Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Abstract:
The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

Berkeley Microlab installs and qualifies Picosun SUNALE(TM) ALD reactor

Espoo, Finland, and Berkeley, CA | Posted on April 1st, 2009

The Microfabrication Laboratory of the University of California at Berkeley, a leading research institution studying microelectromechanical systems (MEMS) and other electronic devices reports to be pleased with their Picosun SUNALE(TM) R-150 atomic layer deposition (ALD) reactor, installed and in use since late 2008.

"Picosun made a point in sending both an equipment and process specialist. Our install was unique since we added additional custom hardware and the Picosun team worked with my engineers to accommodate this special request. The install time met Picosun's estimate and the deposition tests were quickly within specification", says Dr. Bill Flounders, Technology Manager of Berkeley Microfabrication Laboratory.

"Picosun and Berkeley Microfabrication Laboratory have signed a cooperative research agreement which will benefit us both. We, as a leading ALD tool designer and manufacturer, have identified working together with the leading research institutions to form the basis of our technology and process development strategy", says Juhana Kostamo, Managing Director of Picosun. "For Picosun, working together with world class scientists at UC Berkeley is a privilege", Kostamo says.

"For us, the Picosun tool represented the best combination of cost and capability. The SUNALE(TM) R-150 ALD reactor was qualified for Al2O3 deposition with film deposition rate of 1.02 angstrom per cycle and 1 sigma non-uniformity less than 1% across the wafer. Picosun technical support has been excellent and I expect an ongoing constructive relationship that will benefit our lab members and enhance Picosun's position among US university research centres", Dr. Flounders says.

At Berkeley Microfabrication Laboratory, Professor Clark Nguyen and his research group are using ALD to coat micromechanical resonators so that the gaps between their structures and electrodes can be reduced substantially. Reducing such gaps to 10's of nanometres helps to reduce the impedances of these devices for wireless communication applications.

Professor Tsu-Jae King Liu and her research group use the SUNALE(TM) R-150 ALD tool to conformally deposit high-permittivity dielectric materials to precise thicknesses, to enable new switching devices for integrated circuits that offer better energy efficiency than conventional complementary metal­oxide­semiconductor (CMOS) transistors.

In 1960, Professors D. O. Pederson, T. E. Everhart, and P. L. Morton produced plans for the world's first university integrated circuit lab. This was the beginning of today's Berkeley Microfabrication Laboratory. Over the years, membership of the laboratory has increased to over 500 presently. The present Microlab is in its third decade and will continue operating until a new laboratory is completed. The migration of the Microlab into the new Marvell Nanolab will start this year.

Picosun develops and manufactures Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun represents continuity to over three decades of ALD reactor manufacturing in Finland. Picosun is based in Espoo, Finland and has its US headquarters in Detroit, Michigan. SUNALE(TM) ALD process tools are installed in various universities, research institutes and companies across Europe, USA and Asia.

Dr Tuomo Suntola, inventor of ALD technology, is Member of the Board of Directors of Picosun. World's most experienced ALD reactor designer Sven Lindfors is Picosun´s Chief Technology Officer and one of the founders of the company. Picosun Oy is a part of Stephen Industries Inc Oy.

####

About Picosun
Picosun is an international equipment manufacturer with a world-wide sales and service organization. We develop and manufacture Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun provides the customers with versatile, reliable, and user-friendly ALD process tools, which offer unique scalability from research to production. Picosun is based in Espoo, Finland and has its US headquarters in Detroit. SUNALE™ ALD process tools have been installed in various universities, research institutes, and companies across Europe, USA, and Asia.

For more information, please click here

Contacts:
Picosun Oy, Mr. Juhana Kostamo, Managing Director
Tietotie 3, FI-02150 Espoo, Finland
Tel. +358 50 321 1955
Fax. +358 20 722 7012;
e-mail: info (at) picosun.com;
www.picosun.com

Copyright © Picosun

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Leti Announces Launch of First European Nanomedicine Characterisation Laboratory: Project Combines Expertise of 9 Partners in 8 Countries to Foster Nanomedicine Innovation and Facilitate Regulatory Approval July 1st, 2015

Bruker Introduces Second-Generation Inspire Nanochemical Imaging Solution: Featuring Unique PeakForce IR and IR EasyAlign Technology July 1st, 2015

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

Samsung's New Graphene Technology Will Double Life Of Your Lithium-Ion Battery July 1st, 2015

Chip Technology

Influential Interfaces Lead to Advances in Organic Spintronics July 1st, 2015

Emergence of a 'devil's staircase' in a spin-valve system July 1st, 2015

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

BASF and Fraunhofer IPMS-CNT jointly develop electronic materials June 30th, 2015

Nanoelectronics

Exagan Raises €5.7 Million to Produce High-efficiency GaN-on-Silicon Power-switching Devices on 200mm Wafers: Leti-and-Soitec Spinout Focused on Becoming Leading European Source Of GaN Devices for Solar, Automotive, Telecoms and Infrastructure June 25th, 2015

Nanowires could be the LEDs of the future June 25th, 2015

Leti to Present Solutions to New Applications Using 3D Technologies at SEMICON West LetiDay Event, July 14: Leti Experts also Will Speak at TechXPOT Session on MEMS and STS Session on Lithography Cost-and-Productivity Issues Below 14nm June 22nd, 2015

Graphene heat-transfer riddle unraveled June 17th, 2015

Announcements

Leti Announces Launch of First European Nanomedicine Characterisation Laboratory: Project Combines Expertise of 9 Partners in 8 Countries to Foster Nanomedicine Innovation and Facilitate Regulatory Approval July 1st, 2015

Bruker Introduces Second-Generation Inspire Nanochemical Imaging Solution: Featuring Unique PeakForce IR and IR EasyAlign Technology July 1st, 2015

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

Samsung's New Graphene Technology Will Double Life Of Your Lithium-Ion Battery July 1st, 2015

Tools

NIST ‘How-To’ Website Documents Procedures for Nano-EHS Research and Testing July 1st, 2015

Ultra-stable JILA microscopy technique tracks tiny objects for hours July 1st, 2015

Bruker Introduces Second-Generation Inspire Nanochemical Imaging Solution: Featuring Unique PeakForce IR and IR EasyAlign Technology July 1st, 2015

Carnegie Mellon chemists characterize 3-D macroporous hydrogels: Methods will allow researchers to develop new 'smart' materials June 30th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project