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EQP Plasma Monitor with Integrated Driven Electrode

Abstract:
Hiden Analytical mass spectrometers provide direct real-time plasma monitoring for analysis of both process ion and process neutral species, addressing a pressure range from 10E-3mbar to atmosphere and all featuring our latest, fastest Series 8 PC interface. All systems are fully compatible with Windows 7 and XP operating systems.

Plasma Diagnostics for the Researcher

Warrington, UK | Posted on April 3rd, 2012

The EQ/PS Series offer optional positive/negative ion or positive ion-only measurement of process ion intensity, mass and ion energy, the pulse ion counting detector giving a continuous dynamic range of a full seven decades. Atomic mass range is up to 1000amu with energy ranges of +/-100eV and +/-1000eV. The advanced low-diameter ion transfer optic enables deep penetration of the sampling orifice up to 750mm within the process chamber. Multiple scan modes provides scanning of all key parameters for system setup optimisation, including scanning of mass range, process ion energy, electron multiplier voltage against ion intensity. An internal electron bombardment ion source enables ionisation of neutral species.

Pressure reduction stages with turbomolecular pumping are used to maintain mass spectrometer operation in a UHV environment - single stage, double stage or triple stage dependent on the process pressure. System options include magnetic screening, integrated driven electrodes, electron attachment mode for electro-negative species, linear motion drives and water cooling for high-power applications.

Applications include diverse areas of plasma etching, deposition, coating and process development including atmospheric plasma needle performance quantification.

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Contacts:
Hiden Analytical Ltd
420 Europa Boulevard
Warrington, WA5 7UN, England
tel: +44 (0)1925 445 225

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