Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

CNSE's Albany NanoTech Complex
CNSE's Albany NanoTech Complex

Abstract:
Innovative work by researchers from CNSE and its global corporate partners at CNSE's Albany NanoTech Complex to be featured at SPIE Advanced Lithography Conference

Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

Albany, NY | Posted on February 16th, 2010

Innovative research conducted at the College of Nanoscale Science and Engineering's ("CNSE") Albany NanoTech ("ANT") Complex provides the basis for more than 40 scientific and technical papers to be presented next week at one of the world's leading conferences focused on advanced lithography.

The papers will be introduced at the SPIE Advanced Lithography conference, to be held February 21 through 25 in San Jose, CA. They cite leading-edge research performed by CNSE research teams; by global corporate partners' research teams resident at CNSE, including IBM, SEMATECH, GlobalFoundries, Tokyo Electron, Applied Materials, ASML, Vistec Lithography and the National Institute of Standards and Technology ("NIST"); and through collaborative programs involving the UAlbany NanoCollege and its corporate partners' research teams located at CNSE's ANT Complex.

Cutting-edge innovations designed to address a host of critical lithography challenges are outlined in a variety of technical areas, including advanced photoresist materials, mask blanks and process technologies for extreme ultraviolet ("EUV") lithography; double-patterning techniques for optical microlithography; lithographic techniques for self-assembly; and advances in electron-beam ("e-beam") lithography, nanometrology, and nanoimprint technologies, among others.

Dr. Timothy Groves, CNSE Empire Innovation Professor of Nanoscale Science and Director of CNSE's Center for Nanolithography Development, said, "The presentation of more than 40 scientific and technical papers at the SPIE Advanced Lithography conference based on research performed at CNSE's Albany NanoTech Complex further demonstrates the success of pioneering partnerships between academia and industry in driving cutting-edge research and development. These collaborations are clearly enabling critical innovations in nanoscale lithography that will serve to meet the needs of the global nanoelectronics industry."

Dr. John Hartley, CNSE Professor of Nanoengineering and Director of CNSE's Advanced Lithography Center, said, "The groundbreaking work being done at the UAlbany NanoCollege, from researchers both at CNSE and our world-class roster of global corporate partners, is playing an important role in accelerating the use of lithography technologies for the manufacturing of advanced nanoelectronics devices. We look forward to presenting the results of that leading-edge research and are confident it will enable critical lithography solutions for the benefit of our industrial partners and the industry as a whole."

The 35th annual SPIE conference - considered the nanoelectronics lithography industry's most important technical event - is expected to attract thousands of attendees.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech.

For more information, please click here

Contacts:
Steve Janack
CNSE Vice President for Marketing and Communications
(phone) 518-956-7322
(cell) 518-312-5009

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanotube fiber antennas as capable as copper: Rice University researchers show their flexible fibers work well but weigh much less October 23rd, 2017

Arrowhead Presents Promising Preclinical Data on Development of ARO-AAT for Treatment of Alpha-1 Liver Disease at Liver Meeting(R) 2017 October 23rd, 2017

A step closer to understanding quantum mechanics: Swansea University’s physicists develop a new quantum simulation protocol October 22nd, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Chip Technology

Novel 'converter' heralds breakthrough in ultra-fast data processing at nanoscale: Invention bagged four patents and could potentially make microprocessor chips work 1,000 times faster October 20th, 2017

MIPT scientists revisit optical constants of ultrathin gold films October 20th, 2017

Bringing the atomic world into full color: Researchers turn atomic force microscope measurements into color images October 19th, 2017

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Nanoelectronics

Nanometrics Announces Preliminary Results for the Third Quarter of 2017: Quarterly Results Impacted by Delays in Revenue Recognition on Multiple Systems into Japan October 12th, 2017

Seeing the next dimension of computer chips: Researchers image perfectly smooth side-surfaces of 3-D silicon crystals with a scanning tunneling microscope, paving the way for smaller and faster computing devices October 11th, 2017

Columbia engineers invent breakthrough millimeter-wave circulator IC October 6th, 2017

Tungsten offers nano-interconnects a path of least resistance: Crystalline tungsten shows insight and promise in addressing the challenges of electrical interconnects that have high resistivity at the nanoscale October 4th, 2017

Announcements

Nanotube fiber antennas as capable as copper: Rice University researchers show their flexible fibers work well but weigh much less October 23rd, 2017

Arrowhead Presents Promising Preclinical Data on Development of ARO-AAT for Treatment of Alpha-1 Liver Disease at Liver Meeting(R) 2017 October 23rd, 2017

A step closer to understanding quantum mechanics: Swansea University’s physicists develop a new quantum simulation protocol October 22nd, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Nanotube fiber antennas as capable as copper: Rice University researchers show their flexible fibers work well but weigh much less October 23rd, 2017

A step closer to understanding quantum mechanics: Swansea University’s physicists develop a new quantum simulation protocol October 22nd, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Strange but true: turning a material upside down can sometimes make it softer October 20th, 2017

Events/Classes

Arrowhead Presents Promising Preclinical Data on Development of ARO-AAT for Treatment of Alpha-1 Liver Disease at Liver Meeting(R) 2017 October 23rd, 2017

Nanometrics Announces Preliminary Results for the Third Quarter of 2017: Quarterly Results Impacted by Delays in Revenue Recognition on Multiple Systems into Japan October 12th, 2017

More 22 of 59,885 Print all In new window Leti to Present Update of CoolCube/3DVLSI Technologies Development at 2017 IEEE S3S: Future Developments and Tape-Out Vehicles to Be Presented during Oct. 17 Workshop October 12th, 2017

Arrowhead Pharmaceuticals to Present Preclinical Data on ARO-AAT at The Liver Meeting(R) October 10th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project