Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > First Capacitive Transducer with 13nm Gap

Abstract:
Fabrication of sub-30nm gap for capacitive transducers seemed impossible, until recently. Researchers at UC Berkeley successfully demonstrated a 13nm-gap capacitive resonator, which will improve sensor and resonator performance by orders of magnitude.

First Capacitive Transducer with 13nm Gap

Berkeley, CA | Posted on July 27th, 2017

Capacitive-gap transduced resonators are well known to provide high on-chip quality factors (Q), with values reaching 150,000 at VHF and 40,000 at 3GHz. Qs this high enable 0.1% bandwidth channel-select filters with low insertion loss and high rejection for ultra-low power transceivers. At HF (from 3-30MHz), capacitive-gap transduced resonators also post strong electromechanical coupling, as gauged by (Cx/Co), up to 30%, which outperforms all other technologies. However, application of these transducers as the main filters of the smartphone (with market value more than $10b) requires strong electromechanical coupling at gigahertz frequencies. To achieve such a high coupling, transducers need to have gap spacing as small as 20 nanometers or less.
Researchers at University of California Berkeley demonstrated electrode-to-resonator gaps as small as 13.2nm achieved on a 59.5-MHz capacitive-gap transduced disk resonator which enabled a measured electromechanical coupling strength Cx/Co greater than 1.62% at a bias voltage of only 5.5V, which exceeds that of any competing technology, macro or micro, capacitive or piezoelectric, at similar VHF frequencies, all while retaining an unloaded quality factor Q of 29,640. Several key discoveries contribute to this successful demonstration, which include a novel polysilicon etch recipe that enables considerably smoother etch sidewalls than previously achievable, allowing more uniform sidewall sacrificial layer deposition and preventing structure pull-in by removing disparities and their associated strong electric fields. The implementation of small gap has improved the electromechanical coupling by more than 10x compared to previous resonators and its figure-of-merit measured as kt
2Q=576.2 holds the worlds record. This combination of high Cx/Co and Q, which has long been a primary driver for RF MEMS research, stands to not only cut VHF low noise oscillator power consumption to sub-W levels, but now creates opportunities to apply MEMS resonator technology to the highly profitable and lucrative RF filter market for smartphones.

####

For more information, please click here

Contacts:
Jalal Naghsh Nilchi
Phone: 510-918-4346
Fax:
E-mail:

Copyright © University of California Berkeley

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Hardware

All wired up: New molecular wires for single-molecule electronic devices August 31st, 2018

Quantum Interference May Be Key to Smaller Insulators: Breakthrough could jumpstart further miniaturization of transistors June 6th, 2018

Building nanomaterials for next-generation computing: Scientists recently developed a blueprint to fabricate new nanoheterostructures using 2D materials June 1st, 2018

Novel method to fabricate nanoribbons from speeding nano droplets May 29th, 2018

MEMS

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

Cleaning or Etching Items with Unique Geometries Requires Specialized Expertise June 27th, 2018

Chip Technology

Researchers managed to prevent the disappearing of quantum information September 14th, 2018

New devices based on rust could reduce excess heat in computers: Physicists explore long-distance information transmission in antiferromagnetic iron oxide September 14th, 2018

New photonic chip promises more robust quantum computers September 14th, 2018

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Discoveries

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

NUS researchers invent new test kit for quick, accurate and low-cost screening of diseases: Test results are denoted by a color change and could be further analyzed by a smartphone app, making it attractive as a point-of-care diagnostic device September 19th, 2018

Announcements

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Silver nanoparticles are toxic for aquatic organisms: A research team at the UPV/EHU-University of the Basque Country has analysed how zebrafish are affected in the long term by exposure to silver particles September 19th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project