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Home > News > Supercritical fluids used to create 3 nanometer wiring

August 11th, 2009

Supercritical fluids used to create 3 nanometer wiring

Abstract:
Using supercritical fluids, researchers in the UK deposited 3nm copper wiring by infiltrating the fluid into porous SiO2. While commercial deployment depends on next-generation patterning methods, the process is highly extensible and scalable, making it a prime candidate for future device fabrication.

In this week's PNAS, scientists from the Universities of Nottingham and Southampton demonstrate a technique that allows the electrodeposition of 3nm copper lines that may help continue the rush to tiny features

Source:
arstechnica.com

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