Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Mattson Technology Selected by Leading Global Chipmaker for Joint Development of Advanced Millisecond Annealing Applications

Abstract:
Millios(TM) Flash RTP (fRTP) System Enables Advanced 45 nm and Beyond Processes

Mattson Technology Selected by Leading Global Chipmaker for Joint Development of Advanced Millisecond Annealing Applications

FREMONT, CA | Posted on July 17th, 2007

Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a leading global semiconductor manufacturer selected its Millios(TM) flash rapid thermal processing (fRTP) system to develop advanced millisecond annealing applications for current and future technology nodes. The system is expected to ship to the chipmaker's 300 millimeter (mm) fab later this year.

In the nanotechnology era, where chips have features 1000 times smaller
than the diameter of a human hair, advanced RTP applications will require
annealing that is fractions of, to a few thousandths of, a second in
duration.

Mattson's Millios fRTP system features a patented arc lamp technology
that processes the wafers through millisecond "flashes" (similar to a
camera flash), providing improved thermal control for ultra-shallow
junction (USJ) anneal and other advanced applications through the 22 nm
regime. Millios also combines fully automated wafer handling hardware and
software from Mattson's production-proven Helios RTP system.

"Millios was designed for next-generation device technologies, and it
has already demonstrated the advanced capabilities to address critical
sub-45 nanometer applications at semiconductor and nanoelectronics research
centers CNT and SEMATECH," said David L. Dutton, Mattson Technology's chief
executive officer. "This selection by one of the world's largest
semiconductor manufacturers validates the system's ability to enable the
advanced technology required to help chipmakers achieve increasingly
smaller geometries and fabricate more powerful chips. We look forward to
working with this latest Millios customer to develop enabling processes for
the next generation of IC manufacturing."

According to Gartner Dataquest, the emerging millisecond anneal market
is anticipated to grow at a compound annual growth rate (CAGR) of 24% from
2007 to 2011, reaching an expected total available market (TAM) of $181.7
million by 2011.

####

About Mattson Technology, Inc.
Mattson Technology, Inc. is the leading supplier of dry strip equipment
and the second largest supplier of rapid thermal processing equipment in
the global semiconductor industry. The company's strip and RTP equipment
utilize innovative technology to deliver advanced processing performance
and productivity gains to semiconductor manufacturers worldwide for the
fabrication of current- and next-generation devices. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911.
Internet: http://www.mattson.com .

For more information, please click here

Contacts:
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6518
fax +1-510-492-2800

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Announcements

Wear-resistant ceramic powder maximises component lifespan in high-stress applications: Innovnano’s nanostructured 3YSZ offers improved tribological performance for manufacturing components September 18th, 2014

IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014

FEI Opens New Technology Center in Czech Republic: FEI expands its presence in Brno with the opening of a new, larger facility September 18th, 2014

Biosensors Get a Boost from Graphene Partnership: $5 Million Investment Supports Dozens of Jobs and Development of 300mm Fabrication Process and Wafer Transfer Facility September 18th, 2014

Tools

IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014

FEI Opens New Technology Center in Czech Republic: FEI expands its presence in Brno with the opening of a new, larger facility September 18th, 2014

New NPZ100-403 Piezo Stage from nPoint Inc. September 17th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

New-Contracts/Sales/Customers

Fullerex: Talga Resources Joins INSCX™ Exchange September 4th, 2014

Global Energy Systems Signs Master Sales Agreement with China Aviation Supplies Group September 4th, 2014

East China University of Science and Technology Purchases Nanonex Advanced Nanoimprint Tool NX-B200 July 30th, 2014

University of Manchester selects Anasys AFM-IR for coatings and corrosion research July 30th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE