- About Us
- Career Center
- Nano-Social Network
- Nano Consulting
- My Account
University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry
University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry. In making the announcement, Professor Mikko Ritala stated:
"Picosun's SUNALE™ ALD reactor has now been successfully delivered and installed. The first test runs gave excellent results on 150 mm wafers. We are very excited about this latest addition to our ALD reactor portfolio. One interesting pathway in near future research will be a modification of the reactor with the new feature we have invented and further developed in collaboration with Picosun. This will add a new dimension to ALD processing."
Juhana Kostamo, COO of Picosun Oy, commented: "I am very glad that University of Helsinki, one of the most highly regarded institutions of the ALD society, has approved an ALD reactor from Picosun. The design of our ALD reactors has matured to the gamma level which enables us to start high volume manufacturing of SUNALE™ R-series ALD tools. We are now drastically scaling up our production due to the strong customer interest. This, together with the optimized production processes, enables us to significantly lower our production costs, which will turn to the benefit of our customers."
Picosun Oy's SUNALE™ R-150 ALD reactor at University of Helsinki is equipped with the Advanced Control System for nanolaminate multilayer deposition and the proprietary Picosolid™ Heated Source System for solid and liquid low vapor pressure precursors.
SUNALE™ R-series ALD reactors are optimized for Atomic Layer Deposition method especially for MEMS and nanotechnology research and application development purposes.
Gamma level SUNALE™ R-series ALD reactors can be equipped with temperature stabilized Picosolution™ liquid sources, ventilated Picogases™ gas cabinets, proprietary new type Picosolid™ and Picosolid™ Booster solid sources for high and low vapour pressure solids and several different types of Picoloader™ load locks for manual, semi-automatic or fully automated cassette-to-cassette operation.
For more information, please contact Professor Mikko Ritala, tel. +358 9 191 50 193, email@example.com or COO Juhana Kostamo, tel. +358 50 3699 565, email firstname.lastname@example.org.
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
|Related News Press|
Robust new process forms 3-D shapes from flat sheets of graphene June 23rd, 2015
MEMS Industry Group Hosts Its First MEMS/Sensors Conference Session at Transducers 2015: MIG Speakers Will Explore Technology Transfer, Emerging MEMS/Sensors, Manufacturing Infrastructure and Process Technology, June 23 in Anchorage June 3rd, 2015
Janusz Bryzek Joins MEMS Industry Group to Lead New TSensors Division - New Division will Focus on Accelerating Development of Emerging Ultra-high Volume Sensors Supporting Abundance, mHealth and IoT May 14th, 2015
Exagan Raises €5.7 Million to Produce High-efficiency GaN-on-Silicon Power-switching Devices on 200mm Wafers: Leti-and-Soitec Spinout Focused on Becoming Leading European Source Of GaN Devices for Solar, Automotive, Telecoms and Infrastructure June 25th, 2015
Nanowires could be the LEDs of the future June 25th, 2015
Leti to Present Solutions to New Applications Using 3D Technologies at SEMICON West LetiDay Event, July 14: Leti Experts also Will Speak at TechXPOT Session on MEMS and STS Session on Lithography Cost-and-Productivity Issues Below 14nm June 22nd, 2015
Graphene heat-transfer riddle unraveled June 17th, 2015
Leti Announces Launch of First European Nanomedicine Characterisation Laboratory: Project Combines Expertise of 9 Partners in 8 Countries to Foster Nanomedicine Innovation and Facilitate Regulatory Approval July 1st, 2015
Compact, Low Cost, Accurate: Mini Positioning Stages, by PI June 30th, 2015