Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Abstract:
The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Espoo, Finland, and Berkeley, CA | Posted on April 1st, 2009

The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

"Picosun made a point in sending both an equipment and process specialist. Our install was unique since we added additional custom hardware and the Picosun team worked with my engineers to accommodate this special request. The install time met Picosun's estimate and the deposition tests were quickly within specification", says Dr. Bill Flounders, Technology Manager of Berkeley Microfabrication Laboratory.

"Picosun and Berkeley Microfabrication Laboratory have signed a cooperative research agreement which will benefit us both. We, as a leading ALD tool designer and manufacturer, have identified working together with the leading research institutions to form the basis of our technology and process development strategy", says Juhana Kostamo, Managing Director of Picosun. "For Picosun, working together with world class scientists at UC Berkeley is a privilege", Kostamo says.

"For us, the Picosun tool represented the best combination of cost and capability. The SUNALE(TM) R-150 ALD reactor was qualified for Al2O3 deposition with film deposition rate of 1.02 angstrom per cycle and 1 sigma non-uniformity less than 1% across the wafer. Picosun technical support has been excellent and I expect an ongoing constructive relationship that will benefit our lab members and enhance Picosun's position among US university research centres", Dr. Flounders says.

At Berkeley Microfabrication Laboratory, Professor Clark Nguyen and his research group are using ALD to coat micromechanical resonators so that the gaps between their structures and electrodes can be reduced substantially. Reducing such gaps to 10's of nanometres helps to reduce the impedances of these devices for wireless communication applications.

Professor Tsu-Jae King Liu and her research group use the SUNALE(TM) R-150 ALD tool to conformally deposit high-permittivity dielectric materials to precise thicknesses, to enable new switching devices for integrated circuits that offer better energy efficiency than conventional complementary metal­oxide­semiconductor (CMOS) transistors.

In 1960, Professors D. O. Pederson, T. E. Everhart, and P. L. Morton produced plans for the world's first university integrated circuit lab. This was the beginning of today's Berkeley Microfabrication Laboratory. Over the years, membership of the laboratory has increased to over 500 presently. The present Microlab is in its third decade and will continue operating until a new laboratory is completed. The migration of the Microlab into the new Marvell Nanolab will start this year.

Picosun develops and manufactures Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun represents continuity to over three decades of ALD reactor manufacturing in Finland. Picosun is based in Espoo, Finland and has its US headquarters in Detroit, Michigan. SUNALE(TM) ALD process tools are installed in various universities, research institutes and companies across Europe, USA and Asia.

Dr Tuomo Suntola, inventor of ALD technology, is Member of the Board of Directors of Picosun. World's most experienced ALD reactor designer Sven Lindfors is Picosun´s Chief Technology Officer and one of the founders of the company. Picosun Oy is a part of Stephen Industries Inc Oy.

####

About Picosun
Picosun is an international equipment manufacturer with a world-wide sales and service organization. We develop and manufacture Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun provides the customers with versatile, reliable, and user-friendly ALD process tools, which offer unique scalability from research to production. Picosun is based in Espoo, Finland and has its US headquarters in Detroit. SUNALE™ ALD process tools have been installed in various universities, research institutes, and companies across Europe, USA, and Asia.

For more information, please click here

Contacts:
Picosun Oy, Mr. Juhana Kostamo, Managing Director
Tietotie 3, FI-02150 Espoo, Finland
Tel. +358 50 321 1955
Fax. +358 20 722 7012;
e-mail: info (at) picosun.com;
www.picosun.com

Copyright © Picosun

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

A first glimpse inside a macroscopic quantum state March 28th, 2015

DFG to Establish One Clinical Research Unit and Five Research Units: New Projects to Investigate Complications in Pregnancy, Particle Physics, Nanoparticles, Implants and Transport Planning / Approximately 13 Million Euros in Funding for an Initial Three-Year Period March 28th, 2015

Chemists make new silicon-based nanomaterials March 27th, 2015

UT Dallas engineers twist nanofibers to create structures tougher than bulletproof vests March 27th, 2015

Chip Technology

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

Building shape inspires new material discovery March 24th, 2015

Nanoelectronics

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

UW scientists build a nanolaser using a single atomic sheet March 24th, 2015

Iranian Researchers Present Model to Determine Dynamic Behavior of Nanostructures March 24th, 2015

Sharper nanoscopy: What happens when a quantum dot looks in a mirror? March 19th, 2015

Announcements

A first glimpse inside a macroscopic quantum state March 28th, 2015

DFG to Establish One Clinical Research Unit and Five Research Units: New Projects to Investigate Complications in Pregnancy, Particle Physics, Nanoparticles, Implants and Transport Planning / Approximately 13 Million Euros in Funding for an Initial Three-Year Period March 28th, 2015

Designer's toolkit for dynamic DNA nanomachines: Arm-waving nanorobot signals new flexibility in DNA origami March 27th, 2015

Using magnetic fields to understand high-temperature superconductivity: Los Alamos explores experimental path to potential 'next theory of superconductivity' March 27th, 2015

Tools

LAMDAMAP 2015 hosted by the University March 26th, 2015

FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Society’s Annual Meeting, held 18-21 March 2015 March 26th, 2015

Square ice filling for a graphene sandwich March 26th, 2015

Nanorobotic agents open the blood-brain barrier, offering hope for new brain treatments March 25th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE