Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Novellus Systems, IBM and the UAlbany NanoCollege Establish Strategic Partnership at CNSE's Albany NanoTech Complex

Abstract:
First Program Targets Development of Photoresist Strip Processes for Advanced Computer Chip Technologies

Novellus Systems, IBM and the UAlbany NanoCollege Establish Strategic Partnership at CNSE's Albany NanoTech Complex

San Jose, CA & East Fishkill, NY & Albany, NY | Posted on February 11th, 2010

Novellus Systems (Nasdaq: NVLS), IBM Corporation (NYSE: IBM) and the College of Nanoscale Science and Engineering (CNSE) today announced the establishment of a strategic partnership at CNSE's Albany NanoTech Complex targeting the development of semiconductor process solutions for 22nm and beyond nanoelectronics technologies.

The most advanced semiconductors in volume production today have 45 and 32nm circuitry, with devices at 28nm and below under development. The move to each technology generation can result in smaller, faster, more efficient chips that improve the performance of products ranging from servers to smartphones. Novellus joins the ecosystem of semiconductor companies at CNSE's Albany NanoTech Complex that are working with IBM, its technology alliance partners, and CNSE research teams to address the challenges of moving to each technology generation.

The first project under this agreement is designed to enable advanced, residue-free photoresist strip technologies for leading-edge processes for the 28nm and 22nm nodes. Photoresist stripping is a critical process step for defining the wiring in a semiconductor chip. The scope of the collaboration will encompass a range of photoresist removal processes, including high-dose implant strip (HDIS) processes that are compatible with high-k metal gate technology, and damage-free etch strip chemistry used for ultra-low-k dielectric structures.

IBM brings to the collaboration extensive semiconductor technology experience and a proven track record of technology development and manufacturing that can help accelerate development of 28nm and smaller technology dimensions. Novellus' GxT® advanced photoresist strip platform will be used at IBM's East Fishkill facility and CNSE's Albany NanoTech Complex for these new, sophisticated strip applications. Novellus has demonstrated industry-leading cleaning results on the GxT platform using specialized, non-oxidizing strip chemistries that can achieve a silicon and oxide loss of less than 0.1nm. CNSE provides world-class intellectual capital and unparalleled technological infrastructure at its Albany NanoTech Complex, the most advanced in the academic world.

"IBM is committed to working with Novellus Systems and the College of Nanoscale Science and Engineering in this newly-established technology collaboration, where our initial focus is on optimizing these advanced photoresist strip technologies for our industry-leading high-k metal gate transistor structures," said Paul Farrar, vice president of process development, IBM. "Close collaboration with equipment suppliers through the consortium of world-class companies at CNSE's Albany NanoTech is critical to bringing leading-edge technology to market for the benefit of IBM and its alliance partners."

"IBM has a long-standing reputation for developing state-of-the-art semiconductor manufacturing processes," said Tim Archer, Novellus' executive vice president of worldwide sales, marketing, and customer satisfaction. "Novellus is excited to be working with IBM and CNSE in this strategic partnership focused on advancing the science of photoresist strip and clean."

"The UAlbany NanoCollege looks forward to working in partnership with industry leaders Novellus Systems and IBM to accelerate the development and deployment of innovative technologies that will support nanoelectronics manufacturing," said Richard Brilla, vice president for strategy, alliances and consortia for CNSE. "This collaboration will enable the integration of leading-edge process and equipment technologies to help address the critical needs of industry, further demonstrating the technology leadership of IBM and its alliance partners."

####

About Novellus Systems
Novellus' GxT photoresist strip system is designed for critical logic device manufacturing process steps that demand low silicon loss and ultra-low defectivity. Novellus Systems, Inc. (Nasdaq: NVLS) is a leading provider of advanced process equipment for the global semiconductor industry. The company's products deliver value to customers by providing innovative technology backed by trusted productivity. An S&P 500 company, Novellus is headquartered in San Jose, Calif. with subsidiary offices across the globe. For more information please visit www.novellus.com

About IBM

For more information about IBM's semiconductor products and services, visit www.ibm.com/technology.

About CNSE

The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech. For more information, visit www.cnse.albany.edu.

Novellus and GxT are registered trademarks of Novellus Systems, Inc.


For more information, please click here

Contacts:
Novellus Systems Inc.Corporate Headquarters
Novellus Systems, Inc.
4000 North First Street
San Jose, CA 95134
Tel: (408) 943-9700


Peter Wolters GmbH
A Novellus Systems Company
Buesumer Strasse 96
D-24768 Rendsburg
Germany
Tel: (49) 4331-458-0
www.peter-wolters.com

Copyright © PrNewswire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

New method allows for greater variation in band gap tunability: The method can change a material's electronic band gap by up to 200 percent January 31st, 2015

Evidence mounts for quantum criticality theory: Findings bolster theory that quantum fluctuations drive strange electronic phenomena January 30th, 2015

Everything You Need To Know About Nanopesticides January 30th, 2015

DNA nanoswitches reveal how life's molecules connect: An accessible new way to study molecular interactions could lower cost and time associated with discovering new drugs January 30th, 2015

Academic/Education

Rice's Naomi Halas to direct Smalley Institute: Optics pioneer will lead Rice's multidisciplinary science institute January 15th, 2015

SUNY Board Appoints Dr. Alain Kaloyeros as Founding President of SUNY Polytechnic Institute January 13th, 2015

CNSE's Smart System Technology & Commercialization Center Successfully Recertifies as ISO 9001:2008 January 12th, 2015

SUNY Poly Now Accepting Applications to the Colleges of Nanoscale Science and Engineering for Fall 2015: Full Scholarships Available to Incoming CNSE Students January 7th, 2015

Chip Technology

Creating new materials with quantum effects for electronics January 29th, 2015

Advantest to Exhibit at SEMICON Korea in Seoul, South Korea February 4-6 Showcasing Broad Portfolio of Semiconductor Products, Technologies and Solutions January 29th, 2015

Researchers Make Magnetic Graphene: UC Riverside research could lead to new multi-functional electronic devices January 27th, 2015

Nanometrics to Present at the Stifel 2015 Technology, Internet and Media Conference January 27th, 2015

Nanoelectronics

Electronic circuits with reconfigurable pathways closer to reality January 26th, 2015

Rice-sized laser, powered one electron at a time, bodes well for quantum computing January 15th, 2015

Rapid journey through a crystal lattice: Researchers measure how fast electrons move through single atomic layers January 14th, 2015

A new step towards using graphene in electronic applications January 14th, 2015

Announcements

New method allows for greater variation in band gap tunability: The method can change a material's electronic band gap by up to 200 percent January 31st, 2015

Evidence mounts for quantum criticality theory: Findings bolster theory that quantum fluctuations drive strange electronic phenomena January 30th, 2015

Everything You Need To Know About Nanopesticides January 30th, 2015

DNA nanoswitches reveal how life's molecules connect: An accessible new way to study molecular interactions could lower cost and time associated with discovering new drugs January 30th, 2015

Tools

Hiden Gas Analysers at PITTCON 2015 | Visit us on Booth No. 1127 January 29th, 2015

Advantest to Exhibit at SEMICON Korea in Seoul, South Korea February 4-6 Showcasing Broad Portfolio of Semiconductor Products, Technologies and Solutions January 29th, 2015

Park Systems Announces Innovations in Bio Cell Analysis with the Launch of Park NX-Bio, the only 3-in-1 Imaging Nanoscale Tool Available for Life Science Researchers January 29th, 2015

2015 Nanonics Image Contest January 29th, 2015

Alliances/Partnerships/Distributorships

The Original Frameless Shower Doors Installs DFI's FuseCube™ to Offer Hydrophobic Protective Coating as a Standard Feature: First DFI FuseCube™ Installed on the East Coast to Enable Key Differentiator for the Original Frameless Shower Doors January 29th, 2015

Entanglement on a chip: Breakthrough promises secure communications and faster computers January 27th, 2015

Smart keyboard cleans and powers itself -- and can tell who you are January 21st, 2015

DNA 'glue' could someday be used to build tissues, organs January 14th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE