Home > News > XVision 300 creates 3D defect analysis at the nano range
August 21st, 2006
XVision 300 creates 3D defect analysis at the nano range
Abstract:
Carl Zeiss SMT's Nano Technology Systems division (Carl Zeiss NTS) and SII NanoTechnology Inc. (SIINT) have jointly introduced the XVision 300 Focused Ion Beam (FIB)/Scanning Electron Microscope (SEM) hybrid system.
Source:
fabtech.org
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