Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

CNSE's Albany NanoTech Complex
CNSE's Albany NanoTech Complex

Abstract:
Innovative work by researchers from CNSE and its global corporate partners at CNSE's Albany NanoTech Complex to be featured at SPIE Advanced Lithography Conference

Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

Albany, NY | Posted on February 16th, 2010

Innovative research conducted at the College of Nanoscale Science and Engineering's ("CNSE") Albany NanoTech ("ANT") Complex provides the basis for more than 40 scientific and technical papers to be presented next week at one of the world's leading conferences focused on advanced lithography.

The papers will be introduced at the SPIE Advanced Lithography conference, to be held February 21 through 25 in San Jose, CA. They cite leading-edge research performed by CNSE research teams; by global corporate partners' research teams resident at CNSE, including IBM, SEMATECH, GlobalFoundries, Tokyo Electron, Applied Materials, ASML, Vistec Lithography and the National Institute of Standards and Technology ("NIST"); and through collaborative programs involving the UAlbany NanoCollege and its corporate partners' research teams located at CNSE's ANT Complex.

Cutting-edge innovations designed to address a host of critical lithography challenges are outlined in a variety of technical areas, including advanced photoresist materials, mask blanks and process technologies for extreme ultraviolet ("EUV") lithography; double-patterning techniques for optical microlithography; lithographic techniques for self-assembly; and advances in electron-beam ("e-beam") lithography, nanometrology, and nanoimprint technologies, among others.

Dr. Timothy Groves, CNSE Empire Innovation Professor of Nanoscale Science and Director of CNSE's Center for Nanolithography Development, said, "The presentation of more than 40 scientific and technical papers at the SPIE Advanced Lithography conference based on research performed at CNSE's Albany NanoTech Complex further demonstrates the success of pioneering partnerships between academia and industry in driving cutting-edge research and development. These collaborations are clearly enabling critical innovations in nanoscale lithography that will serve to meet the needs of the global nanoelectronics industry."

Dr. John Hartley, CNSE Professor of Nanoengineering and Director of CNSE's Advanced Lithography Center, said, "The groundbreaking work being done at the UAlbany NanoCollege, from researchers both at CNSE and our world-class roster of global corporate partners, is playing an important role in accelerating the use of lithography technologies for the manufacturing of advanced nanoelectronics devices. We look forward to presenting the results of that leading-edge research and are confident it will enable critical lithography solutions for the benefit of our industrial partners and the industry as a whole."

The 35th annual SPIE conference - considered the nanoelectronics lithography industry's most important technical event - is expected to attract thousands of attendees.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech.

For more information, please click here

Contacts:
Steve Janack
CNSE Vice President for Marketing and Communications
(phone) 518-956-7322
(cell) 518-312-5009

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Harris & Harris Group Notes Announcements by Its Portfolio Companies During the Third Quarter of 2016 September 30th, 2016

INVECAS to Enable ASIC Designs for Tomorrows Intelligent Systems on GLOBALFOUNDRIES' FDX Technology: INVECAS to Collaborate with GLOBALFOUNDRIES to Provide IP and End-to-End ASIC Design Services on 22FDX and 12FDX Technologies September 30th, 2016

How to power up graphene implants without frying cells: New analysis finds way to safely conduct heat from graphene to biological tissues September 30th, 2016

Innovation in Nanotechnology is Focus of Symposium: Annual event brings international experts to Northwestern Oct. 6 September 29th, 2016

Chip Technology

INVECAS to Enable ASIC Designs for Tomorrows Intelligent Systems on GLOBALFOUNDRIES' FDX Technology: INVECAS to Collaborate with GLOBALFOUNDRIES to Provide IP and End-to-End ASIC Design Services on 22FDX and 12FDX Technologies September 30th, 2016

Picosun patents ALD nanolaminate to prevent electronics from overheating September 28th, 2016

Researchers at the Catalan Institute of Nanoscience and Nanotechnology show that bending semiconductors generates electricity September 26th, 2016

Mexican scientist in the Netherlands seeks to achieve data transmission ... speed of light September 20th, 2016

Nanoelectronics

Mexican scientist in the Netherlands seeks to achieve data transmission ... speed of light September 20th, 2016

GLOBALFOUNDRIES to Deliver Industrys Leading-Performance Offering of 7nm FinFET Technology: Company extends its leading-edge roadmap for products demanding the ultimate processing power September 15th, 2016

Semiconducting inorganic double helix: New flexible semiconductor for electronics, solar technology and photo catalysis September 15th, 2016

A versatile method to pattern functionalized nanowires: A team of researchers from Hokkaido University has developed a versatile method to pattern the structure of 'nanowires,' providing a new tool for the development of novel nanodevices September 9th, 2016

Announcements

Harris & Harris Group Notes Announcements by Its Portfolio Companies During the Third Quarter of 2016 September 30th, 2016

INVECAS to Enable ASIC Designs for Tomorrows Intelligent Systems on GLOBALFOUNDRIES' FDX Technology: INVECAS to Collaborate with GLOBALFOUNDRIES to Provide IP and End-to-End ASIC Design Services on 22FDX and 12FDX Technologies September 30th, 2016

How to power up graphene implants without frying cells: New analysis finds way to safely conduct heat from graphene to biological tissues September 30th, 2016

Innovation in Nanotechnology is Focus of Symposium: Annual event brings international experts to Northwestern Oct. 6 September 29th, 2016

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Nanosensors could help determine tumors ability to remodel tissue: Measuring enzyme levels could help doctors select appropriate treatments September 29th, 2016

Fighting cancer with sticky nanoparticles September 27th, 2016

Gold nanoparticles conjugated quercetin inhibits epithelial-mesenchymal transition, angiogenesis and invasiveness via EGFR/VEGFR-2 mediated pathway in breast cancer September 27th, 2016

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

Events/Classes

Innovation in Nanotechnology is Focus of Symposium: Annual event brings international experts to Northwestern Oct. 6 September 29th, 2016

Cambrios at CEATEC - Japan 2016 September 29th, 2016

Leti and Taiwanese Tech Organizations Sponsoring Workshop in Taipei on MEMS, IoT, Smart Lighting Applications, System Reliability & Security September 28th, 2016

Oxford Instruments is Bringing the Nanoworld Together in India once again - 22 - 23 November 2016 | IISc Bangalore September 21st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic