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Home > Press > Cambridge NanoTech Joins Stanford University's Center for Integrated Systems for Industrial & Academic Research Collaboration

Abstract:
Multiple Cambridge NanoTech Thermal & Plasma ALD Systems at Stanford University for Advanced Materials Research

Cambridge NanoTech Joins Stanford University's Center for Integrated Systems for Industrial & Academic Research Collaboration

Cambridge, MA | Posted on June 15th, 2010

Cambridge NanoTech, the world leader in Atomic Layer Deposition (ALD) science and equipment, today announced that they have partnered with Stanford University's Center for Integrated Systems (CIS), a partnership between academia and industry that supports leading edge research into semiconductor and advanced electronics. In addition, Stanford University is now outfitted with five Cambridge NanoTech ALD systems.

"Cambridge NanoTech is honored to collaborate with Stanford on developing world-class research and real-world applications," said Ganesh Sundaram, Cambridge NanoTech VP of Technology. "We are excited to bring together forward-thinking researchers with access to all the resources and support needed to advance ALD research to the next level."

Stanford has three Cambridge NanoTech Savannah thermal ALD systems installed and most recently acquired a Fiji F202 dual chamber plasma ALD system. The latest Savannah and Fiji systems are being used in the Stanford Nanofabrication Facility (SNF) to fabricate ultra-thin nanomechanical switches. Researchers also have been using the Savannah to explore materials with electrical properties and low surface energies such as Titanium Nitride and Tungsten.

"Stanford was our first Savannah customer in 2004," said Jill Becker, Founder of Cambridge NanoTech. "I'm very pleased to have worked so closely with them the last several years and to further develop our relationship by joining the cutting-edge research efforts at CIS."

Cambridge NanoTech's Fiji F202 plasma ALD system at the SNF will be used to grow oxide and nitride films in one of the Fiji chambers and the second Fiji chamber will be available for more exotic possibilities such as working with gold, nanotubes, and graphene.

As one of the 14 National Nanotechnology Infrastructure Network (NNIN) sites, the SNF offers extensive support in nanoscale fabrication, synthesis, characterization, modeling, design, computation and training in an open, hands-on environment, available to all qualified users. Cambridge NanoTech currently has ALD tools installed in nearly half of all NNIN sites.

Cambridge NanoTech will be attending the ALD 2010 conference in Seoul, South Korea during the week of June 22, where our scientists will present ALD research on process optimization of low vapor pressure precursors and growth of low resistivity TiN from metal-organic precursors.

####

About Cambridge NanoTech
Cambridge NanoTech delivers Atomic Layer Deposition (ALD) systems capable of depositing ultra-thin films that are used in a wide variety of research and industrial applications. Our manufacturing ALD systems are used in the production of semiconductors, flat panel displays, photovoltaics and solid state lighting. Cambridge NanoTech research systems are used by world class scientists on five continents to study superior ALD film properties such as electrical, anti-bacterial, UV-blocking and anti-reflection.

About Stanford University Center for Integrated Systems
The Center for Integrated Systems is a partnership between Stanford University and member industrial firms. Founded in 1982, CIS fosters industry and academic research relationships that also yields world-class Ph.D. graduates in fields related to integrated systems."Integrated systems" refers to complex interactions across hardware and software at several levels of structure, and to semiconductor, electronics, and computer systems within the context of real-world applications. CIS research, Ph.D. fellowships, and information-exchange programs draw on the unique strengths of the University and industry to enhance the productivity and competitiveness of both sectors.

For more information, please click here

Contacts:
Cambridge NanoTech
Ray Ritter
(617) 674 8800

Copyright © Cambridge NanoTech

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