Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > PTB measurements for the next computer chip generation: Cooperation between Carl Zeiss and PTB on EUV lithography extended

Beamlines and instrumentation at the Metrology Light Source (MLS). (EUV beamline: #3; set-up for the calibration of radiation sources: #2b; undulator beamline: #1d; infrared beamline: #6)(Image: PTB)
Beamlines and instrumentation at the Metrology Light Source (MLS). (EUV beamline: #3; set-up for the calibration of radiation sources: #2b; undulator beamline: #1d; infrared beamline: #6)

(Image: PTB)

Abstract:
European companies are the world leaders in the development of EUV lithography for the manufacture of semiconductor chips with even shorter wavelengths than up to now, i.e. with 13.5 nanometres in the spectral range of the so-called "Extreme UV (EUV)". The volume production of lens systems and wafer scanners of EU lithography (EUVL) is planned for 2014. In this development, the Physikalisch-Technische Bundesanstalt (PTB) is at the fore. With a new EUV beamline at PTB's own electron storage ring - the Metrology Light Source (MLS) in Berlin-Adlershof - it will characterize EUVL lens systems for this purpose. The cooperation with Carl Zeiss SMT GmbH, which has been running since 1998, has now been extended for another four years. PTB measurements will help to give proof of the quality of the Zeiss lens systems in the so-called "steppers" (lithography machines) of the Dutch company ASML, the global market leader in this field.

PTB measurements for the next computer chip generation: Cooperation between Carl Zeiss and PTB on EUV lithography extended

Braunschweig , Germany | Posted on December 2nd, 2012

The combination is unique worldwide: although there are a number of electron storage rings, and although a national metrology institute exists in almost every country as the highest authority in the field of measurements, only the Physikalisch-Technische Bundesanstalt has its own modern electron storage ring - the Metrology Light Source - and the measurement arrangements required for the high-precision characterization of EUVL lens systems. The MLS has been operated since 2008; it furnishes synchrotron radiation from the terahertz range up to the EUV range and has clearly extended PTB's measurement capabilities at the nearby electron storage ring BESSY II, where it uses X-rays on a large scale for the various metrological tasks.

The new EUV beamline is particularly suited for the investigation of photodetectors and structured optical elements and has - after the commissioning phase - been increasingly used since the beginning of this year for measurements within the scope of research cooperations, in particular for EUVL. "Our greatest strength - which is very well received by the cooperation partners - consists in the so-called "At-wavelength measurements". We characterize the lens systems at the EUVL working wavelength - and not only with visible light. Our measurements therefore directly describe the behaviour of lens systems in the production machines", explains Frank Scholze, head of the PTB working group.

The great demand from industry had induced PTB to develop its measurement capabilities at the two storage rings even further. In mid-2013, the large EUV reflectometer of BESSY II is to move to the MLS. In its place, an EUV scatterometer/ellipsometer will be installed which has been particularly suited for scatter experiments. Then, at the latest, a total of approximately 6000 hours of synchrotron radiation measuring time per year will be available to PTB for EUV metrology.

Also in other areas, PTB has clearly extended the field of "metrology with synchrotron radiation" by the commissioning of new beamlines at the MLS. Compared to its predecessor at BESSY II, a new measuring set-up for the calibration of radiation sources now also allows measurements to be carried out at wavelengths below 40 nm. Calibrated radiation sources in the vacuum-UV (VUV) and the EUV are, for example, of great importance for the characterization of space telescopes for solar and atmospheric research. In addition, the new undulator beamline provides monochromatized intensive and profoundly polarized radiation from the IR range up to the EUV range. At present, the first quantitative investigations of surfaces are being carried out by means of UV/VUV ellipsometry and electron spectroscopy together with partners from the research site Adlershof. Furthermore, a new near-field microscope has been put into operation at the infrared beamline of the MLS.

####

About Physikalisch-Technische Bundesanstalt (PTB)
PTB is the German national metrology institute providing scientific and technical services. PTB measures with the highest accuracy and reliability Ė metrology as the core competence

For more information, please click here

Contacts:
Dr. Frank Scholze
PTB Working Group 7.12
EUV Radiometry
Phone: +49(30) 3481-7120

Copyright © AlphaGalileo

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Building a smart cardiac patch: 'Bionic' cardiac patch could one day monitor and respond to cardiac problems June 28th, 2016

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

Yale researchersí technology turns wasted heat into power June 27th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Superheroes are real: Ultrasensitive nonlinear metamaterials for data transfer June 25th, 2016

Imaging

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Ultrathin, flat lens resolves chirality and color: Multifunctional lens could replace bulky, expensive machines June 25th, 2016

Laboratories

Titan shines light on high-temperature superconductor pathway: Simulation demonstrates how superconductivity arises in cuprates' pseudogap phase June 22nd, 2016

Discovery of gold nanocluster 'double' hints at other shape-changing particles: New analysis approach brings two unique atomic structures into focus June 19th, 2016

Efficient hydrogen production made easy: Sticking electrons to a semiconductor with hydrazine creates an electrocatalyst June 17th, 2016

Discovery of gold nanocluster 'double' hints at other shape changing particles: New analysis approach brings two unique atomic structures into focus June 15th, 2016

Chip Technology

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

GraphExeter illuminates bright new future for flexible lighting devices June 23rd, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Particle zoo in a quantum computer: First experimental quantum simulation of particle physics phenomena June 23rd, 2016

Announcements

Building a smart cardiac patch: 'Bionic' cardiac patch could one day monitor and respond to cardiac problems June 28th, 2016

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

Yale researchersí technology turns wasted heat into power June 27th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Tools

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Ultrathin, flat lens resolves chirality and color: Multifunctional lens could replace bulky, expensive machines June 25th, 2016

Researchers discover new chemical sensing technique: Technique allows sharper detail -- and more information -- with near infrared light June 24th, 2016

Alliances/Trade associations/Partnerships/Distributorships

FEI and University of Liverpool Announce QEMSCAN Research Initiative: University of Liverpool will utilize FEIís QEMSCAN technology to gain a better insight into oil and gas reserves & potentially change the approach to evaluating them June 22nd, 2016

French Research Team Helps Extend MRI Detection of Diseases & Lower Health-Care Costs: CEA, INSERM and G2ELab Brings Grenoble Regionís Expertise In Advanced Medicine & Magnetism Applications to H2020 IDentIFY Project June 21st, 2016

Research showing why hierarchy exists will aid the development of artificial intelligence June 13th, 2016

UK NANOSAFETY GROUP publishes 2nd Edition of guidance to support safe working with nanomaterials May 30th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic