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Home > News > EUV is here, says ASML exec

February 23rd, 2006

EUV is here, says ASML exec

Abstract:
Extreme ultraviolet (EUV) lithography is alive, according to Hans Meiling, ASML's product development manager for EUV systems, who said his company printed sub-40-nanometer resist images using its EUV alpha demo tool.

Source:
EETimes

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