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Home > News > Cenamps to provide ALD foundry using Oxford Instruments tool

March 19th, 2007

Cenamps to provide ALD foundry using Oxford Instruments tool

Abstract:
The Centre of Excellence for Nano, Micro and Photonic Systems (Cenamps) in Newcastle, UK (which is funded by the One NorthEast regional development agency) has chosen a FlexAL atomic layer deposition (ALD) tool from Oxford Instruments Plasma Technology (OIPT) for its new ALD Foundry, which will begin operations in July.

Source:
semiconductor-today.com

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