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TMC13 Deposition Rate Controller

Abstract:
The TMC13 Deposition Rate Controller from Henniker Scientific is a versatile, multi-channel device that has been designed for repeatebale, reliable and accurate control of film thickness and rate in vacuum based thin film deposition processes.

TMC13 Deposition Rate Controller for Thin Film Applications

Warrington, UK | Posted on May 15th, 2012

The feature-rich touch-screen interface can be easily customised to suit a particular operator preference and can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.

The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs as standard, as well as an extensive and fully editable materials library.

Where control features are not required, the quartz crystal balance can be interfaced directly with a PC via the compact, low cost, single channel TM13 interface which provides a highly stable and repeatable frequency to rate/ thickness conversion for all industry standard 6MHz quartz crystals.

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Contacts:
Gill Bolton
Henniker Scientific Ltd.
Cavendish House
Birchwood Park
Warrington WA3 6BU
England
Tel: +44 (0) 1925 811 254
Fax: +44 (0) 1925 800 035

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