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Home > Press > Affordable High Precision XY Nanopositioning Piezo Stage

PI's P-763 XY nanopositioning stage is a new, more affordable addition to PI's wide range of piezo stage positioners. The compact P-763 flexure-guided stage has a footprint of less than 3x3 inches (70x70mm) while providing a 30x30mm aperture. With a large travel range of 200x200 microns this piezo positioning system is ideal for demanding applications such as image-stabilization, micro-lithography, nano-alignment, surface metrology, super-resolution microscopy and bio-nanotechnology and photonics and datacomm.

Affordable High Precision XY Nanopositioning Piezo Stage

Auburn, MA | Posted on April 15th, 2014

Drive Technology and Accuracy

The P-763.22C nanopositioning piezo stage is a multilayer-piezo driven stage, providing sub-nanometer resolution and rapid response for fast step and settle or high speed scanning applications. With its capacitive feedback, linearity of motion is exceptional, with only 0.02% deviation from a perfect straight line, when tested on a laser interferometer.

Controllers and Software

A variety OEM and bench top controllers are available to suit the user's budget and application and each PI piezo controller comes with a wealth of software tools and programming examples. PI's E-725 advanced digital-servo controller, for example provides up to 3 motion channels with 24 bit resolution and ultra-low noise DAC converters for excellent closed-loop performance. All motion and servo parameters can be user-optimized on the fly. A variety of digital and analog interfaces are integrated, communication interfaces via Ethernet, USB and RS-232 are available.

More information on the Nanopositioning Stage is available at


Exceptional reliability is guaranteed by PI's Mars-Rover tested ceramic-insulated piezo actuator technology which proved superior after 100 billion cycles life testing.


This high-performance XY nanopositioner is designed for cost-sensitive applications in OEM and research where very high precision, high throughput and fast step and settle in a few milliseconds are required. Equipped with capacitive, direct-metrology position sensors, the nanopositioning stage is also very well suited to static positioning applications where drift-free long term stability is essential.


About Physik Instrumente (PI)
PI is a leading manufacturer of precision motion control equipment, piezo systems, piezo motors and actuators for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with ten subsidiaries, R&D / engineering on 3 continents and total staff of 750+

For more information, please click here

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