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Home > Press > Mattson Technology Selected by Leading Global Chipmaker for Joint Development of Advanced Millisecond Annealing Applications

Abstract:
Millios(TM) Flash RTP (fRTP) System Enables Advanced 45 nm and Beyond Processes

Mattson Technology Selected by Leading Global Chipmaker for Joint Development of Advanced Millisecond Annealing Applications

FREMONT, CA | Posted on July 17th, 2007

Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a leading global semiconductor manufacturer selected its Millios(TM) flash rapid thermal processing (fRTP) system to develop advanced millisecond annealing applications for current and future technology nodes. The system is expected to ship to the chipmaker's 300 millimeter (mm) fab later this year.

In the nanotechnology era, where chips have features 1000 times smaller
than the diameter of a human hair, advanced RTP applications will require
annealing that is fractions of, to a few thousandths of, a second in
duration.

Mattson's Millios fRTP system features a patented arc lamp technology
that processes the wafers through millisecond "flashes" (similar to a
camera flash), providing improved thermal control for ultra-shallow
junction (USJ) anneal and other advanced applications through the 22 nm
regime. Millios also combines fully automated wafer handling hardware and
software from Mattson's production-proven Helios RTP system.

"Millios was designed for next-generation device technologies, and it
has already demonstrated the advanced capabilities to address critical
sub-45 nanometer applications at semiconductor and nanoelectronics research
centers CNT and SEMATECH," said David L. Dutton, Mattson Technology's chief
executive officer. "This selection by one of the world's largest
semiconductor manufacturers validates the system's ability to enable the
advanced technology required to help chipmakers achieve increasingly
smaller geometries and fabricate more powerful chips. We look forward to
working with this latest Millios customer to develop enabling processes for
the next generation of IC manufacturing."

According to Gartner Dataquest, the emerging millisecond anneal market
is anticipated to grow at a compound annual growth rate (CAGR) of 24% from
2007 to 2011, reaching an expected total available market (TAM) of $181.7
million by 2011.

####

About Mattson Technology, Inc.
Mattson Technology, Inc. is the leading supplier of dry strip equipment
and the second largest supplier of rapid thermal processing equipment in
the global semiconductor industry. The company's strip and RTP equipment
utilize innovative technology to deliver advanced processing performance
and productivity gains to semiconductor manufacturers worldwide for the
fabrication of current- and next-generation devices. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911.
Internet: http://www.mattson.com .

For more information, please click here

Contacts:
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6518
fax +1-510-492-2800

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