Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Mattson Technology Selected by Leading Global Chipmaker for Joint Development of Advanced Millisecond Annealing Applications

Abstract:
Millios(TM) Flash RTP (fRTP) System Enables Advanced 45 nm and Beyond Processes

Mattson Technology Selected by Leading Global Chipmaker for Joint Development of Advanced Millisecond Annealing Applications

FREMONT, CA | Posted on July 17th, 2007

Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a leading global semiconductor manufacturer selected its Millios(TM) flash rapid thermal processing (fRTP) system to develop advanced millisecond annealing applications for current and future technology nodes. The system is expected to ship to the chipmaker's 300 millimeter (mm) fab later this year.

In the nanotechnology era, where chips have features 1000 times smaller
than the diameter of a human hair, advanced RTP applications will require
annealing that is fractions of, to a few thousandths of, a second in
duration.

Mattson's Millios fRTP system features a patented arc lamp technology
that processes the wafers through millisecond "flashes" (similar to a
camera flash), providing improved thermal control for ultra-shallow
junction (USJ) anneal and other advanced applications through the 22 nm
regime. Millios also combines fully automated wafer handling hardware and
software from Mattson's production-proven Helios RTP system.

"Millios was designed for next-generation device technologies, and it
has already demonstrated the advanced capabilities to address critical
sub-45 nanometer applications at semiconductor and nanoelectronics research
centers CNT and SEMATECH," said David L. Dutton, Mattson Technology's chief
executive officer. "This selection by one of the world's largest
semiconductor manufacturers validates the system's ability to enable the
advanced technology required to help chipmakers achieve increasingly
smaller geometries and fabricate more powerful chips. We look forward to
working with this latest Millios customer to develop enabling processes for
the next generation of IC manufacturing."

According to Gartner Dataquest, the emerging millisecond anneal market
is anticipated to grow at a compound annual growth rate (CAGR) of 24% from
2007 to 2011, reaching an expected total available market (TAM) of $181.7
million by 2011.

####

About Mattson Technology, Inc.
Mattson Technology, Inc. is the leading supplier of dry strip equipment
and the second largest supplier of rapid thermal processing equipment in
the global semiconductor industry. The company's strip and RTP equipment
utilize innovative technology to deliver advanced processing performance
and productivity gains to semiconductor manufacturers worldwide for the
fabrication of current- and next-generation devices. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911.
Internet: http://www.mattson.com .

For more information, please click here

Contacts:
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6518
fax +1-510-492-2800

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Announcements

Solar-to-fuel system recycles CO2 to make ethanol and ethylene: Berkeley Lab advance is first demonstration of efficient, light-powered production of fuel via artificial photosynthesis September 19th, 2017

A new approach to ultrafast light pulses: Unusual fluorescent materials could be used for rapid light-based communications systems September 19th, 2017

New quantum phenomena in graphene superlattices September 18th, 2017

Do titanium dioxide particles from orthopedic implants disrupt bone repair? September 16th, 2017

Tools

Graphene based terahertz absorbers: Printable graphene inks enable ultrafast lasers in the terahertz range September 13th, 2017

Chemical hot spots: Scanning tunneling microscopy measurements identify active sites on catalyst surfaces September 7th, 2017

Phenom-World selects Deben to supply a tensile stage as an accessory to their range of desktop SEMs August 29th, 2017

New results reveal high tunability of 2-D material: Berkeley Lab-led team also provides most precise band gap measurement yet for hotly studied monolayer moly sulfide August 26th, 2017

New-Contracts/Sales/Customers

Probiotics: Novel biosynthetic tool to develop metallic nanoparticles: This research article by Dr. Nida Akhtar et al has been published in Recent Patents on Drug Delivery & Formulation, Volume 11, Issue 1, 2017 July 20th, 2017

Here's a tip: Indented cement shows unique properties: Rice University models reveal nanoindentation can benefit crystals in concrete July 20th, 2017

NMRC, University of Nottingham chooses the Quorum Q150 coater for its reliable and reproducible film thickness when coating samples with iridium June 27th, 2017

Park Systems Introduces Park NX12 for Unsurpassed Affordable High Resolution NanoScale Imaging Required for Advanced Analytical Chemistry, Materials Research, and Multi-User Facility June 5th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project