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Home > News > 'Solid immersion' probed for maskless litho

September 14th, 2004

'Solid immersion' probed for maskless litho

Abstract:
The current craze in lithography is immersion technology. But researchers from the University of Arizona have put a new twist on the technology, by devising so-called "solid immersion." In a paper at the Bacus Symposium for Photomask Technology, the University of Arizona is expected to describe the means of enabling maskless lithography, by using "solid immersion lens nano-probes."

Source:
EETimes

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