Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Meaglow Plasma Source Provides Major Breakthrough for Advanced Semiconductor Production Technique

Abstract:
Meaglow Ltd. (Privately Held) announces a breakthrough in semiconductor production. As computer chips become smaller and smaller, advanced production techniques, such as Atomic Layer Deposition (ALD) have become more important for depositing thin layers of material. Unfortunately the ALD of some materials has been prone to contamination from the plasma sources used. Meaglow Ltd has developed a hollow cathode plasma source which has reduced oxygen contamination by orders of magnitude, allowing the reproducible deposition of semiconductor materials with improved quality.

Meaglow Plasma Source Provides Major Breakthrough for Advanced Semiconductor Production Technique

Thunder Bay, Canada | Posted on March 13th, 2014

The breakthrough has been shown in a recent publication of oxygen reduction figures for the hollow cathode plasma source supplied last year to the group of Professor Necmi Biyikli, of the Institute of Materials Science and Nanotechnology, at Bilkent University in Turkey. The plasma source was used to upgrade their existing Atomic Layer Deposition (ALD) system by replacing an inductively coupled plasma source. The publication in the Journal of Materials Chemistry C (J. Mater. Chem. C 2 (2014) 2123) shows a reduction in oxygen content of orders of magnitude compared to previous results. There is also a marked improvement in material quality. These results render the older inductively coupled plasma sources obsolete for many applications.

Meaglow is seeking other customers interested in improving the material quality of their ALD and other plasma grown nitride layers. The hollow cathode plasma technology also has the advantage of scalability to large deposition areas. The Plasma source can be used to retrofit existing systems or can be integrated with equipment manufacturers. It can also be utilized in a number of different applications including MBE, and LPMOCVD among others. Interested parties should email .

####

About Meaglow Ltd.
Meaglow Ltd. produces a new range of epitaxy equipment (migration enhanced afterglow), MBE & MOCVD accessories, including custom built hollow cathode plasma sources.

For more information, please click here

Contacts:
Meaglow Ltd.
1 807 252 4391

Box 398, 2400 Nipigon Rd
Thunder Bay, P7C 4W1, ON, Canada

Copyright © Marketwire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Surfing a wake of light: Researchers observe and control light wakes for the first time July 6th, 2015

Tel Aviv/Tsinghua University project uses crowd computing to improve water filtration: The research, a product of the new TAU-Tsinghua XIN Center, was conducted by 150,000 volunteers at IBM's World Community Grid July 6th, 2015

Transition from 3 to 2 dimensions increases conduction, MIPT scientists discover July 6th, 2015

A Stretchy Mesh Heater for Sore Muscles July 6th, 2015

Chip Technology

Fundamental observation of spin-controlled electrical conduction in metals: Ultrafast terahertz spectroscopy yields direct insight into the building block of modern magnetic memories July 6th, 2015

Transition from 3 to 2 dimensions increases conduction, MIPT scientists discover July 6th, 2015

Nanometrics to Announce Second Quarter Financial Results on July 23, 2015 July 2nd, 2015

The quantum middle man July 2nd, 2015

Announcements

Surfing a wake of light: Researchers observe and control light wakes for the first time July 6th, 2015

Tel Aviv/Tsinghua University project uses crowd computing to improve water filtration: The research, a product of the new TAU-Tsinghua XIN Center, was conducted by 150,000 volunteers at IBM's World Community Grid July 6th, 2015

Transition from 3 to 2 dimensions increases conduction, MIPT scientists discover July 6th, 2015

A Stretchy Mesh Heater for Sore Muscles July 6th, 2015

Tools

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Nanometrics to Announce Second Quarter Financial Results on July 23, 2015 July 2nd, 2015

Ultra-stable JILA microscopy technique tracks tiny objects for hours July 1st, 2015

Industrial

Production of Zirconium Carbide Nanoparticles at Low Temperature without Thermal Operations July 5th, 2015

Iranian Scientists Find Simple, Economic Method to Synthesize Antibacterial Nanoparticles July 2nd, 2015

Green Chemistry Methods Used in Iran to Produce Zinc Oxide Nanoparticles June 27th, 2015

Stanford researchers stretch a thin crystal to get better solar cells June 25th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project