Home > Press > Picosun's ALD reactor installed at University of Helsinki
University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry
Picosun's ALD reactor installed at University of Helsinki
Posted on January 24, 2006
University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry. In making the announcement, Professor Mikko Ritala stated:
"Picosun's SUNALE™ ALD reactor has now been successfully delivered and installed. The first test runs gave excellent results on 150 mm wafers. We are very excited about this latest addition to our ALD reactor portfolio. One interesting pathway in near future research will be a modification of the reactor with the new feature we have invented and further developed in collaboration with Picosun. This will add a new dimension to ALD processing."
Juhana Kostamo, COO of Picosun Oy, commented: "I am very glad that University of Helsinki, one of the most highly regarded institutions of the ALD society, has approved an ALD reactor from Picosun. The design of our ALD reactors has matured to the gamma level which enables us to start high volume manufacturing of SUNALE™ R-series ALD tools. We are now drastically scaling up our production due to the strong customer interest. This, together with the optimized production processes, enables us to significantly lower our production costs, which will turn to the benefit of our customers."
Picosun Oy's SUNALE™ R-150 ALD reactor at University of Helsinki is equipped with the Advanced Control System for nanolaminate multilayer deposition and the proprietary Picosolid™ Heated Source System for solid and liquid low vapor pressure precursors.
SUNALE™ R-series ALD reactors are optimized for Atomic Layer Deposition method especially for MEMS and nanotechnology research and application development purposes.
Gamma level SUNALE™ R-series ALD reactors can be equipped with temperature stabilized Picosolution™ liquid sources, ventilated Picogases™ gas cabinets, proprietary new type Picosolid™ and Picosolid™ Booster solid sources for high and low vapour pressure solids and several different types of Picoloader™ load locks for manual, semi-automatic or fully automated cassette-to-cassette operation.
For more information, please contact Professor Mikko Ritala, tel. +358 9 191 50 193, email@example.com or COO Juhana Kostamo, tel. +358 50 3699 565, email firstname.lastname@example.org.
+358 50 3699 565
Fax: + 358 20 722 7012
Copyright © Picosun Oy
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014
Carbyne morphs when stretched: Rice University calculations show carbon-atom chain would go metal to semiconductor July 21st, 2014
Leti to Present Technological Platforms Targeting Industry’s Needs for the Future at Semicon West Workshop: Presentation at STS Session to Focus on Leti Advanced Lithography Programs for 1x Nodes and on Silicon Photonics at TechXPot June 25th, 2014
Mirrorcle Technologies Opens New Company Headquarters May 27th, 2014
Grenoble Hosting SEMICON Europa Oct. 7-9, First Time Event Held in France: Leti’s 90-square-meter Booth Will Feature Portable Showroom To Demonstrate New Technology Innovations September 24th, 2014
SouthWest NanoTechnologies (SWeNT) Receives NIST Small Business Innovation Research (SBIR) Phase 1 Award to Produce Greater than 99% Semiconducting Single-Wall Carbon Nanotubes September 19th, 2014
Rice rolls 'neat' nanotube fibers: Rice University researchers' acid-free approach leads to strong conductive carbon threads September 15th, 2014
Excitonic Dark States Shed Light on TMDC Atomic Layers: Berkeley Lab Discovery Holds Promise for Nanoelectronic and Photonic Applications September 11th, 2014
Production of Filters for Separation of Water from Petroleum Products in Iran October 1st, 2014
Ad-REIC vaccine: A magic bullet for cancer treatment September 30th, 2014
New Topical Hemostatic Agent: Neutral Self-Assembling Peptide Hydrogel September 30th, 2014
Chemical interactions between silver nanoparticles and thiols: A comparison of mercaptohexanol again September 30th, 2014
Yale University and Leica Microsystems Partner to Establish Microscopy Center of Excellence: Yale Welcomes Scientists to Participate in Core Facility Opening and Super- Resolution Workshops October 20 Through 31, 2014 September 30th, 2014
Park Systems Announces Outsourced Analytical Services Including AFM Surface Imaging, Data Analysis and Interpretation September 30th, 2014
Iranian Scientists Determine Grain Size, Minimize Time of Nanocomposite Synthesis September 29th, 2014
Oxford Instruments launches 3rd annual Indian nanotechnology seminars in Kolkata and Delhi - sharing expertise with Nanotechnology researchers in India September 25th, 2014