Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Abstract:
The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Espoo, Finland, and Berkeley, CA | Posted on April 1st, 2009

The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

"Picosun made a point in sending both an equipment and process specialist. Our install was unique since we added additional custom hardware and the Picosun team worked with my engineers to accommodate this special request. The install time met Picosun's estimate and the deposition tests were quickly within specification", says Dr. Bill Flounders, Technology Manager of Berkeley Microfabrication Laboratory.

"Picosun and Berkeley Microfabrication Laboratory have signed a cooperative research agreement which will benefit us both. We, as a leading ALD tool designer and manufacturer, have identified working together with the leading research institutions to form the basis of our technology and process development strategy", says Juhana Kostamo, Managing Director of Picosun. "For Picosun, working together with world class scientists at UC Berkeley is a privilege", Kostamo says.

"For us, the Picosun tool represented the best combination of cost and capability. The SUNALE(TM) R-150 ALD reactor was qualified for Al2O3 deposition with film deposition rate of 1.02 angstrom per cycle and 1 sigma non-uniformity less than 1% across the wafer. Picosun technical support has been excellent and I expect an ongoing constructive relationship that will benefit our lab members and enhance Picosun's position among US university research centres", Dr. Flounders says.

At Berkeley Microfabrication Laboratory, Professor Clark Nguyen and his research group are using ALD to coat micromechanical resonators so that the gaps between their structures and electrodes can be reduced substantially. Reducing such gaps to 10's of nanometres helps to reduce the impedances of these devices for wireless communication applications.

Professor Tsu-Jae King Liu and her research group use the SUNALE(TM) R-150 ALD tool to conformally deposit high-permittivity dielectric materials to precise thicknesses, to enable new switching devices for integrated circuits that offer better energy efficiency than conventional complementary metal­oxide­semiconductor (CMOS) transistors.

In 1960, Professors D. O. Pederson, T. E. Everhart, and P. L. Morton produced plans for the world's first university integrated circuit lab. This was the beginning of today's Berkeley Microfabrication Laboratory. Over the years, membership of the laboratory has increased to over 500 presently. The present Microlab is in its third decade and will continue operating until a new laboratory is completed. The migration of the Microlab into the new Marvell Nanolab will start this year.

Picosun develops and manufactures Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun represents continuity to over three decades of ALD reactor manufacturing in Finland. Picosun is based in Espoo, Finland and has its US headquarters in Detroit, Michigan. SUNALE(TM) ALD process tools are installed in various universities, research institutes and companies across Europe, USA and Asia.

Dr Tuomo Suntola, inventor of ALD technology, is Member of the Board of Directors of Picosun. World's most experienced ALD reactor designer Sven Lindfors is Picosun´s Chief Technology Officer and one of the founders of the company. Picosun Oy is a part of Stephen Industries Inc Oy.

####

About Picosun
Picosun is an international equipment manufacturer with a world-wide sales and service organization. We develop and manufacture Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun provides the customers with versatile, reliable, and user-friendly ALD process tools, which offer unique scalability from research to production. Picosun is based in Espoo, Finland and has its US headquarters in Detroit. SUNALE™ ALD process tools have been installed in various universities, research institutes, and companies across Europe, USA, and Asia.

For more information, please click here

Contacts:
Picosun Oy, Mr. Juhana Kostamo, Managing Director
Tietotie 3, FI-02150 Espoo, Finland
Tel. +358 50 321 1955
Fax. +358 20 722 7012;
e-mail: info (at) picosun.com;
www.picosun.com

Copyright © Picosun

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Keysight Technologies Shifts to Direct Sales of High-Performance Products in North America March 3rd, 2015

Cambrios and Heraeus Jointly Create New, High-Conductivity Transparent Conductors: Two Companies' Combined Products Dramatically Extend Flexible Substrate Capabilities for Next-Generation Mass-Market Technology Products March 3rd, 2015

The taming of magnetic vortices: Unified theory for skyrmion-materials March 3rd, 2015

Democratizing synthetic biology: New method makes research cheaper, faster, and more accessible March 3rd, 2015

Chip Technology

Cambrios and Heraeus Jointly Create New, High-Conductivity Transparent Conductors: Two Companies' Combined Products Dramatically Extend Flexible Substrate Capabilities for Next-Generation Mass-Market Technology Products March 3rd, 2015

The taming of magnetic vortices: Unified theory for skyrmion-materials March 3rd, 2015

Black phosphorus is new 'wonder material' for improving optical communication March 3rd, 2015

International research partnership tricks the light fantastic March 2nd, 2015

Nanoelectronics

New nanowire structure absorbs light efficiently: Dual-type nanowire arrays can be used in applications such as LEDs and solar cells February 25th, 2015

Ultra-thin nanowires can trap electron 'twisters' that disrupt superconductors February 24th, 2015

Improved fire detection with new ultra-sensitive, ultraviolet light sensor February 17th, 2015

Nanotechnology facility planned in Lund, Sweden: A production facility for start-ups in the field of nanotechnology may be built in the Science Village in Lund, a world-class research and innovation village that is also home to ESS, the European Spallation Source February 15th, 2015

Announcements

The taming of magnetic vortices: Unified theory for skyrmion-materials March 3rd, 2015

Democratizing synthetic biology: New method makes research cheaper, faster, and more accessible March 3rd, 2015

Pens filled with high-tech inks for do-it-yourself sensors March 3rd, 2015

Black phosphorus is new 'wonder material' for improving optical communication March 3rd, 2015

Tools

Keysight Technologies Shifts to Direct Sales of High-Performance Products in North America March 3rd, 2015

Forbidden quantum leaps possible with high-res spectroscopy March 2nd, 2015

International research partnership tricks the light fantastic March 2nd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE