Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > PTB measurements for the next computer chip generation: Cooperation between Carl Zeiss and PTB on EUV lithography extended

Beamlines and instrumentation at the Metrology Light Source (MLS). (EUV beamline: #3; set-up for the calibration of radiation sources: #2b; undulator beamline: #1d; infrared beamline: #6)(Image: PTB)
Beamlines and instrumentation at the Metrology Light Source (MLS). (EUV beamline: #3; set-up for the calibration of radiation sources: #2b; undulator beamline: #1d; infrared beamline: #6)

(Image: PTB)

Abstract:
European companies are the world leaders in the development of EUV lithography for the manufacture of semiconductor chips with even shorter wavelengths than up to now, i.e. with 13.5 nanometres in the spectral range of the so-called "Extreme UV (EUV)". The volume production of lens systems and wafer scanners of EU lithography (EUVL) is planned for 2014. In this development, the Physikalisch-Technische Bundesanstalt (PTB) is at the fore. With a new EUV beamline at PTB's own electron storage ring - the Metrology Light Source (MLS) in Berlin-Adlershof - it will characterize EUVL lens systems for this purpose. The cooperation with Carl Zeiss SMT GmbH, which has been running since 1998, has now been extended for another four years. PTB measurements will help to give proof of the quality of the Zeiss lens systems in the so-called "steppers" (lithography machines) of the Dutch company ASML, the global market leader in this field.

PTB measurements for the next computer chip generation: Cooperation between Carl Zeiss and PTB on EUV lithography extended

Braunschweig , Germany | Posted on December 2nd, 2012

The combination is unique worldwide: although there are a number of electron storage rings, and although a national metrology institute exists in almost every country as the highest authority in the field of measurements, only the Physikalisch-Technische Bundesanstalt has its own modern electron storage ring - the Metrology Light Source - and the measurement arrangements required for the high-precision characterization of EUVL lens systems. The MLS has been operated since 2008; it furnishes synchrotron radiation from the terahertz range up to the EUV range and has clearly extended PTB's measurement capabilities at the nearby electron storage ring BESSY II, where it uses X-rays on a large scale for the various metrological tasks.

The new EUV beamline is particularly suited for the investigation of photodetectors and structured optical elements and has - after the commissioning phase - been increasingly used since the beginning of this year for measurements within the scope of research cooperations, in particular for EUVL. "Our greatest strength - which is very well received by the cooperation partners - consists in the so-called "At-wavelength measurements". We characterize the lens systems at the EUVL working wavelength - and not only with visible light. Our measurements therefore directly describe the behaviour of lens systems in the production machines", explains Frank Scholze, head of the PTB working group.

The great demand from industry had induced PTB to develop its measurement capabilities at the two storage rings even further. In mid-2013, the large EUV reflectometer of BESSY II is to move to the MLS. In its place, an EUV scatterometer/ellipsometer will be installed which has been particularly suited for scatter experiments. Then, at the latest, a total of approximately 6000 hours of synchrotron radiation measuring time per year will be available to PTB for EUV metrology.

Also in other areas, PTB has clearly extended the field of "metrology with synchrotron radiation" by the commissioning of new beamlines at the MLS. Compared to its predecessor at BESSY II, a new measuring set-up for the calibration of radiation sources now also allows measurements to be carried out at wavelengths below 40 nm. Calibrated radiation sources in the vacuum-UV (VUV) and the EUV are, for example, of great importance for the characterization of space telescopes for solar and atmospheric research. In addition, the new undulator beamline provides monochromatized intensive and profoundly polarized radiation from the IR range up to the EUV range. At present, the first quantitative investigations of surfaces are being carried out by means of UV/VUV ellipsometry and electron spectroscopy together with partners from the research site Adlershof. Furthermore, a new near-field microscope has been put into operation at the infrared beamline of the MLS.

####

About Physikalisch-Technische Bundesanstalt (PTB)
PTB is the German national metrology institute providing scientific and technical services. PTB measures with the highest accuracy and reliability metrology as the core competence

For more information, please click here

Contacts:
Dr. Frank Scholze
PTB Working Group 7.12
EUV Radiometry
Phone: +49(30) 3481-7120

Copyright © AlphaGalileo

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Study reveals how herpes virus tricks the immune system February 5th, 2016

Hepatitis virus-like particles as potential cancer treatment February 5th, 2016

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Researchers discover new phase of boron nitride and a new way to create pure c-BN February 5th, 2016

Laboratories

Scientists guide gold nanoparticles to form 'diamond' superlattices: DNA scaffolds cage and coax nanoparticles into position to form crystalline arrangements that mimic the atomic structure of diamond February 4th, 2016

Polar vortices observed in ferroelectric: New state of matter holds promise for ultracompact data storage and processing February 4th, 2016

Putting silicon 'sawdust' in a graphene cage boosts battery performance: Approach could remove major obstacles to increasing the capacity of lithium-ion batteries January 30th, 2016

Breakthrough enables ultra-fast transport of electrical charges in polymers January 30th, 2016

Simplifying solar cells with a new mix of materials: Berkeley Lab-led research team creates a high-efficiency device in 7 steps January 29th, 2016

Imaging

Cornell researchers create first self-assembled superconductor February 1st, 2016

Chip Technology

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Scientists guide gold nanoparticles to form 'diamond' superlattices: DNA scaffolds cage and coax nanoparticles into position to form crystalline arrangements that mimic the atomic structure of diamond February 4th, 2016

Polar vortices observed in ferroelectric: New state of matter holds promise for ultracompact data storage and processing February 4th, 2016

Electrons and liquid helium advance understanding of zero-resistance: Study of electrons on liquid helium systems sheds light on zero-resistance phenomenon in semiconductors February 2nd, 2016

Announcements

Study reveals how herpes virus tricks the immune system February 5th, 2016

Hepatitis virus-like particles as potential cancer treatment February 5th, 2016

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Researchers discover new phase of boron nitride and a new way to create pure c-BN February 5th, 2016

Tools

Researchers discover new phase of boron nitride and a new way to create pure c-BN February 5th, 2016

Cornell researchers create first self-assembled superconductor February 1st, 2016

New record in nanoelectronics at ultralow temperatures January 28th, 2016

LC.300 Series Nanopositioning Controller from nPoint January 28th, 2016

Alliances/Trade associations/Partnerships/Distributorships

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

Imec and Cloudtag Collaborate on High Quality Frictionless Wearables for Lifestyle Coaching: Next-generation health and fitness tracker Cloudtag TrackTM launched at CES 2016 January 7th, 2016

Technical partnership at the top Oxford Instruments and Zurich Instruments announce a technical collaboration for low temperature physics January 7th, 2016

Production of Graphene Oxide Nanosheets to Economize Fuel Cells January 1st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic