Home > Press > Tegal Receives Repeat Order for 6500 Series Advanced Plasma Etch System from Skyworks Solutions, Inc.
Global Wireless Device Leader Again Selects Tegal Fabrication Tools to Produce High Performance Components For Multimode and Multimedia Handsets
Tegal Receives Repeat Order for 6500 Series Advanced Plasma Etch System from Skyworks Solutions, Inc.
PETALUMA, CA | Posted on November 6th, 2007
Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced that it had received a repeat order for a second Tegal 6500 Advanced Etch cluster tool from Skyworks Solutions, Inc. The system will be shipped to Skyworks' fab in Southern California, where it will join the Tegal 6500 system already in place for etching SiN and other critical thin films on GaAs substrates. This repeat 6500 tool order supports Skyworks' business expansion in the multimode and multimedia handset market, where Skyworks supports many of today's leading handset manufacturers including LG, Motorola, Nokia, Samsung, and Sony Ericsson.
"Skyworks' selection of the Tegal 6500 system for this repeat etch tool order is evidence of the high degree of confidence Skyworks has in Tegal's technical capabilities and plasma etch process results," said Scott Brown, Vice President, North American Sales, of Tegal Corporation. "It also demonstrates Tegal's strong ongoing commitment to the compound semiconductor fabrication market for both plasma etch and for PVD applications, and Tegal's strong commitment to our innovative customers, like Skyworks Solutions, in the compound semiconductor space."
The Tegal 6500 etch system is a state-of the-art, high-vacuum cluster tool used in production fabs to etch a variety of thin films in an extremely clean process environment. Tegal 6500 Series tools are widely used in compound semiconductor, opto-electronic, non-volatile memory, and analog and power device fabrication, and in the fabrication of MEMS devices. The 6500 system has an easy-to-use GUI, SECS/GEM communication, and flexible wafer shape and size handling capabilities that makes it ideal for production applications on a variety of wafer substrates. Optional integrated plasma strip and rinse chambers, electro-static chucks with a wide temperature range, plasma emission diode array end-point detection, and active wafer temperature monitoring and control, are available to facilitate the etching of the many different dielectric and conductive films used in microelectronic device production.
Safe Harbor Statement
Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.
About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of compound semiconductor, magnetic data storage, advanced semiconductor, optoelectronic, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.
About Skyworks Solutions
Skyworks Solutions, Inc. is an innovator of high performance analog and mixed signal semiconductors enabling mobile connectivity. The company's power amplifiers, front-end modules and direct conversion radios are at the heart of many of today's leading-edge multimedia handsets. Leveraging core technologies, Skyworks also offers a diverse portfolio of linear products that support automotive, broadband, cellular infrastructure, industrial and medical applications. Headquartered in Woburn, Mass., Skyworks is worldwide with engineering, manufacturing, sales and service facilities throughout Asia, Europe and North America.
For more information about Skyworks Solutions, visit: http://www.skyworksinc.com
For more information, please click here
John Almerico, 707-763-5600
(Marketing Director – Etch Products)
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722
Copyright © Business Wire 2007
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015
SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015
NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015
Building shape inspires new material discovery March 24th, 2015
UT Dallas engineers twist nanofibers to create structures tougher than bulletproof vests March 27th, 2015
Novel nanoparticle therapy promotes wound healing March 27th, 2015
Designer's toolkit for dynamic DNA nanomachines: Arm-waving nanorobot signals new flexibility in DNA origami March 27th, 2015
Using magnetic fields to understand high-temperature superconductivity: Los Alamos explores experimental path to potential 'next theory of superconductivity' March 27th, 2015
LAMDAMAP 2015 hosted by the University March 26th, 2015
FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Society’s Annual Meeting, held 18-21 March 2015 March 26th, 2015
Square ice filling for a graphene sandwich March 26th, 2015
Nanorobotic agents open the blood-brain barrier, offering hope for new brain treatments March 25th, 2015
Industrial Nanotech, Inc. Announces Next Large Order from the Oil and Gas Industry March 26th, 2015
United Nanotech Innovations Lists Materials for Trade on INSCX™ Exchange and Appoints Fullerex as Merchant February 17th, 2015
Virginia Tech Purchases Two Bruker Fluorescence Microscope Solutions: High-Speed Instruments Combine to Cover Wide Optical Resolution Range February 10th, 2015
Nano Labs Announces the Opportunity to Submit the POLEC Liquid Cement Product for Test Trials to Be Used in the Construction of the New International Airport of Mexico City (NAICM) February 2nd, 2015