Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

CNSE's Albany NanoTech Complex
CNSE's Albany NanoTech Complex

Abstract:
Innovative work by researchers from CNSE and its global corporate partners at CNSE's Albany NanoTech Complex to be featured at SPIE Advanced Lithography Conference

Research at UAlbany NanoCollege Contributes to Over 40 Technical Papers at Leading Global Lithography Forum

Albany, NY | Posted on February 16th, 2010

Innovative research conducted at the College of Nanoscale Science and Engineering's ("CNSE") Albany NanoTech ("ANT") Complex provides the basis for more than 40 scientific and technical papers to be presented next week at one of the world's leading conferences focused on advanced lithography.

The papers will be introduced at the SPIE Advanced Lithography conference, to be held February 21 through 25 in San Jose, CA. They cite leading-edge research performed by CNSE research teams; by global corporate partners' research teams resident at CNSE, including IBM, SEMATECH, GlobalFoundries, Tokyo Electron, Applied Materials, ASML, Vistec Lithography and the National Institute of Standards and Technology ("NIST"); and through collaborative programs involving the UAlbany NanoCollege and its corporate partners' research teams located at CNSE's ANT Complex.

Cutting-edge innovations designed to address a host of critical lithography challenges are outlined in a variety of technical areas, including advanced photoresist materials, mask blanks and process technologies for extreme ultraviolet ("EUV") lithography; double-patterning techniques for optical microlithography; lithographic techniques for self-assembly; and advances in electron-beam ("e-beam") lithography, nanometrology, and nanoimprint technologies, among others.

Dr. Timothy Groves, CNSE Empire Innovation Professor of Nanoscale Science and Director of CNSE's Center for Nanolithography Development, said, "The presentation of more than 40 scientific and technical papers at the SPIE Advanced Lithography conference based on research performed at CNSE's Albany NanoTech Complex further demonstrates the success of pioneering partnerships between academia and industry in driving cutting-edge research and development. These collaborations are clearly enabling critical innovations in nanoscale lithography that will serve to meet the needs of the global nanoelectronics industry."

Dr. John Hartley, CNSE Professor of Nanoengineering and Director of CNSE's Advanced Lithography Center, said, "The groundbreaking work being done at the UAlbany NanoCollege, from researchers both at CNSE and our world-class roster of global corporate partners, is playing an important role in accelerating the use of lithography technologies for the manufacturing of advanced nanoelectronics devices. We look forward to presenting the results of that leading-edge research and are confident it will enable critical lithography solutions for the benefit of our industrial partners and the industry as a whole."

The 35th annual SPIE conference - considered the nanoelectronics lithography industry's most important technical event - is expected to attract thousands of attendees.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech.

For more information, please click here

Contacts:
Steve Janack
CNSE Vice President for Marketing and Communications
(phone) 518-956-7322
(cell) 518-312-5009

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Thin films offer promise for ferroelectric devices: Researchers at Tokyo Institute of Technology demystify the ferroelectric properties observed in hafnium-oxide-based thin films, revealing a potentially useful device material August 3rd, 2015

Harris & Harris Group Portfolio Company, HZO, Announces Partnerships with Dell and Motorola August 1st, 2015

Advances and Applications in Biosensing, Sensor Power, and Sensor R&D to be Covered at Sensors Global Summit August 1st, 2015

Kalam: versatility personified August 1st, 2015

Chip Technology

Thin films offer promise for ferroelectric devices: Researchers at Tokyo Institute of Technology demystify the ferroelectric properties observed in hafnium-oxide-based thin films, revealing a potentially useful device material August 3rd, 2015

This could replace your silicon computer chips: A new semiconductor material made from black phosphorus may be a candidate to replace silicon in future tech July 30th, 2015

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Nanoelectronics

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

ORNL researchers make scalable arrays of 'building blocks' for ultrathin electronics July 22nd, 2015

An easy, scalable and direct method for synthesizing graphene in silicon microelectronics: Korean researchers grow 4-inch diameter, high-quality, multi-layer graphene on desired silicon substrates, an important step for harnessing graphene in commercial silicon microelectronics July 21st, 2015

Announcements

Thin films offer promise for ferroelectric devices: Researchers at Tokyo Institute of Technology demystify the ferroelectric properties observed in hafnium-oxide-based thin films, revealing a potentially useful device material August 3rd, 2015

Transparent, electrically conductive network of encapsulated silver nanowires: A novel electrode for optoelectronics August 1st, 2015

Harris & Harris Group Portfolio Company, HZO, Announces Partnerships with Dell and Motorola August 1st, 2015

Advances and Applications in Biosensing, Sensor Power, and Sensor R&D to be Covered at Sensors Global Summit August 1st, 2015

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Thin films offer promise for ferroelectric devices: Researchers at Tokyo Institute of Technology demystify the ferroelectric properties observed in hafnium-oxide-based thin films, revealing a potentially useful device material August 3rd, 2015

Shaping the hilly landscapes of a semi-conductor nanoworld August 1st, 2015

Solid state physics: Quantum matter stuck in unrest August 1st, 2015

Self-assembling, biomimetic membranes may aid water filtration August 1st, 2015

Events/Classes

Advances and Applications in Biosensing, Sensor Power, and Sensor R&D to be Covered at Sensors Global Summit August 1st, 2015

Pakistani Students Who Survived Terror Attack to Attend Weeklong “NanoDiscovery Institute” at SUNY Poly CNSE in Albany July 29th, 2015

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Nanometrics Announces Upcoming Investor Events July 28th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project