Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > News > Reference Metrology Standards: The Looming Nanotech Crisis

March 13th, 2008

Reference Metrology Standards: The Looming Nanotech Crisis

Abstract:
As nanotechnology becomes prevalent,and lithography workarounds like double patterning manuever into the mainstream, it is evident that for crucial measurements to continue providing reliable results, instrument calibration reference metrology acquires unprecedented importance.

At the SPIE Advanced Lithography Conference recently held in San Jose, a panel discussion on reference metrology highlighted some of the hurdles faced by device manufacturers in obtaining the metrology needed to calibrate various tools to perform required measurements. One of the moderators, Ronald Dixson, is a senior scientist at the AFM Dimensional Metrology group of the Precision Engineering Division of the National Institute of Standards and Technology (NIST, Gaithersburg, Md.). "A recurring theme in reference metrology and the standards needed is the requirement to address sample-to-sample bias variation and that bias' dependence on secondary characteristics," he said, mentioning the dependence of bottom CD in a CD-SEM on the sidewall as the classic example. A perennial argument deals with throughput and accuracy trade-offs in reference metrology. "Reference metrology is perceived as referring to a range of tools that, although they provide greater accuracy, aren't used for inline metrology because of throughput and speed requirements."

Source:
semiconductor.net

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Haydale and Goodfellow Announce Major Distribution Agreement for Functionalised Graphene Materials July 21st, 2014

Relaunch of the Nanoscribe Website New design, optimized research, and impressive gallery of applications July 21st, 2014

Dongbu HiTek Unveils Low-Voltage BCDMOS Process for Efficient Power Management in Smart Phones and Tablet Computers July 21st, 2014

Iran to Host 1st Asian Congress on Nanostructures on Kish Island July 21st, 2014

Chip Technology

Dongbu HiTek Unveils Low-Voltage BCDMOS Process for Efficient Power Management in Smart Phones and Tablet Computers July 21st, 2014

Oregon chemists eye improved thin films with metal substitution: Solution-based inorganic process could drive more efficient electronics and solar devices July 21st, 2014

Carbyne morphs when stretched: Rice University calculations show carbon-atom chain would go metal to semiconductor July 21st, 2014

Martini Tech Inc. becomes the exclusive distributor for Yoshioka Seiko Co. porous chucks for Europe and North America July 20th, 2014

Nanoelectronics

3-D nanostructure could benefit nanoelectronics, gas storage: Rice U. researchers predict functional advantages of 3-D boron nitride July 15th, 2014

IBM Announces $3 Billion Research Initiative to Tackle Chip Grand Challenges for Cloud and Big Data Systems: Scientists and engineers to push limits of silicon technology to 7 nanometers and below and create post-silicon future July 10th, 2014

Carbodeon enables 20 percent increase in polymer thermal filler conductivity with 0.03 wt.% nanodiamond additive at a lower cost than with traditional fillers: Improved materials and processes enable nanodiamond cost reductions of up to 70 percent for electronics and LED app July 9th, 2014

Nanotechnology that will impact the Security & Defense sectors to be discussed at NanoSD2014 conference July 8th, 2014

Announcements

Oxford Instruments Asylum Research Opens an Atomic Force Microscopy Demonstration Lab in Mumbai, India July 21st, 2014

Steam from the sun: New spongelike structure converts solar energy into steam July 21st, 2014

More than glitter: Scientists explain how gold nanoparticles easily penetrate cells, making them useful for delivering drugs July 21st, 2014

Iran to Host 1st Asian Congress on Nanostructures on Kish Island July 21st, 2014

Tools

Dongbu HiTek Unveils Low-Voltage BCDMOS Process for Efficient Power Management in Smart Phones and Tablet Computers July 21st, 2014

Oxford Instruments Asylum Research Opens an Atomic Force Microscopy Demonstration Lab in Mumbai, India July 21st, 2014

Martini Tech Inc. becomes the exclusive distributor for Yoshioka Seiko Co. porous chucks for Europe and North America July 20th, 2014

Sono-Tek Corporation Announces New Clean Room Rated Laboratory Facility in China July 18th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE