Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > First methodology to analyse nanometer line pattern images

Abstract:
To meet the increasing demand for smaller, faster, and more powerful devices, a continued decrease in the dimensions of active parts of devices is required.

First methodology to analyse nanometer line pattern images

Barcelona, Spain | Posted on March 18th, 2014

Scientists from the Institut Català de Nanociència i Nanotecnologia (Catalan Institute for Nanoscience and Nanotechnology - ICN2) announced pioneering software for line pattern image analysis at the SPIE Advanced Lithography (San Jose, CA; 23 - 27 February 2014). The presented methodology is a unique tool developed to address the gap existent in dimensional metrology of sub-10 nm line patterns. This is a methodology to quantify the critical dimensions and defect density of line arrays in regimes where optical inspection cannot reach. The software has been developed by the ICN2 Phononic and Photonic Nanostructures Group, led by ICREA Professor C. M. Sotomayor Torres, in collaboration with University College Cork (Ireland), led by Professor A. Amann.

Directed self-assembly (DSA) of block copolymers (BCPs), a method already compatible with existing electronic technologies, has gained the attention of the lithography community as a most promising avenue to advance miniaturisation. First-generation DSA is on the verge of entering high-volume manufacturing by successfully increasing sub-20 nm contact hole resolution in a cost-effective manner. DSA for reproducible sub-10 nm pitch sizes is a hot research topic in Asia, Europe, and the Americas.

One of the main challenges for R&D, material suppliers, or manufacturers is specialised metrology for DSA-based lithography. It is here where the method invented by ICN2/UCC is expected to bring decisive advantages in the characterization of nanometer line patterns, one of the key elements in circuit manufacturing. The presented methodology is state-of-the-art, user-friendly, and customizable software successfully addressing this issue, complimentary to conventional optical inspection tools.

This R&D project is in validation stage and is available for development in joint ventures with partners interested in materials, metrology, manufacturing, and applications involving DSA.

Download the software's informative brochure: www.icn.cat/pdf/brochures/bcp-software.pdf

####

About ICN2
ICN2 is a highly specialized and renowned research center. Its research lines focus on the newly discovered physical and chemical properties that arise from the fascinating behavior of matter at the nanoscale. The patrons of ICN2 are the Government of Catalonia (Generalitat), the CSIC, and the Autonomous University of Barcelona (UAB).

The Institute promotes collaboration among scientists from diverse backgrounds (physics, chemistry, biology, engineering) to develop basic and applied research, always seeking interactions with local and global industry. ICN2 also trains researchers in nanotechnology, develops intense activity to facilitate the uptake of nanotechnology in industry, and promotes networking among scientists, engineers, technicians, business people, society, and policy makers.

For more information, please click here

Contacts:
Claudia Delgado Simão, Ph.D.
Post-doctoral Researcher
Phononic and Photonic Nanostructures (P2N) Group
Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Edifici Nanotecnologia ICN2, Campus de la UAB 08193 Bellaterra (Barcelona) SPAIN
Tel.: +34 93 737 16 16

http://www.icn.cat/~p2n/

Copyright © ICN2

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Measuring the Smallest Magnets July 28th, 2014

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Imaging

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Bruker Awarded Fourth PeakForce Tapping Patent: AFM Mode Uniquely Combines Highest Resolution Imaging and Material Property Mapping July 22nd, 2014

Software

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

Physicists Use Computer Models to Reveal Quantum Effects in Biological Oxygen Transport: The team solved a long-standing question by explaining why oxygen – and not deadly carbon monoxide – preferably binds to the proteins that transport it around the body. July 17th, 2014

New computer program aims to teach itself everything about anything June 12th, 2014

Chip Technology

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Announcements

Measuring the Smallest Magnets July 28th, 2014

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Production of Toxic Gas Sensor Based on Nanorods July 28th, 2014

Tools

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Bruker Announces Acquisition of High-Speed, 3D Super-Resolution Fluorescence Microscopy Company Vutara July 28th, 2014

Malvern Instruments completes acquisition of MicroCal and announces purchase of Archimedes product from Affinity Biosensors July 25th, 2014

Events/Classes

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

NNCO Announces an Interactive Webinar: Progress Review on the Coordinated Implementation of the National Nanotechnology Initiative 2011 Environmental, Health, and Safety Research Strategy July 23rd, 2014

Harris & Harris Group to Host Conference Call on Second-Quarter 2014 Financial Results on August 15, 2014 July 23rd, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE