Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Picosun's ALD reactor installed at University of Helsinki

University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry

Picosun's ALD reactor installed at University of Helsinki

Posted on January 24, 2006

University of Helsinki announced that Picosun Oy's SUNALE™ R-150 ALD reactor has been installed and is performing well at the Laboratory of Inorganic Chemistry. In making the announcement, Professor Mikko Ritala stated:

"Picosun's SUNALE™ ALD reactor has now been successfully delivered and installed. The first test runs gave excellent results on 150 mm wafers. We are very excited about this latest addition to our ALD reactor portfolio. One interesting pathway in near future research will be a modification of the reactor with the new feature we have invented and further developed in collaboration with Picosun. This will add a new dimension to ALD processing."

Juhana Kostamo, COO of Picosun Oy, commented: "I am very glad that University of Helsinki, one of the most highly regarded institutions of the ALD society, has approved an ALD reactor from Picosun. The design of our ALD reactors has matured to the gamma level which enables us to start high volume manufacturing of SUNALE™ R-series ALD tools. We are now drastically scaling up our production due to the strong customer interest. This, together with the optimized production processes, enables us to significantly lower our production costs, which will turn to the benefit of our customers."

Picosun Oy's SUNALE™ R-150 ALD reactor at University of Helsinki is equipped with the Advanced Control System for nanolaminate multilayer deposition and the proprietary Picosolid™ Heated Source System for solid and liquid low vapor pressure precursors.

SUNALE™ R-series ALD reactors are optimized for Atomic Layer Deposition method especially for MEMS and nanotechnology research and application development purposes.

Gamma level SUNALE™ R-series ALD reactors can be equipped with temperature stabilized Picosolution™ liquid sources, ventilated Picogases™ gas cabinets, proprietary new type Picosolid™ and Picosolid™ Booster solid sources for high and low vapour pressure solids and several different types of Picoloader™ load locks for manual, semi-automatic or fully automated cassette-to-cassette operation.

For more information, please contact Professor Mikko Ritala, tel. +358 9 191 50 193, or COO Juhana Kostamo, tel. +358 50 3699 565, email

Media Contact:
Juhana Kostamo
+358 50 3699 565
Fax: + 358 20 722 7012

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press


Leti Scientists Participating in Sessions on Med Tech, Automotive Technologies, MEMS, Si-photonics and Lithography at SEMICON Europa: Teams also Will Demonstrate Technology Advances in Telecom, Data Fusion, Energy, Silicon Photonics and 3D Integration October 18th, 2016

MEMS & Sensors Industry Group Reveals Tech Showcase Finalists --MSIG hosts competition for unique MEMS/sensors demos at MEMS & Sensors Executive Congress, 11/10/16 in Scottsdale, AZ October 11th, 2016

Manufacturing microspheres: Technique mass-produces uniform, encapsulated particles for pharmaceuticals, many other uses October 6th, 2016

Leti and Taiwanese Tech Organizations Sponsoring Workshop in Taipei on MEMS, IoT, Smart Lighting Applications, System Reliability & Security September 28th, 2016


Scientists find technique to improve carbon superlattices for quantum electronic devices: In a paradigm shift from conventional electronic devices, exploiting the quantum properties of superlattices holds the promise of developing new technologies October 20th, 2016

Metamaterial uses light to control its motion October 10th, 2016

Core technology springs from nanoscale rods: Rice University lab turns nanorods into multistate switches with an electron beam October 10th, 2016

Electrons in graphene behave like light, only better: Researchers discover that electrons mimic light in graphene, confirming a 2007 prediction – their finding may enable new low power electronics and lead to new experimental probes October 5th, 2016


Nanoantenna lighting-rod effect produces fast optical switches October 24th, 2016

New nanomedicine approach aims to improve HIV drug therapies October 24th, 2016

New method increases energy density in lithium batteries: Novel technique may lead to longer battery life in portable electronics and electrical vehicles October 24th, 2016

KaSAM-2016: International Conference on Material Sciences has successfully concluded in Pokhara of Western Nepal October 24th, 2016


Nanosciences: Genes on the rack October 21st, 2016

Smashing metallic cubes toughens them up: Rice University scientists fire micro-cubes at target to change their nanoscale structures October 20th, 2016

EM Resolutions announce the availability of Kleindiek Nanotechnik’s new cryo microgripper for cryo-FIB lift-out October 18th, 2016

The University of Applied Sciences in Upper Austria uses Deben tensile stages as an integral part of their computed tomography research and testing facility October 18th, 2016

The latest news from around the world, FREE

  Premium Products
Only the news you want to read!
 Learn More
University Technology Transfer & Patents
 Learn More
Full-service, expert consulting
 Learn More

Nanotechnology Now Featured Books


The Hunger Project