Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

CNSE's Albany NanoTech Complex
CNSE's Albany NanoTech Complex

Abstract:
Innovative work by researchers from CNSE and its global corporate partners at CNSE's Albany NanoTech Complex to be featured at SPIE Advanced Lithography Conference

Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

Albany, NY | Posted on February 16th, 2010

Innovative research conducted at the College of Nanoscale Science and Engineering's ("CNSE") Albany NanoTech ("ANT") Complex provides the basis for more than 40 scientific and technical papers to be presented next week at one of the world's leading conferences focused on advanced lithography.

The papers will be introduced at the SPIE Advanced Lithography conference, to be held February 21 through 25 in San Jose, CA. They cite leading-edge research performed by CNSE research teams; by global corporate partners' research teams resident at CNSE, including IBM, SEMATECH, GlobalFoundries, Tokyo Electron, Applied Materials, ASML, Vistec Lithography and the National Institute of Standards and Technology ("NIST"); and through collaborative programs involving the UAlbany NanoCollege and its corporate partners' research teams located at CNSE's ANT Complex.

Cutting-edge innovations designed to address a host of critical lithography challenges are outlined in a variety of technical areas, including advanced photoresist materials, mask blanks and process technologies for extreme ultraviolet ("EUV") lithography; double-patterning techniques for optical microlithography; lithographic techniques for self-assembly; and advances in electron-beam ("e-beam") lithography, nanometrology, and nanoimprint technologies, among others.

Dr. Timothy Groves, CNSE Empire Innovation Professor of Nanoscale Science and Director of CNSE's Center for Nanolithography Development, said, "The presentation of more than 40 scientific and technical papers at the SPIE Advanced Lithography conference based on research performed at CNSE's Albany NanoTech Complex further demonstrates the success of pioneering partnerships between academia and industry in driving cutting-edge research and development. These collaborations are clearly enabling critical innovations in nanoscale lithography that will serve to meet the needs of the global nanoelectronics industry."

Dr. John Hartley, CNSE Professor of Nanoengineering and Director of CNSE's Advanced Lithography Center, said, "The groundbreaking work being done at the UAlbany NanoCollege, from researchers both at CNSE and our world-class roster of global corporate partners, is playing an important role in accelerating the use of lithography technologies for the manufacturing of advanced nanoelectronics devices. We look forward to presenting the results of that leading-edge research and are confident it will enable critical lithography solutions for the benefit of our industrial partners and the industry as a whole."

The 35th annual SPIE conference - considered the nanoelectronics lithography industry's most important technical event - is expected to attract thousands of attendees.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech.

For more information, please click here

Contacts:
Steve Janack
CNSE Vice President for Marketing and Communications
(phone) 518-956-7322
(cell) 518-312-5009

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Organometallics welcomes new editor-in-chief: Paul Chirik, Ph.D. July 22nd, 2014

The Hiden EQP Plasma Diagnostic with on-board MCA July 22nd, 2014

NIST shows ultrasonically propelled nanorods spin dizzyingly fast July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Chip Technology

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

NUS scientists use low cost technique to improve properties and functions of nanomaterials: By 'drawing' micropatterns on nanomaterials using a focused laser beam, scientists could modify properties of nanomaterials for effective applications in photonic and optoelectric applicat July 22nd, 2014

Dongbu HiTek Unveils Low-Voltage BCDMOS Process for Efficient Power Management in Smart Phones and Tablet Computers July 21st, 2014

Nanoelectronics

3-D nanostructure could benefit nanoelectronics, gas storage: Rice U. researchers predict functional advantages of 3-D boron nitride July 15th, 2014

IBM Announces $3 Billion Research Initiative to Tackle Chip Grand Challenges for Cloud and Big Data Systems: Scientists and engineers to push limits of silicon technology to 7 nanometers and below and create post-silicon future July 10th, 2014

Carbodeon enables 20 percent increase in polymer thermal filler conductivity with 0.03 wt.% nanodiamond additive at a lower cost than with traditional fillers: Improved materials and processes enable nanodiamond cost reductions of up to 70 percent for electronics and LED app July 9th, 2014

Nanotechnology that will impact the Security & Defense sectors to be discussed at NanoSD2014 conference July 8th, 2014

Announcements

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Bruker Awarded Fourth PeakForce Tapping Patent: AFM Mode Uniquely Combines Highest Resolution Imaging and Material Property Mapping July 22nd, 2014

NIST shows ultrasonically propelled nanorods spin dizzyingly fast July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals

Organometallics welcomes new editor-in-chief: Paul Chirik, Ph.D. July 22nd, 2014

NIST shows ultrasonically propelled nanorods spin dizzyingly fast July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

NUS scientists use low cost technique to improve properties and functions of nanomaterials: By 'drawing' micropatterns on nanomaterials using a focused laser beam, scientists could modify properties of nanomaterials for effective applications in photonic and optoelectric applicat July 22nd, 2014

Events/Classes

Iran to Hold 3rd Int'l Forum on Nanotechnology Economy July 22nd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Iran to Host 1st Asian Congress on Nanostructures on Kish Island July 21st, 2014

Aspen Aerogels, Inc. Schedules Second Quarter 2014 Earnings Release and Conference Call July 15th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE