Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > First methodology to analyse nanometer line pattern images

Abstract:
To meet the increasing demand for smaller, faster, and more powerful devices, a continued decrease in the dimensions of active parts of devices is required.

First methodology to analyse nanometer line pattern images

Barcelona, Spain | Posted on March 18th, 2014

Scientists from the Institut Català de Nanociència i Nanotecnologia (Catalan Institute for Nanoscience and Nanotechnology - ICN2) announced pioneering software for line pattern image analysis at the SPIE Advanced Lithography (San Jose, CA; 23 - 27 February 2014). The presented methodology is a unique tool developed to address the gap existent in dimensional metrology of sub-10 nm line patterns. This is a methodology to quantify the critical dimensions and defect density of line arrays in regimes where optical inspection cannot reach. The software has been developed by the ICN2 Phononic and Photonic Nanostructures Group, led by ICREA Professor C. M. Sotomayor Torres, in collaboration with University College Cork (Ireland), led by Professor A. Amann.

Directed self-assembly (DSA) of block copolymers (BCPs), a method already compatible with existing electronic technologies, has gained the attention of the lithography community as a most promising avenue to advance miniaturisation. First-generation DSA is on the verge of entering high-volume manufacturing by successfully increasing sub-20 nm contact hole resolution in a cost-effective manner. DSA for reproducible sub-10 nm pitch sizes is a hot research topic in Asia, Europe, and the Americas.

One of the main challenges for R&D, material suppliers, or manufacturers is specialised metrology for DSA-based lithography. It is here where the method invented by ICN2/UCC is expected to bring decisive advantages in the characterization of nanometer line patterns, one of the key elements in circuit manufacturing. The presented methodology is state-of-the-art, user-friendly, and customizable software successfully addressing this issue, complimentary to conventional optical inspection tools.

This R&D project is in validation stage and is available for development in joint ventures with partners interested in materials, metrology, manufacturing, and applications involving DSA.

Download the software's informative brochure: www.icn.cat/pdf/brochures/bcp-software.pdf

####

About ICN2
ICN2 is a highly specialized and renowned research center. Its research lines focus on the newly discovered physical and chemical properties that arise from the fascinating behavior of matter at the nanoscale. The patrons of ICN2 are the Government of Catalonia (Generalitat), the CSIC, and the Autonomous University of Barcelona (UAB).

The Institute promotes collaboration among scientists from diverse backgrounds (physics, chemistry, biology, engineering) to develop basic and applied research, always seeking interactions with local and global industry. ICN2 also trains researchers in nanotechnology, develops intense activity to facilitate the uptake of nanotechnology in industry, and promotes networking among scientists, engineers, technicians, business people, society, and policy makers.

For more information, please click here

Contacts:
Claudia Delgado Simão, Ph.D.
Post-doctoral Researcher
Phononic and Photonic Nanostructures (P2N) Group
Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Edifici Nanotecnologia ICN2, Campus de la UAB 08193 Bellaterra (Barcelona) SPAIN
Tel.: +34 93 737 16 16

http://www.icn.cat/~p2n/

Copyright © ICN2

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Instant-start computers possible with new breakthrough December 19th, 2014

Aculon Hires New Business Development Director December 19th, 2014

Iranian Scientists Use Nanotechnology to Increase Power, Energy of Supercapacitors December 18th, 2014

Imaging

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

ORNL microscopy pencils patterns in polymers at the nanoscale December 17th, 2014

Unraveling the light of fireflies December 17th, 2014

DELMIC reports on applications of their SPARC technology at the Chalmers University of Technology in Gothenburg, Sweden December 16th, 2014

Software

Spectral Surface Mapping with Microscopic Resolution: CRAIC Technologies introduces Spectral Surface Mapping™ (S2M™) software November 18th, 2014

FEI Releases New Electronics Failure Analysis Applications for Helios NanoLab DualBeam Portfolio: Dx gas chemistry enables rapid delayering of ICs, while AutoLX advanced automation simplifies sample preparation for transmission electron microscopy November 3rd, 2014

QuantumWise guides the semiconductor industry towards the atomic scale October 24th, 2014

Strengthening thin-film bonds with ultrafast data collection October 23rd, 2014

Chip Technology

Instant-start computers possible with new breakthrough December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

Pb islands in a sea of graphene magnetise the material of the future December 16th, 2014

Stanford team combines logic, memory to build a 'high-rise' chip: Today circuit cards are laid out like single-story towns; Futuristic architecture builds layers of logic and memory into skyscraper chips that would be smaller, faster, cheaper -- and taller December 15th, 2014

Announcements

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Instant-start computers possible with new breakthrough December 19th, 2014

Aculon Hires New Business Development Director December 19th, 2014

Iranian Scientists Use Nanotechnology to Increase Power, Energy of Supercapacitors December 18th, 2014

Tools

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

ORNL microscopy pencils patterns in polymers at the nanoscale December 17th, 2014

Unraveling the light of fireflies December 17th, 2014

Events/Classes

Bruker Introduces BioScope Resolve High-Resolution BioAFM System: Featuring PeakForce Tapping for Quantitative Bio-Mechanical Property Mapping December 16th, 2014

TCL Launches World’s Most Advanced TV in the World’s Largest Market: New Quantum Dot TVs with Color IQ™ Optics Deliver OLED-Quality Color at a Fraction of the Price December 15th, 2014

Stanford team combines logic, memory to build a 'high-rise' chip: Today circuit cards are laid out like single-story towns; Futuristic architecture builds layers of logic and memory into skyscraper chips that would be smaller, faster, cheaper -- and taller December 15th, 2014

PETA science consortium to present at Society for Risk Analysis meeting December 10th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE