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December 13th, 2007
The University has awarded Oxford Instruments a contract for £2.5M for nine process tool systems to be used in the Mountbatten Building clean room.
The new research complex in the Mountbatten Building will serve the world-leading research of the School of Electronics and Computer Science and the Optoelectronics Research Centre. Completion of the new building is anticipated for summer 2008, when the Oxford Instruments tools will be sited within it.
The nine systems will provide leading-edge capabilities in the research and development of novel nanoelectronic, MEMS and photonic devices. The order includes both plasma etch and deposition tools, with two Plasmalab®System100 ICP etch tools, two Plasmalab80Plus open-loading RIE tools and two PlasmalabSystem100 PECVD tools, plus a number of Oxford Instruments' newest products: a FlexAL® plasma/thermal atomic layer deposition (ALD) tool, a Nanofab nanowire and nanotube growth tool, and a large-chamber Ionfab® ion beam system.
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