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Home > News > Cenamps to provide ALD foundry using Oxford Instruments tool

March 19th, 2007

Cenamps to provide ALD foundry using Oxford Instruments tool

The Centre of Excellence for Nano, Micro and Photonic Systems (Cenamps) in Newcastle, UK (which is funded by the One NorthEast regional development agency) has chosen a FlexAL atomic layer deposition (ALD) tool from Oxford Instruments Plasma Technology (OIPT) for its new ALD Foundry, which will begin operations in July.


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