Nanotechnology Now - Press Release: Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication

Home > Press > Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication

The CNS 100kV System built at the Elionix NanoTech Center for delivery to the Harvard campus.

Abstract:
SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard‚s FAS Center for Nanoscale Systems (CNS) in October.

Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication

BILLERICA, MA | Posted on September 13th, 2007

SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard's FAS Center for Nanoscale Systems (CNS) in October. The CNS at Harvard is an open, shared-use facility serving hundreds of researchers each year. It is part of the NSF's National Nanotechnology Infrastructure Network (NNIN). The Elionix ELS-7000 will be used by CNS users to fabricate nanoscale devices for advanced research projects.

"I am very pleased with the recent orders from Harvard and other major universities in the U.S.," states Seigo Honme, Elionix President. "After having established the highest market share for electron beam lithography systems in Japan and the Far East, I am confident that our teamwork with SEMTech Solutions in North America will find an increasing number of customers who will come to appreciate the high performance of Elionix systems."

Eric Martin, Technical Director for CNS says, "We were very impressed with the performance of the ELS-7000 system. We are also pleased with the commitment from the Elionix team to help us meet our Center's objectives for excellent technical service."

The Elionix ELS-7000 is an ultra high precision electron beam lithography system capable of generating patterns with a line width of less than 8nm. The system provides a stable 1.8nm electron beam using high beam currents at 100kV. Fine line patterns can be drawn using commercially available resists.

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About SEMTech Solutions, Inc.
SEMTech Solutions is a leading North American sales and service representation company handling scientific instrumentation. In addition, we are also a leading supplier of refurbished SEMs and SEM services. With a growing customer base of over 100 companies, ranging from start-ups to Fortune 500 industries, we have the electron beam knowledge to meet any demand.

ELIONIX, Inc.
Elionix is a worldwide leading manufacturer of electron beam lithography systems, 3-D surface roughness measurement systems, and other pieces of equipment dedicated to nanotechnology. Located in Tokyo, Japan, Elionix is a privately held company that has spearheaded the development of advanced equipment for next generation technologies for over 30 years.

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