Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > First Capacitive Transducer with 13nm Gap

Abstract:
Fabrication of sub-30nm gap for capacitive transducers seemed impossible, until recently. Researchers at UC Berkeley successfully demonstrated a 13nm-gap capacitive resonator, which will improve sensor and resonator performance by orders of magnitude.

First Capacitive Transducer with 13nm Gap

Berkeley, CA | Posted on July 27th, 2017

Capacitive-gap transduced resonators are well known to provide high on-chip quality factors (Q), with values reaching 150,000 at VHF and 40,000 at 3GHz. Q’s this high enable 0.1% bandwidth channel-select filters with low insertion loss and high rejection for ultra-low power transceivers. At HF (from 3-30MHz), capacitive-gap transduced resonators also post strong electromechanical coupling, as gauged by (Cx/Co), up to 30%, which outperforms all other technologies. However, application of these transducers as the main filters of the smartphone (with market value more than $10b) requires strong electromechanical coupling at gigahertz frequencies. To achieve such a high coupling, transducers need to have gap spacing as small as 20 nanometers or less.
Researchers at University of California Berkeley demonstrated electrode-to-resonator gaps as small as 13.2nm achieved on a 59.5-MHz capacitive-gap transduced disk resonator which enabled a measured electromechanical coupling strength Cx/Co greater than 1.62% at a bias voltage of only 5.5V, which exceeds that of any competing technology, macro or micro, capacitive or piezoelectric, at similar VHF frequencies, all while retaining an unloaded quality factor Q of 29,640. Several key discoveries contribute to this successful demonstration, which include a novel polysilicon etch recipe that enables considerably smoother etch sidewalls than previously achievable, allowing more uniform sidewall sacrificial layer deposition and preventing structure pull-in by removing disparities and their associated strong electric fields. The implementation of small gap has improved the electromechanical coupling by more than 10x compared to previous resonators and its figure-of-merit measured as kt
2Q=576.2 holds the world’s record. This combination of high Cx/Co and Q, which has long been a primary driver for RF MEMS research, stands to not only cut VHF low noise oscillator power consumption to sub-µW levels, but now creates opportunities to apply MEMS resonator technology to the highly profitable and lucrative RF filter market for smartphones.

####

For more information, please click here

Contacts:
Jalal Naghsh Nilchi
Phone: 510-918-4346
Fax:
E-mail:

Copyright © University of California Berkeley

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Hardware

Quantum Interference May Be Key to Smaller Insulators: Breakthrough could jumpstart further miniaturization of transistors June 6th, 2018

Building nanomaterials for next-generation computing: Scientists recently developed a blueprint to fabricate new nanoheterostructures using 2D materials June 1st, 2018

Novel method to fabricate nanoribbons from speeding nano droplets May 29th, 2018

Switching with molecules: Molecular switch will facilitate the development of pioneering electro-optical devices May 25th, 2018

MEMS

Executives Explore Key Megatrends and Innovations in MEMS, Sensors, Imaging Tech at SEMI-MSIG European Summits: Speakers to share developments in smart automotive, smart cities, smart industrial, biomedical, consumer and IoT, September 19-21, 2018 in Grenoble, France June 19th, 2018

HTA to Present European Strategy for Competitive Micro- and Nanotechnologies & Smart Systems: Special Event in Brussels on April 24 Gathers Research Institutes’ CEOs, European Commissioners and Key European Industrials April 17th, 2018

New approach to measuring stickiness could aid micro-device design March 8th, 2018

MEMS chips get metatlenses: Combining metasurface lenses with MEMS technology could add high-speed scanning and enhance focusing capability of optical systems February 21st, 2018

Chip Technology

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Making quantum puddles: Physicists discover how to create the thinnest liquid films ever June 13th, 2018

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: “From Electrons to Photons” Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

Nanometrics Updates Time of Webcast at Stifel 2018 Cross Sector Insight Conference June 12th, 2018

Discoveries

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Camouflaged nanoparticles used to deliver killer protein to cancer June 17th, 2018

Announcements

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project