Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International

Wikipedia Affiliate Button

Home > Press > RIT researchers improve fabrication process of nano-structures for electronic devices: Use of indium gallium phosphide with I-MacEtch processing shows promise for more cost effective fabrication and increased performance in devices from photonics to telecommunications

University Web Services

Semiconductor devices are created on wafers through a multi-step process to coat, remove or pattern conductive materials.
University Web Services Semiconductor devices are created on wafers through a multi-step process to coat, remove or pattern conductive materials.

Abstract:
Researchers at RIT have found a more efficient fabricating process to produce semiconductors used in today’s electronic devices. They also confirmed that materials other than silicon can be used successfully in the development process that could increase performance of electronic devices. This fabrication process—the I-MacEtch, or inverse metal-assisted chemical etching method—can help meet the growing demand for more powerful and reliable nano-technologies needed for solar cells, smartphones, telecommunications grids and new applications in photonics and quantum computing.

RIT researchers improve fabrication process of nano-structures for electronic devices: Use of indium gallium phosphide with I-MacEtch processing shows promise for more cost effective fabrication and increased performance in devices from photonics to telecommunications

Rochester, NY | Posted on March 20th, 2018

“What is novel about our work is that for the first time we are looking at applying I-MacEtch processing to indium-gallium-phosphide materials. I-MacEtch is an alternative to two conventional approaches and is a technique that has been used in the field—but the materials that have been explored are fairly limited,” said Parsian Mohseni, assistant professor of microsystems engineering in RIT’s Kate Gleason College of Engineering. He is also director of the EINS Laboratory at the university.

Demands for improved computer processing power have led researchers to explore both new processes and other materials beyond silicon to produce electronic components, Mohseni explained. The I-MacEtch process combines the benefits of two traditional methods—wet etching and reactive ion etching, or REI. Indium-gallium-phosphide is one of several materials being tested to complement silicon as a means to improve current capacity of semiconductor processing.

“This is a very well-known material and has applications in the electronics and solar cell industries,” he said. “We are not re-inventing the wheel; we are establishing new protocols for treating the existing material that is more cost effective, and a more sustainable process.”

Semiconductor devices are created on wafers through a multi-step process to coat, remove or pattern conductive materials. Traditional processes are wet etch, where a sample with blocked aspects is immersed in an acid bath to remove substances, and reactive ion etching, where ions bombard exposed surfaces on the wafer to change its chemical properties and remove materials in those exposed regions. Both have been used to develop the intricate electronic patterns on circuits and use silicon as a foundation for this type of patterning. Improving patterning methods by I-MacEtch could mean reducing fabrication complexity of various photonic and electronic devices.

Researchers and semiconductor fabrication scientists have been using MacEtch extensively for processing silicon. At the same time, assessments of other materials in the III-V range of individual elements that may be conducive to this same type of fabrication with similar advantages are underway. In his research, Mohseni is also looking at different alloys of those III-V materials, namely the ternary alloys such as indium-gallium-phosphide (InGaP).

The research detailed in the upcoming issue of the American Chemical Society’s Applied Materials and Interfaces journal highlights how the nanofabrication methodology was applied to InGaP and how it can impact the processing of device applications and generation of high aspect ratio and nano-scale semiconductor features, said Thomas Wilhelm, a microsystems engineering doctoral student and first-author of the paper. The novel processing method can be significant in the development of ordered arrays of high aspect ratio structures such as nanowires.

For solar cells, the goal is to minimize the cost-to-power-produced ratio, and if it is possible to lower the cost of making the cell, and increasing the efficiency of it, this improves the device overall. Exploring new methods of fabricating the existing, relevant materials in a way that allows for faster, less expensive and more controlled processing by combining the benefits of wet etching and RIE has been the focus of Mohseni’s work. The improved process means avoiding expensive, bulky, hazardous processing methods.

“We are using a simple benchtop set up and we end up with very similar structures; in fact, one can argue that they are higher in quality than the structures that we can generate with RIE for a fraction of the cost and with less time, less steps throughout, without the higher temperature conditions or expensive instrumentation,” he said.

####

About Rochester Institute of Technology
Rochester Institute of Technology is home to leading creators, entrepreneurs, innovators and researchers. Founded in 1829, RIT enrolls about 19,000 students in more than 200 career-oriented and professional programs, making it among the largest private universities in the U.S.

The university is internationally recognized and ranked for academic leadership in business, computing, engineering, imaging science, liberal arts, sustainability, and fine and applied arts. RIT also offers unparalleled support services for deaf and hard-of-hearing students. The cooperative education program is one of the oldest and largest in the nation. Global partnerships include campuses in China, Croatia, Dubai and Kosovo.

For news, photos and videos, go to www.rit.edu/news.

For more information, please click here

Contacts:
Michelle Cometa
585-475-4954

Copyright © Rochester Institute of Technology

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Tracking pollen with quantum dots: A pollination biologist from Stellenbosch University in South Africa is using quantum dots to track the fate of individual pollen grains. This is breaking new ground in a field of research that has been hampered by the lack of a universal method February 17th, 2019

Super-light, super-insulating ceramic aerogel keeps the hottest temperatures at bay February 17th, 2019

Molecular Lego blocks: Chemical data mining boosts search for new organic semiconductors February 15th, 2019

The smallest skeletons in the marine world observed in 3D by synchrotron techniques February 15th, 2019

Wireless/telecommunications/RF/Antennas/Microwaves

Disruptive by Design: Nano Now February 1st, 2019

Oxford Instruments participates in the launch of the European Quantum Technology Flagship Programme ‘QMiCS’ December 13th, 2018

Nanofabrication

Scientists program proteins to pair exactly: Technique paves the way for the creation of protein nanomachines and for the engineering of new cell functions December 21st, 2018

Nanotech Artisans Sculpt with DNA November 5th, 2018

Cerion Advanced Materials Invited by the National Nanotechnology Initiative to Discuss their Expertise in Commercialization: Webinar transcription with key takeaways available on the National Nanotechnology Initiative website November 2nd, 2018

Possible Futures

Tracking pollen with quantum dots: A pollination biologist from Stellenbosch University in South Africa is using quantum dots to track the fate of individual pollen grains. This is breaking new ground in a field of research that has been hampered by the lack of a universal method February 17th, 2019

Super-light, super-insulating ceramic aerogel keeps the hottest temperatures at bay February 17th, 2019

Molecular Lego blocks: Chemical data mining boosts search for new organic semiconductors February 15th, 2019

Researchers create ultra-lightweight ceramic material that withstands extreme temperatures: UCLA-led team develops highly durable aerogel that could ultimately be an upgrade for insulation on spacecraft February 15th, 2019

Chip Technology

NRL, AFRL develop direct-write quantum calligraphy in monolayer semiconductors February 15th, 2019

Molecular Lego blocks: Chemical data mining boosts search for new organic semiconductors February 15th, 2019

Spintronics by 'straintronics': Switching superferromagnetism with electric-field induced strain February 15th, 2019

Picosun’s ALD encapsulation prevents electronics degradation February 15th, 2019

Quantum Computing

Media invited to open meeting on the future of quantum technology held at RIT Jan. 23-25: Leaders from NASA, NSF, NIST and Sandia National Laboratory to attend January 11th, 2019

Spintronics 'miracle material' put to the test: Physicists build devices using mineral perovskite January 11th, 2019

DNA design that anyone can do: Computer program can translate a free-form 2-D drawing into a DNA structure January 4th, 2019

Quantum chemistry on quantum computers: A quantum algorithm for tracking complex chemical reactions with neither performing demanding post-Hartree-Fock calculations nor exponential time explosion January 4th, 2019

Optical computing/Photonic computing

NRL, AFRL develop direct-write quantum calligraphy in monolayer semiconductors February 15th, 2019

Sound and light trapped by disorder February 8th, 2019

CEA-Leti to Present 21 Papers at Photonics West & Unveil its Latest Research on Greater Photonics-Electronics and Software Convergence: Optics and Si-Photonics Teams Will Explain Transfer-Ready Solutions For Wavelength Imaging and Other Applications at Leti Booth, Feb. 5-7 February 1st, 2019

TOCHA will take a topological approach to the next generation of electronic, photonic and phononic devices January 31st, 2019

Nanoelectronics

Large, stable pieces of graphene produced with unique edge pattern: Breakthrough in graphene research February 1st, 2019

Kiel physicists discover new effect in the interaction of plasmas with solids January 18th, 2019

Study on low noise, high-performance transistors may bring innovations in electronics December 28th, 2018

The feature size and functional range of molecular electronic devices: Monitoring the transition from tunneling leakage current to molecular tunneling December 16th, 2018

Discoveries

Tracking pollen with quantum dots: A pollination biologist from Stellenbosch University in South Africa is using quantum dots to track the fate of individual pollen grains. This is breaking new ground in a field of research that has been hampered by the lack of a universal method February 17th, 2019

Molecular Lego blocks: Chemical data mining boosts search for new organic semiconductors February 15th, 2019

The smallest skeletons in the marine world observed in 3D by synchrotron techniques February 15th, 2019

Researchers create ultra-lightweight ceramic material that withstands extreme temperatures: UCLA-led team develops highly durable aerogel that could ultimately be an upgrade for insulation on spacecraft February 15th, 2019

Announcements

Tracking pollen with quantum dots: A pollination biologist from Stellenbosch University in South Africa is using quantum dots to track the fate of individual pollen grains. This is breaking new ground in a field of research that has been hampered by the lack of a universal method February 17th, 2019

Super-light, super-insulating ceramic aerogel keeps the hottest temperatures at bay February 17th, 2019

Researchers create ultra-lightweight ceramic material that withstands extreme temperatures: UCLA-led team develops highly durable aerogel that could ultimately be an upgrade for insulation on spacecraft February 15th, 2019

Spintronics by 'straintronics': Switching superferromagnetism with electric-field induced strain February 15th, 2019

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers

Tracking pollen with quantum dots: A pollination biologist from Stellenbosch University in South Africa is using quantum dots to track the fate of individual pollen grains. This is breaking new ground in a field of research that has been hampered by the lack of a universal method February 17th, 2019

Super-light, super-insulating ceramic aerogel keeps the hottest temperatures at bay February 17th, 2019

NRL, AFRL develop direct-write quantum calligraphy in monolayer semiconductors February 15th, 2019

Researchers create ultra-lightweight ceramic material that withstands extreme temperatures: UCLA-led team develops highly durable aerogel that could ultimately be an upgrade for insulation on spacecraft February 15th, 2019

Energy

Molecular Lego blocks: Chemical data mining boosts search for new organic semiconductors February 15th, 2019

Helping smartphones hold their charge longer February 6th, 2019

Current generation via quantum proton transfer February 1st, 2019

A powerful catalyst for electrolysis of water that could help harness renewable energy January 25th, 2019

Photonics/Optics/Lasers

NRL, AFRL develop direct-write quantum calligraphy in monolayer semiconductors February 15th, 2019

Laser-induced graphene gets tough, with help: Rice University lab combines conductive foam with other materials for capable new composites February 12th, 2019

Sound and light trapped by disorder February 8th, 2019

CEA-Leti to Present 21 Papers at Photonics West & Unveil its Latest Research on Greater Photonics-Electronics and Software Convergence: Optics and Si-Photonics Teams Will Explain Transfer-Ready Solutions For Wavelength Imaging and Other Applications at Leti Booth, Feb. 5-7 February 1st, 2019

Solar/Photovoltaic

Self-assembling nanomaterial offers pathway to more efficient, affordable harnessing of solar power: The new materials produce a singlet fission reaction that creates more and extends the life of harvestable electronic charges January 24th, 2019

Shelley Claridge, an assistant professor at Purdue University, is leading research to improve electronic and energy conversion devices. (Image by Vincent Walter) January 24th, 2019

Brilliant glow of paint-on semiconductors comes from ornate quantum physics January 18th, 2019

Power stations driven by light: More efficient solar cells imitate photosynthesis January 16th, 2019

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project