Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Nanoscale Dimensioning Is Fast, Cheap with New NIST Optical Technique

This schematic (left) shows how a TSOM image is acquired. Using an optical microscope, several images of a 60 nanometer gold particle sample (shown in red) are taken at different focal positions and stacked together. The computer-created image on the right shows the resultant TSOM image.

Credit: NIST
This schematic (left) shows how a TSOM image is acquired. Using an optical microscope, several images of a 60 nanometer gold particle sample (shown in red) are taken at different focal positions and stacked together. The computer-created image on the right shows the resultant TSOM image.

Credit: NIST

Abstract:
A novel technique* under development at the National Institute of Standards and Technology (NIST) uses a relatively inexpensive optical microscope to quickly and cheaply analyze nanoscale dimensions with nanoscale measurement sensitivity. Termed "Through-focus Scanning Optical Microscope" (TSOM) imaging, the technique has potential applications in nanomanufacturing, semiconductor process control and biotechnology.

Nanoscale Dimensioning Is Fast, Cheap with New NIST Optical Technique

GAITHERSBURG, MD | Posted on October 28th, 2008

Optical microscopes are not widely considered for checking nanoscale (below 100 nanometers) dimensions because of the limitation imposed by wavelength of light—you can't get a precise image with a probe three times the object's size. NIST researcher Ravikiran Attota gets around this, paradoxically, by considering lots of "bad" (out-of-focus) images. "This imaging uses a set of blurry, out-of-focus optical images for nanometer dimensional measurement sensitivity," he says. Instead of repeatedly focusing on a sample to acquire one best image, the new technique captures a series of images with an optical microscope at different focal positions and stacks them one on top of the other to create the TSOM image. A computer program Attota developed analyzes the image.

While Attota believes this simple technique can be used in a variety of applications, he has worked with two. The TSOM image can compare two nanoscale objects such as silicon lines on an integrated circuit. The software "subtracts" one image from the other. This enables sensitivity to dimensional differences at the nanoscale—line height, width or side-wall angle. Each type of difference generates a distinct signal.

TSOM has also been theoretically evaluated in another quality control application. Medical researchers are studying the use of gold nanoparticles to deliver advanced pharmaceuticals to specific locations within the human body. Perfect size will be critical. To address this application, a TSOM image of a gold nanoparticle can be taken and compared to a library of simulated images to obtain "best-match" images with the intent of determining if each nanoparticle passes or fails.

This new imaging technology requires a research-quality optical microscope, a camera and a microscope stage that can move at preset distances. "The setup is easily under $50,000, which is much less expensive than electron or probe microscopes currently used for measuring materials at the nanoscale," Attota explains. "This method is another approach to extend the range of optical microscopy from microscale to nanoscale dimensional analysis." So far, sensitivity to a 3 nm difference in line widths has been demonstrated in the laboratory.

* R. Attota, T.A. Germer and R.M. Silver. Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis, Optics Letters 33, 1990 (2008).

####

About NIST
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Department of Commerce. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life.

For more information, please click here

Contacts:
Evelyn Brown

(301) 975-5661

Copyright © NIST

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

A first glimpse inside a macroscopic quantum state March 28th, 2015

DFG to Establish One Clinical Research Unit and Five Research Units: New Projects to Investigate Complications in Pregnancy, Particle Physics, Nanoparticles, Implants and Transport Planning / Approximately 13 Million Euros in Funding for an Initial Three-Year Period March 28th, 2015

Chemists make new silicon-based nanomaterials March 27th, 2015

UT Dallas engineers twist nanofibers to create structures tougher than bulletproof vests March 27th, 2015

Imaging

FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Society’s Annual Meeting, held 18-21 March 2015 March 26th, 2015

Square ice filling for a graphene sandwich March 26th, 2015

Renishaw reports on the use of Raman spectroscopy at CNRS Orléans to study materials under extreme conditions March 25th, 2015

Nanorobotic agents open the blood-brain barrier, offering hope for new brain treatments March 25th, 2015

Discoveries

A first glimpse inside a macroscopic quantum state March 28th, 2015

UT Dallas engineers twist nanofibers to create structures tougher than bulletproof vests March 27th, 2015

Novel nanoparticle therapy promotes wound healing March 27th, 2015

Designer's toolkit for dynamic DNA nanomachines: Arm-waving nanorobot signals new flexibility in DNA origami March 27th, 2015

Announcements

A first glimpse inside a macroscopic quantum state March 28th, 2015

DFG to Establish One Clinical Research Unit and Five Research Units: New Projects to Investigate Complications in Pregnancy, Particle Physics, Nanoparticles, Implants and Transport Planning / Approximately 13 Million Euros in Funding for an Initial Three-Year Period March 28th, 2015

Designer's toolkit for dynamic DNA nanomachines: Arm-waving nanorobot signals new flexibility in DNA origami March 27th, 2015

Using magnetic fields to understand high-temperature superconductivity: Los Alamos explores experimental path to potential 'next theory of superconductivity' March 27th, 2015

Tools

LAMDAMAP 2015 hosted by the University March 26th, 2015

FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Society’s Annual Meeting, held 18-21 March 2015 March 26th, 2015

Square ice filling for a graphene sandwich March 26th, 2015

Nanorobotic agents open the blood-brain barrier, offering hope for new brain treatments March 25th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE