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May 10th, 2004
Software corrects chip errors early
Abstract:
Microchip miniaturization is making quality control-related measurement of features during the production process increasingly difficult. New National Institute of Standards and Technology software and research results should help manufacturers reduce errors in measuring microchip features which today measure less than 37 nanometers in width and are expected to shrink to 25 nanometers by 2007.
Source:
EurekAlert
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