Home > Press > First methodology to analyse nanometer line pattern images
Abstract:
To meet the increasing demand for smaller, faster, and more powerful devices, a continued decrease in the dimensions of active parts of devices is required.
Scientists from the Institut Català de Nanociència i Nanotecnologia (Catalan Institute for Nanoscience and Nanotechnology - ICN2) announced pioneering software for line pattern image analysis at the SPIE Advanced Lithography (San Jose, CA; 23 - 27 February 2014). The presented methodology is a unique tool developed to address the gap existent in dimensional metrology of sub-10 nm line patterns. This is a methodology to quantify the critical dimensions and defect density of line arrays in regimes where optical inspection cannot reach. The software has been developed by the ICN2 Phononic and Photonic Nanostructures Group, led by ICREA Professor C. M. Sotomayor Torres, in collaboration with University College Cork (Ireland), led by Professor A. Amann.
Directed self-assembly (DSA) of block copolymers (BCPs), a method already compatible with existing electronic technologies, has gained the attention of the lithography community as a most promising avenue to advance miniaturisation. First-generation DSA is on the verge of entering high-volume manufacturing by successfully increasing sub-20 nm contact hole resolution in a cost-effective manner. DSA for reproducible sub-10 nm pitch sizes is a hot research topic in Asia, Europe, and the Americas.
One of the main challenges for R&D, material suppliers, or manufacturers is specialised metrology for DSA-based lithography. It is here where the method invented by ICN2/UCC is expected to bring decisive advantages in the characterization of nanometer line patterns, one of the key elements in circuit manufacturing. The presented methodology is state-of-the-art, user-friendly, and customizable software successfully addressing this issue, complimentary to conventional optical inspection tools.
This R&D project is in validation stage and is available for development in joint ventures with partners interested in materials, metrology, manufacturing, and applications involving DSA.
Download the software's informative brochure: www.icn.cat/pdf/brochures/bcp-software.pdf
####
About ICN2
ICN2 is a highly specialized and renowned research center. Its research lines focus on the newly discovered physical and chemical properties that arise from the fascinating behavior of matter at the nanoscale. The patrons of ICN2 are the Government of Catalonia (Generalitat), the CSIC, and the Autonomous University of Barcelona (UAB).
The Institute promotes collaboration among scientists from diverse backgrounds (physics, chemistry, biology, engineering) to develop basic and applied research, always seeking interactions with local and global industry. ICN2 also trains researchers in nanotechnology, develops intense activity to facilitate the uptake of nanotechnology in industry, and promotes networking among scientists, engineers, technicians, business people, society, and policy makers.
For more information, please click here
Contacts:
Claudia Delgado Simão, Ph.D.
Post-doctoral Researcher
Phononic and Photonic Nanostructures (P2N) Group
Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Edifici Nanotecnologia ICN2, Campus de la UAB 08193 Bellaterra (Barcelona) SPAIN
Tel.: +34 93 737 16 16
http://www.icn.cat/~p2n/
Copyright © ICN2
If you have a comment, please Contact us.Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Related News Press |
News and information
Simulating magnetization in a Heisenberg quantum spin chain April 5th, 2024
NRL charters Navy’s quantum inertial navigation path to reduce drift April 5th, 2024
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Imaging
Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024
The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023
Observation of left and right at nanoscale with optical force October 6th, 2023
Software
Visualizing nanoscale structures in real time: Open-source software enables researchers to see materials in 3D while they're still on the electron microscope August 19th, 2022
Luisier wins SNSF Advanced Grant to develop simulation tools for nanoscale devices July 8th, 2022
Oxford Instruments’ Atomfab® system is production-qualified at a market-leading GaN power electronics device manufacturer December 17th, 2021
Chip Technology
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024
HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024
Announcements
NRL charters Navy’s quantum inertial navigation path to reduce drift April 5th, 2024
Discovery points path to flash-like memory for storing qubits: Rice find could hasten development of nonvolatile quantum memory April 5th, 2024
Tools
Ferroelectrically modulate the Fermi level of graphene oxide to enhance SERS response November 3rd, 2023
The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023
Events/Classes
Researchers demonstrate co-propagation of quantum and classical signals: Study shows that quantum encryption can be implemented in existing fiber networks January 20th, 2023
The latest news from around the world, FREE | ||
Premium Products | ||
Only the news you want to read!
Learn More |
||
Full-service, expert consulting
Learn More |
||