Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Fraunhofer IOF Selects EV Group UV-Nanoimprint Lithography (UV-NIL) System for Leading-Edge Applied Optoelectronics R&D

Abstract:
Prestigious Research Institute a Strategic Win for EV Group

Fraunhofer IOF Selects EV Group UV-Nanoimprint Lithography (UV-NIL) System for Leading-Edge Applied Optoelectronics R&D

St. Florian, Austria | Posted on May 12th, 2009

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that Fraunhofer Institute for Applied Optics and Precision Engineering IOF--one of 57 institutes of the Fraunhofer-Gesellschaft dedicated to applied optics and precision applications-oriented research--selected EVG's UV-based nanoimprint lithography (UV-NIL) step and repeat system for its leading-edge optoelectronic research efforts. The Institute will be using the UV-NIL stepper for micro-lens mastering and molding for a host of micro-optics applications, including fiber optics and CMOS image sensors for wafer-level cameras, as well as for other nanoimprinting applications.

EVG's unique step and repeat imprinting approach integrates a lens master generation capability, which augments traditional single-step processes. This added capability enables the creation of a lens master for working stamp fabrication and subsequent full-wafer lens micro-molding. The system also offers significant cost-savings advantages, particularly compared to traditional lens master fabrication techniques, including the elimination of post-processing steps, the flexibility to use a variety of commercially available resists, and increased throughput. Pulling from its expertise in alignment systems, EVG's UV-NIL stepper features sub-micron alignment accuracy, resulting in improved yield as well as device performance.

"We are continuing to push the envelope in micro-optics research, and as such are looking for equipment partners that offer flexible, innovative, yet cost-effective systems that keep us on the cutting edge," said Dr. Peter Dannberg, group leader "Micro-optics Technology" of Fraunhofer IOF. "After evaluating solutions from several nanoimprint lithography suppliers, we ultimately selected EVG's system following positive demo results as well as for its superior micro-lens mastering and nanoimprinting capabilities. The process flexibility its UV-NIL stepper offers is a significant value add as well since it provides us with the ability to utilize it for a variety of applications."

"This opportunity to partner with a bellwether research institute such as Fraunhofer IOF is significant to us on many levels," noted Dr. Thomas Glinsner, head of product management for EV Group. "EVG's history is deeply rooted in serving R&D environments where there is a need for high-performance tools that are flexible and cost effective. Working closely with R&D universities and institutions is how we started our business, and over the years, it has opened new markets to EVG, allowing us to be involved in technologies from R&D infancy through high-volume commercialization. We are thrilled to be working with a world-renowned institute like Fraunhofer, and look forward to the exciting new opportunities our partnership may bring."

Nanoimprint lithography is gaining adoption in leading-edge R&D for various devices including wafer-level cameras, where lower manufacturing costs without sacrificing pattern fidelity is key to meeting the demands from markets such as mobile phones and optics. EVG has been active in UV-NIL since 1997, and has since worked with various industry partners and R&D institutions on developing nanoimprinting technologies. Among its high-volume customer base is Heptagon Micro-Optics Pte Ltd. in Singapore, who selected EVG's IQ Aligner for high-volume microlens production announced in July 2008.

About Fraunhofer IOF

The Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena was founded in 1992 and carries out customer-specific developments in fields of optical system technology with the objective of controlling light--from its generation, guidance and manipulation to its ultimate application. Focus of the research is put on multi-functional optical coatings and its characterization, micro- and nano-structure technology for optics, micro-optical systems, beam guiding optics, high-power fiber lasers and their application, optical measurement systems and sensors, fine mechanical precision systems and procedures of optics assembly. The competences of about 140 employees include the complete value chain from optics and mechanics design, development of manufacturing processes for optical and mechanical components and system integration to prototyping and small pilot series production.

The Fraunhofer IOF is a competent partner to local, national and international industries and a contractor to the public sector in the field of optics and photonics that supports the transition of innovative ideas into new products. The customers of Fraunhofer IOF come from the markets information and communication, illumination, transport and traffic, production, life sciences, medical technology, astronomy and aerospace, pollution conservation and security.

####

About EV Group (EVG)
EV Group (EVG) is a world leader in wafer-processing solutions for semiconductor, MEMS and nanotechnology applications. Through close collaboration with its global customers, the company implements its flexible manufacturing model to develop reliable, high-quality, low-cost-of-ownership systems that are easily integrated into customers' fab lines. Key products include wafer bonding, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.

In addition to its dominant share of the market for wafer bonders, EVG holds a leading position in NIL and lithography for advanced packaging and MEMS. Along these lines, the company co-founded the EMC-3D consortium in 2006 to create and help drive implementation of a cost-effective through-silicon via (TSV) process for major ICs and MEMS/sensors. Other target semiconductor-related markets include silicon-on-insulator (SOI), compound semiconductor and silicon-based power-device solutions.

Founded in 1980, EVG is headquartered in St. Florian, Austria, and operates via a global customer support network, with subsidiaries in Tempe, Ariz.; Albany, NY; Yokohama and Fukuoka, Japan; Seoul, Korea and Chung-Li, Taiwan. The company's unique Triple i-approach (invent - innovate - implement) is supported by a vertical integration, allowing EVG to respond quickly to new technology developments, apply the technology to manufacturing challenges and expedite device manufacturing in high volume.

For more information, please click here

Copyright © PR Newswire Association LLC.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Organometallics welcomes new editor-in-chief: Paul Chirik, Ph.D. July 22nd, 2014

The Hiden EQP Plasma Diagnostic with on-board MCA July 22nd, 2014

Iran to Hold 3rd Int'l Forum on Nanotechnology Economy July 22nd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Laboratories

NIST shows ultrasonically propelled nanorods spin dizzyingly fast July 22nd, 2014

Sono-Tek Corporation Announces New Clean Room Rated Laboratory Facility in China July 18th, 2014

Fundamental Chemistry Findings Could Help Extend Moore’s Law: A Berkeley Lab-Intel collaboration outlines the chemistry of photoresist, enabling smaller features for future generations of microprocessors July 15th, 2014

Labs characterize carbon for batteries: Rice, Lawrence Livermore scientists calculate materials’ potential for use as electrodes July 14th, 2014

Announcements

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Bruker Awarded Fourth PeakForce Tapping Patent: AFM Mode Uniquely Combines Highest Resolution Imaging and Material Property Mapping July 22nd, 2014

NIST shows ultrasonically propelled nanorods spin dizzyingly fast July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Tools

EPFL Research on the use of AFM based nanoscale IR spectroscopy for the study of single amyloid molecules wins poster competition at Swiss Physics Society meeting July 22nd, 2014

The Hiden EQP Plasma Diagnostic with on-board MCA July 22nd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Bruker Awarded Fourth PeakForce Tapping Patent: AFM Mode Uniquely Combines Highest Resolution Imaging and Material Property Mapping July 22nd, 2014

New-Contracts/Sales/Customers

STFC takes delivery of the 100th Hitachi Tabletop SEM in the UK July 3rd, 2014

University of Maastricht Adds Complete Correlative Workflow from FEI to its Institute of Nanoscopy June 23rd, 2014

LatticeGear Sells First LatticeAx 300 Cleaving System to X-FAB: LatticeAx 300 provides fast, accurate cross-sectioning of samples for analysis — more accurately than manual methods and faster and less expensively than automated systems June 9th, 2014

UMass Amherst Purchases Nanonex Advanced 8" NIL Tool NX-2608BA May 28th, 2014

Printing/Lithography/Inkjet/Inks

Martini Tech Inc. becomes the exclusive distributor for Yoshioka Seiko Co. porous chucks for Europe and North America July 20th, 2014

University of Illinois researchers demonstrate novel, tunable nanoantennas July 14th, 2014

Haydale Announces Collaboration Agreement with Swansea University’s Welsh Centre for Printing and Coatings (WCPC) July 12th, 2014

Leti to Present Technological Platforms Targeting Industry’s Needs for the Future at Semicon West Workshop: Presentation at STS Session to Focus on Leti Advanced Lithography Programs for 1x Nodes and on Silicon Photonics at TechXPot June 25th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE