Home > News > New Targets May Hit Bull’s-Eye for Chip Makers
December 7th, 2006
New Targets May Hit Bull’s-Eye for Chip Makers
Abstract:
The bull's-eye solution to the semiconductor industry's hunt for more exact means to measure the relative positions of ever-tinier devices squeezed by the millions onto silicon chips might be new types of targets, and not expensive new equipment, according to modeling studies by the National Institute of Standards and Technology.
Source:
physorg.com
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