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Home > Press > UMass Amherst Purchases Nanonex Advanced 8" NIL Tool NX-2608BA

Abstract:
Nanonex Corporation, the inventor of nanoimprint lithography and the world's leading provider in nanoimprint lithography solutions with the longest history, announces the purchase of Nanonex's NX-2600BA system by UMass Amherst.

UMass Amherst Purchases Nanonex Advanced 8" NIL Tool NX-2608BA

Princeton, NJ | Posted on May 28th, 2014

The Nanonex NX-2608BA is the advanced full wafer nanoimprintor plus photolithography with front and back side alignment. It features all imprint forms: thermal, photo-curable, and embossing, with sub-5 nm imprinting resolution, up to 8 inches wafer size.

Based on the Nanonex unique patented Air Cushion PressTM technology, the NX-2608BA offers unsurpassed uniformity regardless of backside topology, wafer or mask flatness, or backside contamination. This ACP technology also eliminates lateral shifting between the mask and substrate, which significantly increases mask lifetime. The small thermal mass design allows fast thermal cycling, resulting in a fast process cycle.

The new NX-2600BA system is the second Nanonex nanoimprint equipment purchased by UMass Amherst. Both Nanonex nanoimprint systems will be located at the new UMass Life Sciences Center at UMass Amherst to support the center's multidisciplinary research, that include nanoimprint material and processing, nanoimprint mold fabrication and duplication, roll-to-roll nanoimprint, bio/chemical sensors, etc.

Nanonex is excited to supply the cutting-edge nanoimprint tool to UMass Amherst's new Life Sciences Center.

####

About Nanonex Corporation
Nanonex is the inventor of nanoimprint lithography (NIL), the world’s first nanoimprint lithography company, and the world’s leading provider of nanoimprint solutions that include equipment, masks, resists and processes. Nanonex’s patented and proprietary NIL solutions and Air Cushion Press™ can manufacture 3D nanostructures with sub-5 nm resolution, large-area uniformity, accurate overlay alignment, high throughput, and low cost. Nanonex NIL solutions have been adopted by a broad spectrum of applications, such as optical devices, data storage, displays, light emitting diodes, semiconductor ICs, bio/chemical sensors, biotech, chemical synthesis, and advanced materials. Nanonex has over 150 customers and an installed base of over 70 tools worldwide, and supplies 80% nanoimprint machines in North America.

For more information, please click here

Contacts:
Dave Wang
Phone: 7323551600
Fax: 7323551608

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