Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Stress-free ALD from Picosun

Abstract:
Various stresses are easily formed in ALD films during the deposition process, either inside the film or between the film and the underlying substrate. As all modern microelectronic devices are basically built by stacking ultra-thin layers of various materials on top of each other, these stresses can be detrimental not only to the film itself but to the other functional layers and structures beneath. Especially in MEMS devices, where cavities and free-standing membranes are often employed, stress-free ALD films, or films where the stress is exactly controlled, are very much sought after. Same applies for IC components, where film strains and tensions can lead to material layers detaching from each other, or bending and buckling of the whole structure.

Stress-free ALD from Picosun

Espoo, Finland | Posted on August 28th, 2018

Picosun has now developed a method with which zero stress and controlled stress ALD films can be produced. This sophisticated method is based on intricate tuning of process chemistry and deposition conditions. The desired effect is obtained with right selection of precursor chemicals and process temperature, so no additional process steps such as heat or plasma treatments (which might cause structural damage to the film) are required. Replacing a single material film with carefully designed nanolaminate of materials with opposite stress properties is another way to achieve zero stress layers. These methods have been validated with e.g. HfO2, which is one of the key materials in microelectronics industry. Other ALD materials tested include SiO2, Ta2O5, and TiO2 (*).

“We are very pleased that we can now offer stress-free ALD HfO2 process to our customers in MEMS and IC industries. Especially medical MEMS is an important market for us, and a prime example of an application area where controlled stress ALD films are needed to enable a whole platform of novel products. Thanks to our unmatched ALD expertise, we have now developed a solution to one of the fundamental challenges in ALD. This will facilitate the implementation of ALD to yet new, exciting applications in health technology and future IC manufacturing,” summarizes Dr. Jani Kivioja, CTO of Picosun Group.

Picosun provides the most advanced ALD thin film coating technology to enable the industrial leap into the future, with turn-key production solutions and unmatched expertise in the field. Today, PICOSUN™ ALD equipment are in daily manufacturing use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in Europe, North America, Singapore, Taiwan, China, and Japan, and a world-wide sales and support network. Visit www.picosun.com.

(*) In collaboration with VTT Technical Research Centre of Finland. Stress measurements were performed at VTT. The results were initially published in the AVS 18th International Conference on Atomic Layer Deposition (ALD 2018), Incheon, South Korea.

####

For more information, please click here

Contacts:
Dr. Jani Kivioja, CTO, Picosun Group
Phone: +358 50 321 1955
Fax: +358 9 297 6116

Copyright © Picosun Group

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Shape-shifting sensors could catch early signs of cancer October 19th, 2018

Study provides insight into how nanoparticles interact with biological systems: Findings can help scientists engineer nanoparticles that are ‘benign by design’ October 18th, 2018

Iran Produces Cooling Fabrics Using Nanotechnology October 17th, 2018

Iran World’s Second Largest Producer of Nano-Catalysts October 17th, 2018

Thin films

Extracting energy from a 60 nanometers thin layer October 5th, 2018

Laser sintering optimized for printed electronics: New study sheds (laser) light on the best means of laying down thin-film circuitry September 13th, 2018

Carbon in color: First-ever colored thin films of nanotubes created: A method developed at Aalto University, Finland, can produce large quantities of pristine single-walled carbon nanotubes in select shades of the rainbow; the secret is a fine-tuned fabrication process -- and a s August 29th, 2018

CTI Materials drives nano commercialization with it's patented surfactant free nanoparticle dispersions August 15th, 2018

MEMS

UCI scientists push microscopy to sub-molecular resolution: Carbon monoxide used to measure electric forces in single chemical compound October 2nd, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

Cleaning or Etching Items with Unique Geometries Requires Specialized Expertise June 27th, 2018

Announcements

Shape-shifting sensors could catch early signs of cancer October 19th, 2018

Study provides insight into how nanoparticles interact with biological systems: Findings can help scientists engineer nanoparticles that are ‘benign by design’ October 18th, 2018

Iran Unveils Its First Homegrown 3D Nano Printer October 17th, 2018

Fat-Repellent Nanolayers Can Make Oven Cleaning Easier October 17th, 2018

Tools

Shape-shifting sensors could catch early signs of cancer October 19th, 2018

Iranian Firm Offering Nano-Products on Chinese Market October 16th, 2018

Big award enables study of small surfaces: Rice U.'s Matt Jones wins Packard Fellowship to view nanoscale chemical reactions October 15th, 2018

Nanometrics to Announce Third Quarter Financial Results on October 30, 2018 October 10th, 2018

Events/Classes

Arrowhead Pharmaceuticals Hosts R&D Day on Pipeline of RNAi Therapeutics October 17th, 2018

Iran Produces Cooling Fabrics Using Nanotechnology October 17th, 2018

Iran World’s Second Largest Producer of Nano-Catalysts October 17th, 2018

Iran Unveils Its First Homegrown 3D Nano Printer October 17th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project