Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


Home > Press > Picosun's ALD reactor installed at University of Helsinki

University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry

Picosun's ALD reactor installed at University of Helsinki

Posted on January 24, 2006

University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry. In making the announcement, Professor Mikko Ritala stated:

"Picosun's SUNALE™ ALD reactor has now been successfully delivered and installed. The first test runs gave excellent results on 150 mm wafers. We are very excited about this latest addition to our ALD reactor portfolio. One interesting pathway in near future research will be a modification of the reactor with the new feature we have invented and further developed in collaboration with Picosun. This will add a new dimension to ALD processing."

Juhana Kostamo, COO of Picosun Oy, commented: "I am very glad that University of Helsinki, one of the most highly regarded institutions of the ALD society, has approved an ALD reactor from Picosun. The design of our ALD reactors has matured to the gamma level which enables us to start high volume manufacturing of SUNALE™ R-series ALD tools. We are now drastically scaling up our production due to the strong customer interest. This, together with the optimized production processes, enables us to significantly lower our production costs, which will turn to the benefit of our customers."

Picosun Oy's SUNALE™ R-150 ALD reactor at University of Helsinki is equipped with the Advanced Control System for nanolaminate multilayer deposition and the proprietary Picosolid™ Heated Source System for solid and liquid low vapor pressure precursors.

SUNALE™ R-series ALD reactors are optimized for Atomic Layer Deposition method especially for MEMS and nanotechnology research and application development purposes.

Gamma level SUNALE™ R-series ALD reactors can be equipped with temperature stabilized Picosolution™ liquid sources, ventilated Picogases™ gas cabinets, proprietary new type Picosolid™ and Picosolid™ Booster solid sources for high and low vapour pressure solids and several different types of Picoloader™ load locks for manual, semi-automatic or fully automated cassette-to-cassette operation.

For more information, please contact Professor Mikko Ritala, tel. +358 9 191 50 193, or COO Juhana Kostamo, tel. +358 50 3699 565, email

Media Contact:
Juhana Kostamo
+358 50 3699 565
Fax: + 358 20 722 7012

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press


STMicroelectronics Keynotes on the Next MEMS Wave at MIG Conference Asia September 2nd, 2015

Iranian Scientists Create Best Conditions for Synthesis of Gold Nanolayers July 23rd, 2015

Robust new process forms 3-D shapes from flat sheets of graphene June 23rd, 2015

Slip sliding away: Graphene and diamonds prove a slippery combination June 10th, 2015


Room temperature magnetic skyrmions, a new type of digital memory? October 8th, 2015

Double the (quantum) fun: A detailed analysis of the electrical characteristics of a tiny transistor made from 2 quantum dots could help researchers design better devices to manipulate single electrons October 7th, 2015

First circularly polarized light detector on a silicon chip: Promises to expand use of polarized light for drug screening, surveillance, optical communications September 24th, 2015

Nanoelectronics could get a boost from carbon research: The smallest of electronics could one day have the ability to turn on and off on an atomic scale September 17th, 2015


Controllable protein gates deliver on-demand permeability in artificial nanovesicles October 9th, 2015

Faster design -- better catalysts: New method facilitates research on fuel cell catalysts October 9th, 2015

Performance of Polymeric Nanoparticles as Gene Carriers Studied by Iranian, Dutch Scientists October 9th, 2015

Newly discovered 'design rule' brings nature-inspired nanostructures one step closer: Computer sims and microscopy research at Berkeley Lab yield first atomic-resolution structure of a peptoid nanosheet October 8th, 2015


Oxford Instruments announces call for nominations for the 2016 Science Prizes for Europe and Americas October 7th, 2015

Organic semiconductors get weird at the edge: University of British Columbia research October 7th, 2015

Electron tomography with 3,487 images in 3.5 seconds: High-speed electron tomography sets new standards for 3-D images of the nanoworld October 6th, 2015

Rice news release: Smaller is better for nanotube analysis: Rice University's variance spectroscopy technique advances nanoparticle analysis September 30th, 2015

The latest news from around the world, FREE

  Premium Products
Only the news you want to read!
 Learn More
University Technology Transfer & Patents
 Learn More
Full-service, expert consulting
 Learn More

Nanotechnology Now Featured Books


The Hunger Project

Car Brands
Buy website traffic