Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Workshop on Plasma Etch and Strip in Microelectronics Set for March 4-5 at MINATEC

Abstract:
Leti, in collaboration with CNRS/LTM, STMicroelectronics and IMEC, is organizing the 3rd Plasma Etch and Strip in Microelectronics workshop March 4-5 at MINATEC in Grenoble.

Workshop on Plasma Etch and Strip in Microelectronics Set for March 4-5 at MINATEC

Grenoble | Posted on February 18th, 2010

The PESM2010 workshop, which will explore recent advances in etching and stripping processes for nanoelectronics technologies, presents a unique opportunity to meet with an international gathering of researchers in the field of plasma etch and strip.

The program includes presentations on plasma-surface interaction, plasma diagnostics, plasma etching for interconnects, post-etch strip and clean and deep plasma etching at the state of the art. Invited papers will be given by scientists in the etching plasma field representing leading companies and research institutes such as IBM, Tokyo Electron Ltd., LAM Research, the Institute of Microelectronics, Penn State University and the laboratory for Microelectronics Technologies (LTM) at the National Center for Scientific Research (CNRS).

For more information about PESM2010 visit:

imec-events.be/show-homepage?collection=76¤tpage=page_10



####

About CEA-Leti
CEA is a French research and technology organisation, with activities in three main areas: energy, technologies for information and healthcare, and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in MINATEC excellence centre, Leti operates 8,000-mē state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,200 employees, Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, Leti puts a strong emphasis on intellectual property and owns more than 1,400 patent families. In 2008, contractual income covered more than 75 percent of its budget worth 205 M�. Foor more information, visit www.leti.fr.

For more information, please click here

Contacts:
Press contacts:
CEA-Leti
Thierry Bosc
+33 4 38 78 31 95


Didier Louis
+33 4 38 78 36 53


Agency
Sarah-Lyle Dampoux
+33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Arrowhead Pharmaceuticals to Host R&D Day on Emerging Pipeline of RNAi Therapeutics September 25th, 2018

Arrowhead Pharmaceuticals to Host R&D Day on Emerging Pipeline of RNAi Therapeutics September 25th, 2018

Arrowhead Pharmaceuticals Reports Inducement Grants under NASDAQ Marketplace Rule 5635(c)(4) September 25th, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

Chip Technology

Researchers managed to prevent the disappearing of quantum information September 14th, 2018

New devices based on rust could reduce excess heat in computers: Physicists explore long-distance information transmission in antiferromagnetic iron oxide September 14th, 2018

New photonic chip promises more robust quantum computers September 14th, 2018

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Nanoelectronics

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Laser sintering optimized for printed electronics: New study sheds (laser) light on the best means of laying down thin-film circuitry September 13th, 2018

September 5th, 2018

Rice U. lab probes molecular limit of plasmonics: Optical effect detailed in organic molecules with fewer than 50 atoms September 5th, 2018

Announcements

Arrowhead Pharmaceuticals to Host R&D Day on Emerging Pipeline of RNAi Therapeutics September 25th, 2018

Arrowhead Pharmaceuticals to Host R&D Day on Emerging Pipeline of RNAi Therapeutics September 25th, 2018

Arrowhead Pharmaceuticals Reports Inducement Grants under NASDAQ Marketplace Rule 5635(c)(4) September 25th, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

Events/Classes

Arrowhead Pharmaceuticals to Host R&D Day on Emerging Pipeline of RNAi Therapeutics September 25th, 2018

Arrowhead Pharmaceuticals to Host R&D Day on Emerging Pipeline of RNAi Therapeutics September 25th, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Arrowhead Pharmaceuticals to Present at Upcoming September 2018 Conferences August 31st, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project