- About Us
- Nano-Social Network
- Nano Consulting
- My Account
Porous vacuum chucks are used in the semiconductor, printing, LED business to hold substrates attached to a processing machine, such as a dicing machine, an inspection machine, a spin-process machine or any other substrate processing machine.
Differently from other mechanical chucks, porous chucks use a pressure differential between the front and back side of the surface in order to hold the substrate: using this technique it is possible to work on extremely thin substrates without any risk of breakage.
Moreover, without needing any clamp, porous chucks leave no scratch or mark on the surface of the substrate.
Finally, by using extremely thin porous materials for the chuck inner body, it is possible to achieve high degrees of flatness on the surface and therefore avoid any bending of the wafer during the processing: this property is extremely important when dealing with inspection applications
Thanks to many years of experience in the field, Yoshioka Seiko Co. is able to offer to customers porous chucks with surface flatness better than 5µm on the whole surface, with results of better than 3µm for particular applications.
Yoshioka Seiko can offer a large range of porous chucks, including porous chucks in pure carbon, hot vacuum chucks with heating mechanism incorporated, self-adsorption porous chucks with embedded vacuum pump, surface-emitting porous chucks for inspection application that require backlight
Yoshioka Seiko manufactures chucks in various shapes and materials.
Chucks are offered in squared, cylindrical, round type, collect shape among others.
For the chuck body, several materials can be offered: stainless steel, titanium, aluminium, ceramic being some of them.
Surface treatments such as fluorine resin processing, anodized aluminium, anti-corrosion coating process, electroless nickel plating are also available
From the 1st of July 2014, Martini Tech Inc, a distributor company based in Tokyo, Japan, has become the exclusive distributor for Yoshioka Seiko porous chucks for Europe and North America
For more information, please click here
Copyright © Martini Tech Inc.If you have a comment, please Contact us.
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
|Related News Press|
News and information
Display technology/LEDs/SS Lighting/OLEDs
UC researchers use gold coating to control luminescence of nanowires: University of Cincinnati physicists manipulate nanowire semiconductors in pursuit of making electronics smaller, faster and cheaper March 17th, 2017
Research opens door to smaller, cheaper, more agile communications tech February 16th, 2017
Leti Announces EU/South Korean Project for World’s First 5G-system Prototype: Coinciding with the 2018 Winter Games in PyeongChang, Korea, Prototype Will Be First Time State-of-the-art Terrestrial Wireless Communication Is Seamlessly Combined with Disruptive Satellite Communicati April 4th, 2017
ATTOPSEMI Technology Joins FDXcelerator Program to Deliver Advanced Non-Volatile Memory IP to GLOBALFOUNDRIES 22 FDX® Technology Platform: Leading-edge I-fuse™ brings higher reliability, smaller cell size and ease of programmability for consumer, automotive, and IoT applications March 27th, 2017
New stem cell technique shows promise for bone repair January 25th, 2017
NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017