Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Abstract:
The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Espoo, Finland, and Berkeley, CA | Posted on April 1st, 2009

The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

"Picosun made a point in sending both an equipment and process specialist. Our install was unique since we added additional custom hardware and the Picosun team worked with my engineers to accommodate this special request. The install time met Picosun's estimate and the deposition tests were quickly within specification", says Dr. Bill Flounders, Technology Manager of Berkeley Microfabrication Laboratory.

"Picosun and Berkeley Microfabrication Laboratory have signed a cooperative research agreement which will benefit us both. We, as a leading ALD tool designer and manufacturer, have identified working together with the leading research institutions to form the basis of our technology and process development strategy", says Juhana Kostamo, Managing Director of Picosun. "For Picosun, working together with world class scientists at UC Berkeley is a privilege", Kostamo says.

"For us, the Picosun tool represented the best combination of cost and capability. The SUNALE(TM) R-150 ALD reactor was qualified for Al2O3 deposition with film deposition rate of 1.02 angstrom per cycle and 1 sigma non-uniformity less than 1% across the wafer. Picosun technical support has been excellent and I expect an ongoing constructive relationship that will benefit our lab members and enhance Picosun's position among US university research centres", Dr. Flounders says.

At Berkeley Microfabrication Laboratory, Professor Clark Nguyen and his research group are using ALD to coat micromechanical resonators so that the gaps between their structures and electrodes can be reduced substantially. Reducing such gaps to 10's of nanometres helps to reduce the impedances of these devices for wireless communication applications.

Professor Tsu-Jae King Liu and her research group use the SUNALE(TM) R-150 ALD tool to conformally deposit high-permittivity dielectric materials to precise thicknesses, to enable new switching devices for integrated circuits that offer better energy efficiency than conventional complementary metal­oxide­semiconductor (CMOS) transistors.

In 1960, Professors D. O. Pederson, T. E. Everhart, and P. L. Morton produced plans for the world's first university integrated circuit lab. This was the beginning of today's Berkeley Microfabrication Laboratory. Over the years, membership of the laboratory has increased to over 500 presently. The present Microlab is in its third decade and will continue operating until a new laboratory is completed. The migration of the Microlab into the new Marvell Nanolab will start this year.

Picosun develops and manufactures Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun represents continuity to over three decades of ALD reactor manufacturing in Finland. Picosun is based in Espoo, Finland and has its US headquarters in Detroit, Michigan. SUNALE(TM) ALD process tools are installed in various universities, research institutes and companies across Europe, USA and Asia.

Dr Tuomo Suntola, inventor of ALD technology, is Member of the Board of Directors of Picosun. World's most experienced ALD reactor designer Sven Lindfors is Picosun´s Chief Technology Officer and one of the founders of the company. Picosun Oy is a part of Stephen Industries Inc Oy.

####

About Picosun
Picosun is an international equipment manufacturer with a world-wide sales and service organization. We develop and manufacture Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun provides the customers with versatile, reliable, and user-friendly ALD process tools, which offer unique scalability from research to production. Picosun is based in Espoo, Finland and has its US headquarters in Detroit. SUNALE™ ALD process tools have been installed in various universities, research institutes, and companies across Europe, USA, and Asia.

For more information, please click here

Contacts:
Picosun Oy, Mr. Juhana Kostamo, Managing Director
Tietotie 3, FI-02150 Espoo, Finland
Tel. +358 50 321 1955
Fax. +358 20 722 7012;
e-mail: info (at) picosun.com;
www.picosun.com

Copyright © Picosun

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

University of Tehran Researchers Invent Non-Enzyme Sensor to Detect Blood Sugar April 23rd, 2014

Gold nanoparticles help target, quantify breast cancer gene segments in a living cell April 23rd, 2014

Study finds long-term survival of human neural stem cells transplanted into primate brain April 23rd, 2014

High-Performance, Low-Cost Ultracapacitors Built with Graphene and Carbon Nanotubes: Future devices based on technology could bridge gap between batteries and conventional capacitors in portable electronics and hybrid electric vehicles April 23rd, 2014

Chip Technology

Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014

Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014

'Exotic' material is like a switch when super thin April 18th, 2014

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Nanoelectronics

Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014

Better solar cells, better LED light and vast optical possibilities April 12th, 2014

Catching the (Invisible) Wave: UC Santa Barbara researchers create a unique semiconductor that manipulates light in the invisible infrared/terahertz range, paving the way for new and enhanced applications April 11th, 2014

Nanotech Business Review 2013-2014 April 9th, 2014

Announcements

Characterizing inkjet inks: Malvern Instruments presents new rheological research April 23rd, 2014

NanoSafe, Inc. announces the addition of the Labconco Protector® Glove Box to its NanoSafe Tested™ registry April 23rd, 2014

Study finds long-term survival of human neural stem cells transplanted into primate brain April 23rd, 2014

High-Performance, Low-Cost Ultracapacitors Built with Graphene and Carbon Nanotubes: Future devices based on technology could bridge gap between batteries and conventional capacitors in portable electronics and hybrid electric vehicles April 23rd, 2014

Tools

Characterizing inkjet inks: Malvern Instruments presents new rheological research April 23rd, 2014

MRI, on a molecular scale: Researchers develop system that could one day peer into the atomic structure of individual molecules April 20th, 2014

Oxford Instruments Asylum Research Introduces the MFP-3D InfinityTM AFM Featuring Powerful New Capabilities and Stunning High Performance April 18th, 2014

More effective kidney stone treatment, from the macroscopic to the nanoscale April 17th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE