Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Imec solves metallization issues in advanced interconnects for the sub-1X technology node

Image: Mn-based barrier deposition
Image: Mn-based barrier deposition

Abstract:
Imec has developed a Manganese (Mn)-based self-formed barrier (SFB) process that significantly improves Resistance Capacitance (RC) performance, via resistance and reliability in advanced interconnects. It provides excellent adhesion, film conformality, intrinsic barrier property and reduced line resistance. This technology paves the way towards interconnect Cu metallization into the 7nm node and beyond.

Imec solves metallization issues in advanced interconnects for the sub-1X technology node

San Francisco, CA | Posted on July 2nd, 2013

With continuous interconnect scaling, the wire resistance per unit length increases, which has a detrimental impact on the device performance (RC). Moreover, when reducing the dimensions with conventional barrier layers, an increased loss of copper (Cu) cross sectional area is observed, resulting in high resistance and decreased interconnect lifetime (electro-migration and time dependent dielectric breakdown - EM and TDDB). To overcome these interconnect metallization issues when scaling beyond the 1X technology node, imec's R&D program on advanced interconnect technology explores new barrier and seed materials as well as novel deposition and filling techniques. The Mn-based SFB was demonstrated to be an attractive candidate for future interconnect technology. At module level, Mn-based SFB resulted in a 40% increase in RC benefits at 40nm half pitch compared to conventional barrier and good lifetime performance (comparable to TaN/Ta reference).

These results were achieved in cooperation with imec's key partners in its core CMOS programs Globalfoundries, INTEL, Micron, Panasonic, Samsung, TSMC, Elpida, SK hynix, Fujitsu and Sony.

Imec exhibits at SEMICON West, July 9-11, 2013. To learn more about imec, please visit booth 1741, South hall.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of more than 2,000 people includes more than 650 industrial residents and guest researchers. In 2012, imec's revenue (P&L) totaled 320 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited).

For more information, please click here

Contacts:
Marrissa Meyer
Business Technology
[ f o r m u l a ]
Formula PR, Inc.
1215 Cushman Avenue
San Diego, CA 92110
Office 619-234-0345
Cell 619-929-6177

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Iranian Researchers Planning to Produce Edible Insulin January 28th, 2015

Nanoparticles that deliver oligonucleotide drugs into cells described in Nucleic Acid Therapeutics January 28th, 2015

'Bulletproof' battery: Kevlar membrane for safer, thinner lithium rechargeables January 28th, 2015

Spider electro-combs its sticky nano-filaments January 28th, 2015

Chip Technology

Researchers Make Magnetic Graphene: UC Riverside research could lead to new multi-functional electronic devices January 27th, 2015

Nanometrics to Present at the Stifel 2015 Technology, Internet and Media Conference January 27th, 2015

New pathway to valleytronics January 27th, 2015

Entanglement on a chip: Breakthrough promises secure communications and faster computers January 27th, 2015

Nanoelectronics

Electronic circuits with reconfigurable pathways closer to reality January 26th, 2015

Rice-sized laser, powered one electron at a time, bodes well for quantum computing January 15th, 2015

Rapid journey through a crystal lattice: Researchers measure how fast electrons move through single atomic layers January 14th, 2015

A new step towards using graphene in electronic applications January 14th, 2015

Discoveries

Detecting chemical weapons with a color-changing film January 28th, 2015

Joint international research project leads to a breakthrough in terahertz spectroscopy January 28th, 2015

Iranian Researchers Planning to Produce Edible Insulin January 28th, 2015

Nanoparticles that deliver oligonucleotide drugs into cells described in Nucleic Acid Therapeutics January 28th, 2015

Announcements

Iranian Researchers Planning to Produce Edible Insulin January 28th, 2015

Nanoparticles that deliver oligonucleotide drugs into cells described in Nucleic Acid Therapeutics January 28th, 2015

'Bulletproof' battery: Kevlar membrane for safer, thinner lithium rechargeables January 28th, 2015

Spider electro-combs its sticky nano-filaments January 28th, 2015

Events/Classes

Pittcon News: Renishaw adds to the comprehensive imaging options available with its inVia confocal Raman microscope January 27th, 2015

Nanometrics to Present at the Stifel 2015 Technology, Internet and Media Conference January 27th, 2015

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE