Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH Completes Fully Integrated 300mm Line for Via-Mid 3D ICs at UAlbany NanoCollege

Abstract:
Capabilities in Equipment, Processing, and Metrology to Advance 3D Integration Technologies for Future Devices

SEMATECH Completes Fully Integrated 300mm Line for Via-Mid 3D ICs at UAlbany NanoCollege

Albany, NY | Posted on August 30th, 2010

In another step towards driving the maturity of 3D IC integration, SEMATECH's 3D Interconnect program announced today the completion of its 300mm 3D IC pilot line, operating at the College of Nanoscale Science and Engineering's (CNSE) Albany NanoTech Complex. Dedicated to via-mid 3D applications, SEMATECH's development and exploratory platform includes all processes and test vehicles necessary to demonstrate the viability of the via-mid technology in conjunction with advanced CMOS.

"Our mission is to make 3D through-silicon via (TSV) both manufacturable and affordable. We will prove its very real advantages over conventional, two-dimensional designs — especially in increased functionality and performance," said Sitaram Arkalgud, director of 3D Interconnect at SEMATECH. "The completion of our 300mm R&D line is a significant step towards demonstrating technology solutions for TSV high-volume manufacturing."

Centered on 5um by 50 micron TSVs, the processes include TSV formation and metallization, wafer and die alignment, bonding, thinning, and the necessary metrology for these integration sequences. Supported by the conventional CMOS processing capabilities of CNSE, SEMATECH researchers are working jointly with chipmakers, equipment and materials suppliers, and universities on device interactions for fabrication at the 65nm node for planar and future scaling to 30nm for planar and non-planar CMOS technologies.

"The integration of the 3D Interconnect pilot line by SEMATECH at CNSE's Albany NanoTech Complex further enhances the leading-edge research and development capabilities at the UAlbany NanoCollege," said Richard Brilla, vice president of strategy, alliances and consortia at CNSE. "This marks another critical step forward in accelerating advanced manufacturing for innovative nanoelectronics technologies."

Arkalgud added, "Our program provides our members with access to complete 300mm R&D capability in 3D, allowing them to evaluate tools, process modules and even integration sequences in a realistic setting. Moreover, SEMATECH is playing a strategic role in working with the industry to drive manufacturability and forge consensus on technology options, standards, and cost modeling."

Launched in 2005, SEMATECH's 3D program was established to deliver robust 300mm equipment and process technology solutions for high volume TSV manufacturing. The 3D program has been actively engaging with leading edge equipment and materials suppliers and leveraging their expertise to deliver manufacturable process solutions. During 2009, the program began its considerable expansion, including developing and demonstrating 300mm tooling, materials, and process module solutions necessary for 3D TSV manufacturing for 300mm wafers in 2012 and beyond. In addition, SEMATECH's 3D program is developing a reference flow which contains the critical elements of interest in processing and metrology for its members. The use of a common reference flow will help drive consensus among members and the industry, and lend validity to a cost model.

3D ICs will play an important role in semiconductor manufacturing, given their potential to alleviate scaling limitations, increase performance by reducing signal delays, and reduce cost. TSVs can improve electrical performance, lower power consumption, enable the integration of heterogeneous devices, shrink device size, and reduce cost.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

About CNSE
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $6 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE’s Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech. For more information, visit www.cnse.albany.edu.

For more information, please click here

Contacts:
Erica McGill
518-649-1041

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ultracold atom waves may shed light on rogue ocean killers: Rice quantum experiments probe underlying physics of rogue ocean waves April 27th, 2017

Looking for the quantum frontier: Beyond classical computing without fault-tolerance? April 27th, 2017

Metal nanoparticles induced visible-light photocatalysis: Mechanisms, applications, ways of promoting catalytic activity and outlook April 27th, 2017

Arrowhead Pharmaceuticals to Webcast Fiscal 2017 Second Quarter Results April 27th, 2017

Academic/Education

California Research Alliance by BASF establishes more than 25 research projects in three years April 26th, 2017

SUNY Polytechnic Institute Announces Total of 172 Teams Selected to Compete in Solar in Your Community Challenge: Teams from 40 states, plus Washington, DC, 2 Territories, and 4 American Indian Reservations, Will Deploy Solar in Underserved Communities April 20th, 2017

Rice crew revved for Nanocar Race: Nanocar creator James Tour and team take on international competition with single-molecule marvel April 20th, 2017

The Catholic University of Rome uses the JPK NanoWizard® AFM & CellHesion® systems to understand how cells sense and respond to mechanical stimuli April 5th, 2017

Chip Technology

Geoffrey Beach: Drawn to explore magnetism: Materials researcher is working on the magnetic memory of the future April 25th, 2017

'Neuron-reading' nanowires could accelerate development of drugs for neurological diseases April 12th, 2017

Nanometrics to Announce First Quarter Financial Results on May 2, 2017 April 11th, 2017

AIM Photonics Presents Cutting-Edge Integrated Photonics Technology Developments to Packed House at OFC 2017, the Optical Networking and Communication Conference & Exhibition April 11th, 2017

Nanoelectronics

Researchers “iron out” graphene’s wrinkles: New technique produces highly conductive graphene wafers April 3rd, 2017

A big leap toward tinier lines: Self-assembly technique could lead to long-awaited, simple method for making smaller microchip patterns March 27th, 2017

Scientists discover new 'boat' form of promising semiconductor: GeSe Uncommon form attenuates semiconductor's band gap size March 23rd, 2017

UC researchers use gold coating to control luminescence of nanowires: University of Cincinnati physicists manipulate nanowire semiconductors in pursuit of making electronics smaller, faster and cheaper March 17th, 2017

Announcements

Ultracold atom waves may shed light on rogue ocean killers: Rice quantum experiments probe underlying physics of rogue ocean waves April 27th, 2017

Looking for the quantum frontier: Beyond classical computing without fault-tolerance? April 27th, 2017

Metal nanoparticles induced visible-light photocatalysis: Mechanisms, applications, ways of promoting catalytic activity and outlook April 27th, 2017

Arrowhead Pharmaceuticals to Webcast Fiscal 2017 Second Quarter Results April 27th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project