Home > Press > PSI Order for Vistec
![]() |
Abstract:
Vistec Lithography Inc. has recently received an order from the Paul Scherrer Institute (Switzerland) for a Vistec EBPG5000plus electron beam lithography system.
The Paul Scherrer Institute (PSI) holds a prominent position within the Swiss research and education environment. As a user laboratory the PSI develops and operates complex research facilities and equipment to serve both the R&D sector and the industry.
The new electron-beam lithography system will be installed at the Laboratory for Micro - and Nanotechnology (LMN) of the Paul Scherer Institute. It is required for the research on the optic, electronic, and magnetic properties of nanostructures. PSI's large-scale experimental facilities and specialized nanofabrication technologies available at LMN offer unique possibilities for these investigations. In addition, advanced nanodevices such as diffractive x-ray optical elements will be fabricated for internal and external customers. "The system will help us to keep track of our challenging research roadmap" says Dr. Christian David, Nanopatterning Group Manager at the LMN.
The EBPG5000plus is in line with other Vistec electron-beam lithography systems already installed at leading edge research institutes worldwide. Based on reliable and well-proven system architecture, the system provides a spot size down to <2.5nm at 100keV beam energy, thus allowing nano-lithography structures smaller than 8nm to be routinely generated. As a result of its high flexibility and easy-to-use software the EBPG5000plus has become the "system of choice" in the research community.
"We are extremely proud to have received this order from the Paul Scherrer Institute, one of the leading European research institutes. This will continue our successful cooperation into the future", says Mike Butler, Product Manager for Gaussian Beam Systems at Vistec Lithography Inc.
####
About Vistec Lithography Inc.
Vistec Electron Beam Lithography Group is providing leading edge technology solutions in all areas of advanced lithography, both in production for direct write and mask making as well as in applied research and nanotechnology. The company serves customers in semiconductor industry including compound semiconductor and mask making, advanced research, optics and emerging markets like nanotechnology.
For more information, please click here
Copyright © Vistec Lithography Inc.
If you have a comment, please Contact us.Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Related News Press |
News and information
Flexible electronics integrated with paper-thin structure for use in space January 17th, 2025
Quantum engineers ‘squeeze’ laser frequency combs to make more sensitive gas sensors January 17th, 2025
Chip Technology
Enhancing transverse thermoelectric conversion performance in magnetic materials with tilted structural design: A new approach to developing practical thermoelectric technologies December 13th, 2024
Bringing the power of tabletop precision lasers for quantum science to the chip scale December 13th, 2024
Nanofibrous metal oxide semiconductor for sensory face November 8th, 2024
Announcements
Quantum engineers ‘squeeze’ laser frequency combs to make more sensitive gas sensors January 17th, 2025
The National Space Society Congratulates SpaceX on Starship’s 7th Test Flight: Latest Test of the Megarocket Hoped to Demonstrate a Number of New Technologies and Systems January 17th, 2025
Tools
New 2D multifractal tools delve into Pollock's expressionism January 17th, 2025
Turning up the signal November 8th, 2024
Quantum researchers cause controlled ‘wobble’ in the nucleus of a single atom September 13th, 2024
New-Contracts/Sales/Customers
Bruker Light-Sheet Microscopes at Major Comprehensive Cancer Center: New Advanced Imaging Center Powered by Two MuVi and LCS SPIM Microscopes March 25th, 2021
Arrowhead Pharmaceuticals Announces Closing of Agreement with Takeda November 27th, 2020
Veeco Announces Aledia Order of 300mm MOCVD Equipment for microLED Displays: Propel™ Platform First 300mm System with EFEM Designed for Advanced Display Applications October 20th, 2020
GREENWAVES TECHNOLOGIES Announces Next Generation GAP9 Hearables Platform Using GLOBALFOUNDRIES 22FDX Solution October 16th, 2020
![]() |
||
![]() |
||
The latest news from around the world, FREE | ||
![]() |
![]() |
||
Premium Products | ||
![]() |
||
Only the news you want to read!
Learn More |
||
![]() |
||
Full-service, expert consulting
Learn More |
||
![]() |