Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International



Home > Press > Heidelberg Instruments to support micro and nano research at the Cornell NanoScale Science and Technology Facility

Abstract:
Heidelberg Instruments announced the sale of an advanced DWL 2000 maskless laser lithography system to the Cornell NanoScale Science and Technology Facility, located in Ithaca, New York.

Heidelberg Instruments to support micro and nano research at the Cornell NanoScale Science and Technology Facility

Heidelberg, Germany | Posted on November 26th, 2009

The DWL 2000 system will enable the user to expose sub micron structures on photoresist, with an active write area of up to 200 mm by 200 mm.

"CNF has a long history of providing in-house mask making capability to facility users at an affordable cost. This allows rapid cycle time from concept to prototype. CNF has recently installed a modern DUV (248nm) stepper that requires 0.7 Ám features at the mask. The current tools render mask production too slow to meet this new requirement, creating an economic barrier to using the DUV system. The new DWL 2000 system from Heidelberg Instruments combines the large high speed scanning field with high resolution optics and stage precision that recovers the low cost structure for in-house mask fabrication." states Don Tennant, Director of Operations at the Cornell NanoScale Science and Technology Facility.

####

About Heidelberg Instruments
With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

About Cornell NanoScale Science and Technology Facility

The Cornell NanoScale Science & Technology Facility (CNF) is a national user facility that supports a broad range of nanoscale science and technology projects by providing state-of-the-art resources coupled with expert staff support. 2007 marked its 30th year in operation. Research at CNF encompasses physical sciences, engineering, and life sciences, and has a strong inter-disciplinary emphasis. Over 700 users per year (50% of whom come from outside Cornell) use the fabrication, synthesis, computation, characterization, and integration resources of CNF to build structures, devices, and systems from atomic to complex length-scales.

For more information, please click here

Contacts:
Heidelberg Instruments GmbH
Tullastrasse 2
D-69126 Heidelberg
Germany
Phone: (+49) 6221 34 30 0
Fax: (+49) 6221 34 30 30


Copyright © Heidelberg Instruments GmbH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Cornell NanoScale Science and Technology Facility

Related News Press

News and information

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Gene therapy relieves back pain, repairs damaged disc in mice: Study suggests nanocarriers loaded with DNA could replace opioids May 17th, 2024

Shedding light on perovskite hydrides using a new deposition technique: Researchers develop a methodology to grow single-crystal perovskite hydrides, enabling accurate hydride conductivity measurements May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Announcements

Virginia Tech physicists propose path to faster, more flexible robots: Virginia Tech physicists revealed a microscopic phenomenon that could greatly improve the performance of soft devices, such as agile flexible robots or microscopic capsules for drug delivery May 17th, 2024

Diamond glitter: A play of colors with artificial DNA crystals May 17th, 2024

Finding quantum order in chaos May 17th, 2024

Oscillating paramagnetic Meissner effect and Berezinskii-Kosterlitz-Thouless transition in cuprate superconductor May 17th, 2024

Tools

First direct imaging of small noble gas clusters at room temperature: Novel opportunities in quantum technology and condensed matter physics opened by noble gas atoms confined between graphene layers January 12th, 2024

New laser setup probes metamaterial structures with ultrafast pulses: The technique could speed up the development of acoustic lenses, impact-resistant films, and other futuristic materials November 17th, 2023

Ferroelectrically modulate the Fermi level of graphene oxide to enhance SERS response November 3rd, 2023

The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project