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Home > News > FEI Introduces First Ever System for Real-Time in-Fab 3D
July 14th, 2003
FEI Introduces First Ever System for Real-Time in-Fab 3D
Abstract:
FEI Company released its all-new, in-fab CLM-3D(TM), a fully automated DualBeam(TM) metrology system designed for rapid process development and process control of new semiconductor technologies below 130 nm.
Source:
FEI
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