800 µm Travel Ranges
The PIHera flexure positioner series offers the largest variety of travel ranges and options of any high precision piezo nanopositioning stage currently available.

PIHera stages come in single axis (horizontal and vertical), two-axis (XY), and XYZ combinations. Travel ranges start at 50µm and go all the way up to 1,800µm (1.8mm) - a record for flexure guided piezo stages.

A total of 60 standard variations are available, including closed-loop, and UHV compatible versions.

Many Control Options, Software Support
PI's four decades of piezo design experience is also evident in the control options. Options span from compact, low-cost single-channel controllers to complex 12 channel high-output control systems, and from OEM boards to rack mount units.

A choice of advanced digital servo algorithms optimized for piezo drives provide higher throughput, faster settling, and higher disturbance rejection than conventional PID-based controllers, resulting in better stability at the nanometer range and below.

Multiple control interfaces such as TCP/IP, USB, SPI, and even high-bandwidth analog I/O is offered. Controllers come with ample software support, LabView drivers, and diagnosis tools for servo tuning, data recording, and remote access. Motion and control parameters are stored in an ID chip on the stage for seamless controller / piezo mechanics interchangeability and plug-and-play operation.

Application Examples
Micro-manufacturing, Photonics and Optics Alignment, Super-Resolution Microscopy, Semiconductor Test Equipment, Scanning Probe Microscopy, Biotechnology, Surface Metrology, Quality Assurance, Nanometrology, Interferometry, Nanopositioning

More Information, Specifications and Datasheet
www.pi-usa.us/news/news_PIHera_Piezo_Nanopositioning_Stages.php
Features & Advantages

•No Wear & Tear: Flexures, Actuators, and Sensors are Maintenance-Free
•Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
•Frictionless, Maintenance-Free, Precision Flexure Guiding System
•50 to 1800 µm Travel Ranges
•X, XY, Z, and XYZ Versions Available
•Closed-Loop Digital & Analog Control for up to 99.98% Position Accuracy
•Vacuum-Compatible Versions
•Stiff and Compact Design for Millisecond Responsiveness
•Resolution <1 nm
•Capacitive Direct-Metrology Sensors for Faster Servo Response

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About PI (Physik Instrumente)
PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries, R&D / engineering on 3 continents and total staff of 800+.

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