Home > News > European project nurtures imprint litho stepper
August 30th, 2005
European project nurtures imprint litho stepper
Abstract:
A three-year European Union funded research program has produced an imprint lithography machine for sub-50-nanometer work, and the participants in the project plan to have a stepper available in 2006 suitable for work on 300-mm diameter wafers.
Source:
EETimes
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