Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > News > Reference Metrology Standards: The Looming Nanotech Crisis

March 13th, 2008

Reference Metrology Standards: The Looming Nanotech Crisis

Abstract:
As nanotechnology becomes prevalent,and lithography workarounds like double patterning manuever into the mainstream, it is evident that for crucial measurements to continue providing reliable results, instrument calibration — reference metrology — acquires unprecedented importance.

At the SPIE Advanced Lithography Conference recently held in San Jose, a panel discussion on reference metrology highlighted some of the hurdles faced by device manufacturers in obtaining the metrology needed to calibrate various tools to perform required measurements. One of the moderators, Ronald Dixson, is a senior scientist at the AFM Dimensional Metrology group of the Precision Engineering Division of the National Institute of Standards and Technology (NIST, Gaithersburg, Md.). "A recurring theme in reference metrology and the standards needed is the requirement to address sample-to-sample bias variation and that bias' dependence on secondary characteristics," he said, mentioning the dependence of bottom CD in a CD-SEM on the sidewall as the classic example. A perennial argument deals with throughput and accuracy trade-offs in reference metrology. "Reference metrology is perceived as referring to a range of tools that, although they provide greater accuracy, aren't used for inline metrology because of throughput and speed requirements."

Source:
semiconductor.net

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Chip Technology

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

GLOBALFOUNDRIES Demonstrates Industry-Leading 112G Technology for Next-Generation Connectivity Solutions: High bandwidth, low power SerDes IP portfolio enables ‘connected intelligence’ in data centers and networking applications November 15th, 2017

Nanometrics Announces $50 Million Share Repurchase Program November 15th, 2017

Nanoelectronics

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

Leti Will Present 11 Papers and Host More-than-Moore Technologies Workshop November 14th, 2017

The next generation of power electronics? Gallium nitride doped with beryllium: How to cut down energy loss in power electronics? The right kind of doping November 9th, 2017

Researchers bring optical communication onto silicon chips: Ultrathin films of a semiconductor that emits and detects light can be stacked on top of silicon wafers October 23rd, 2017

Announcements

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Tools

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Nanometrics Announces $50 Million Share Repurchase Program November 15th, 2017

Nanometrics Board of Directors Names Pierre-Yves Lesaicherre President and CEO November 14th, 2017

Oxford Instruments announces winner of the 2017 Sir Martin Wood Prize for Japan November 14th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project