Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > News > Reference Metrology Standards: The Looming Nanotech Crisis

March 13th, 2008

Reference Metrology Standards: The Looming Nanotech Crisis

Abstract:
As nanotechnology becomes prevalent,and lithography workarounds like double patterning manuever into the mainstream, it is evident that for crucial measurements to continue providing reliable results, instrument calibration — reference metrology — acquires unprecedented importance.

At the SPIE Advanced Lithography Conference recently held in San Jose, a panel discussion on reference metrology highlighted some of the hurdles faced by device manufacturers in obtaining the metrology needed to calibrate various tools to perform required measurements. One of the moderators, Ronald Dixson, is a senior scientist at the AFM Dimensional Metrology group of the Precision Engineering Division of the National Institute of Standards and Technology (NIST, Gaithersburg, Md.). "A recurring theme in reference metrology and the standards needed is the requirement to address sample-to-sample bias variation and that bias' dependence on secondary characteristics," he said, mentioning the dependence of bottom CD in a CD-SEM on the sidewall as the classic example. A perennial argument deals with throughput and accuracy trade-offs in reference metrology. "Reference metrology is perceived as referring to a range of tools that, although they provide greater accuracy, aren't used for inline metrology because of throughput and speed requirements."

Source:
semiconductor.net

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Graphene holds up under high pressure: Used in filtration membranes, ultrathin material could help make desalination more productive April 24th, 2017

Nanoparticle vaccine shows potential as immunotherapy to fight multiple cancer types April 24th, 2017

Russian scientists create new system of concrete building structures: Sientists of Peter the Great Saint-Petersburg Polytechnic University developed a new construction technology April 24th, 2017

Nanomechanics, Inc. Unveils New Product at ICMCTF Show April 25th: Nanoindentation experts will launch the new Gemini that measures the interaction of two objects that are sliding across each other – not merely making contact April 21st, 2017

Chip Technology

'Neuron-reading' nanowires could accelerate development of drugs for neurological diseases April 12th, 2017

Nanometrics to Announce First Quarter Financial Results on May 2, 2017 April 11th, 2017

AIM Photonics Presents Cutting-Edge Integrated Photonics Technology Developments to Packed House at OFC 2017, the Optical Networking and Communication Conference & Exhibition April 11th, 2017

Photonics breakthough paving the way for improved wireless communication systems: The work could bolster the wireless revolution underway with efficiencies several orders of magnitude April 5th, 2017

Nanoelectronics

Researchers “iron out” graphene’s wrinkles: New technique produces highly conductive graphene wafers April 3rd, 2017

A big leap toward tinier lines: Self-assembly technique could lead to long-awaited, simple method for making smaller microchip patterns March 27th, 2017

Scientists discover new 'boat' form of promising semiconductor: GeSe Uncommon form attenuates semiconductor's band gap size March 23rd, 2017

UC researchers use gold coating to control luminescence of nanowires: University of Cincinnati physicists manipulate nanowire semiconductors in pursuit of making electronics smaller, faster and cheaper March 17th, 2017

Announcements

Graphene holds up under high pressure: Used in filtration membranes, ultrathin material could help make desalination more productive April 24th, 2017

Nanoparticle vaccine shows potential as immunotherapy to fight multiple cancer types April 24th, 2017

Russian scientists create new system of concrete building structures: Sientists of Peter the Great Saint-Petersburg Polytechnic University developed a new construction technology April 24th, 2017

Two-dimensional melting of hard spheres experimentally unravelled after 60 years: First definitive experimental evidence of two-dimensional melting of hard spheres April 21st, 2017

Tools

NanoMONITOR shares its latest developments concerning the NanoMONITOR Software and the Monitoring stations April 21st, 2017

Nanomechanics, Inc. Unveils New Product at ICMCTF Show April 25th: Nanoindentation experts will launch the new Gemini that measures the interaction of two objects that are sliding across each other – not merely making contact April 21st, 2017

MSP Corporation Announces a New Breakthrough in Monodisperse Droplet Generation April 19th, 2017

Researchers Succeed in Localizing Individual Atoms in Nanostructures Using First Cryo-Transfer LEAP Atom Probe April 19th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project