Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tegal Receives Repeat Order for 6500 Series Advanced Plasma Etch System from Skyworks Solutions, Inc.

Abstract:
Global Wireless Device Leader Again Selects Tegal Fabrication Tools to Produce High Performance Components For Multimode and Multimedia Handsets

Tegal Receives Repeat Order for 6500 Series Advanced Plasma Etch System from Skyworks Solutions, Inc.

PETALUMA, CA | Posted on November 6th, 2007

Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced that it had received a repeat order for a second Tegal 6500 Advanced Etch cluster tool from Skyworks Solutions, Inc. The system will be shipped to Skyworks' fab in Southern California, where it will join the Tegal 6500 system already in place for etching SiN and other critical thin films on GaAs substrates. This repeat 6500 tool order supports Skyworks' business expansion in the multimode and multimedia handset market, where Skyworks supports many of today's leading handset manufacturers including LG, Motorola, Nokia, Samsung, and Sony Ericsson.

"Skyworks' selection of the Tegal 6500 system for this repeat etch tool order is evidence of the high degree of confidence Skyworks has in Tegal's technical capabilities and plasma etch process results," said Scott Brown, Vice President, North American Sales, of Tegal Corporation. "It also demonstrates Tegal's strong ongoing commitment to the compound semiconductor fabrication market for both plasma etch and for PVD applications, and Tegal's strong commitment to our innovative customers, like Skyworks Solutions, in the compound semiconductor space."

The Tegal 6500 etch system is a state-of the-art, high-vacuum cluster tool used in production fabs to etch a variety of thin films in an extremely clean process environment. Tegal 6500 Series tools are widely used in compound semiconductor, opto-electronic, non-volatile memory, and analog and power device fabrication, and in the fabrication of MEMS devices. The 6500 system has an easy-to-use GUI, SECS/GEM communication, and flexible wafer shape and size handling capabilities that makes it ideal for production applications on a variety of wafer substrates. Optional integrated plasma strip and rinse chambers, electro-static chucks with a wide temperature range, plasma emission diode array end-point detection, and active wafer temperature monitoring and control, are available to facilitate the etching of the many different dielectric and conductive films used in microelectronic device production.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of compound semiconductor, magnetic data storage, advanced semiconductor, optoelectronic, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegals system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

About Skyworks Solutions

Skyworks Solutions, Inc. is an innovator of high performance analog and mixed signal semiconductors enabling mobile connectivity. The company's power amplifiers, front-end modules and direct conversion radios are at the heart of many of today's leading-edge multimedia handsets. Leveraging core technologies, Skyworks also offers a diverse portfolio of linear products that support automotive, broadband, cellular infrastructure, industrial and medical applications. Headquartered in Woburn, Mass., Skyworks is worldwide with engineering, manufacturing, sales and service facilities throughout Asia, Europe and North America.

For more information about Skyworks Solutions, visit: http://www.skyworksinc.com

For more information, please click here

Contacts:
Tegal Corporation
John Almerico, 707-763-5600
(Marketing Director Etch Products)
or
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

One step closer to a single-molecule device: Columbia Engineering researchers first to create a single-molecule diode -- the ultimate in miniaturization for electronic devices -- with potential for real-world applications May 25th, 2015

Basel physicists develop efficient method of signal transmission from nanocomponents May 23rd, 2015

Sandia researchers first to measure thermoelectric behavior by 'Tinkertoy' materials May 20th, 2015

Defects can 'Hulk-up' materials: Berkeley lab study shows properly managed damage can boost material thermoelectric performances May 20th, 2015

Announcements

Researchers find the 'key' to quantum network solution May 25th, 2015

One step closer to a single-molecule device: Columbia Engineering researchers first to create a single-molecule diode -- the ultimate in miniaturization for electronic devices -- with potential for real-world applications May 25th, 2015

DNA Double Helix Does Double Duty in Assembling Arrays of Nanoparticles: Synthetic pieces of biological molecule form framework and glue for making nanoparticle clusters and arrays May 25th, 2015

Engineering Phase Changes in Nanoparticle Arrays: Scientists alter attractive and repulsive forces between DNA-linked particles to make dynamic, phase-shifting forms of nanomaterials May 25th, 2015

Tools

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Nanometrics Announces Live Webcast of Upcoming Investor and Analyst Day May 20th, 2015

Taking control of light emission: Researchers find a way of tuning light waves by pairing 2 exotic 2-D materials May 20th, 2015

DELMIC announces a workshop hosted by Phenom World on Integrated CLEM to be held on Wednesday June 24th at the Francis Crick Institute (Lincoln Inn Fields Laboratory). May 19th, 2015

New-Contracts/Sales/Customers

Argonne chooses Beneqs TFS 500 Atomic Layer Deposition System: Modularity and flexibility make for a natural choice May 14th, 2015

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

FEI Partners With the George Washington University to Equip New Science & Engineering Hall: Suite of new high-performance microscopes will be used for cutting-edge experiments at GWs new research facility April 29th, 2015

Renishaw Raman systems used to study 2D materials at Boston University, Massachusetts, USA. April 28th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project