Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > PTB measurements for the next computer chip generation: Cooperation between Carl Zeiss and PTB on EUV lithography extended

Beamlines and instrumentation at the Metrology Light Source (MLS). (EUV beamline: #3; set-up for the calibration of radiation sources: #2b; undulator beamline: #1d; infrared beamline: #6)(Image: PTB)
Beamlines and instrumentation at the Metrology Light Source (MLS). (EUV beamline: #3; set-up for the calibration of radiation sources: #2b; undulator beamline: #1d; infrared beamline: #6)

(Image: PTB)

Abstract:
European companies are the world leaders in the development of EUV lithography for the manufacture of semiconductor chips with even shorter wavelengths than up to now, i.e. with 13.5 nanometres in the spectral range of the so-called "Extreme UV (EUV)". The volume production of lens systems and wafer scanners of EU lithography (EUVL) is planned for 2014. In this development, the Physikalisch-Technische Bundesanstalt (PTB) is at the fore. With a new EUV beamline at PTB's own electron storage ring - the Metrology Light Source (MLS) in Berlin-Adlershof - it will characterize EUVL lens systems for this purpose. The cooperation with Carl Zeiss SMT GmbH, which has been running since 1998, has now been extended for another four years. PTB measurements will help to give proof of the quality of the Zeiss lens systems in the so-called "steppers" (lithography machines) of the Dutch company ASML, the global market leader in this field.

PTB measurements for the next computer chip generation: Cooperation between Carl Zeiss and PTB on EUV lithography extended

Braunschweig , Germany | Posted on December 2nd, 2012

The combination is unique worldwide: although there are a number of electron storage rings, and although a national metrology institute exists in almost every country as the highest authority in the field of measurements, only the Physikalisch-Technische Bundesanstalt has its own modern electron storage ring - the Metrology Light Source - and the measurement arrangements required for the high-precision characterization of EUVL lens systems. The MLS has been operated since 2008; it furnishes synchrotron radiation from the terahertz range up to the EUV range and has clearly extended PTB's measurement capabilities at the nearby electron storage ring BESSY II, where it uses X-rays on a large scale for the various metrological tasks.

The new EUV beamline is particularly suited for the investigation of photodetectors and structured optical elements and has - after the commissioning phase - been increasingly used since the beginning of this year for measurements within the scope of research cooperations, in particular for EUVL. "Our greatest strength - which is very well received by the cooperation partners - consists in the so-called "At-wavelength measurements". We characterize the lens systems at the EUVL working wavelength - and not only with visible light. Our measurements therefore directly describe the behaviour of lens systems in the production machines", explains Frank Scholze, head of the PTB working group.

The great demand from industry had induced PTB to develop its measurement capabilities at the two storage rings even further. In mid-2013, the large EUV reflectometer of BESSY II is to move to the MLS. In its place, an EUV scatterometer/ellipsometer will be installed which has been particularly suited for scatter experiments. Then, at the latest, a total of approximately 6000 hours of synchrotron radiation measuring time per year will be available to PTB for EUV metrology.

Also in other areas, PTB has clearly extended the field of "metrology with synchrotron radiation" by the commissioning of new beamlines at the MLS. Compared to its predecessor at BESSY II, a new measuring set-up for the calibration of radiation sources now also allows measurements to be carried out at wavelengths below 40 nm. Calibrated radiation sources in the vacuum-UV (VUV) and the EUV are, for example, of great importance for the characterization of space telescopes for solar and atmospheric research. In addition, the new undulator beamline provides monochromatized intensive and profoundly polarized radiation from the IR range up to the EUV range. At present, the first quantitative investigations of surfaces are being carried out by means of UV/VUV ellipsometry and electron spectroscopy together with partners from the research site Adlershof. Furthermore, a new near-field microscope has been put into operation at the infrared beamline of the MLS.

####

About Physikalisch-Technische Bundesanstalt (PTB)
PTB is the German national metrology institute providing scientific and technical services. PTB measures with the highest accuracy and reliability – metrology as the core competence

For more information, please click here

Contacts:
Dr. Frank Scholze
PTB Working Group 7.12
EUV Radiometry
Phone: +49(30) 3481-7120

Copyright © AlphaGalileo

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanotech could rid cattle of ticks, with less collateral damage September 1st, 2015

Scientists 'squeeze' light one particle at a time: A team of scientists have measured a bizarre effect in quantum physics, in which individual particles of light are said to have been 'squeezed' -- an achievement which at least one textbook had written off as hopeless September 1st, 2015

Using ultrathin sheets to discover new class of wrapped shapes: UMass Amherst materials researchers describe a new regime of wrapped shapes August 31st, 2015

New material science research may advance tech tools August 31st, 2015

Efficiency of Nanodrug Containing Antibiotics in Treatment of Infectious Diseases Evaluated August 31st, 2015

Laboratories

An engineered surface unsticks sticky water droplets August 31st, 2015

New material science research may advance tech tools August 31st, 2015

Imaging

Nanolab Technologies LEAPS Forward with High-Performance Analysis Services to the World: Nanolab Orders Advanced Local Electrode Atom Probe (LEAP®) Microscope from CAMECA Unit of AMETEK Materials Analysis Division August 27th, 2015

50 Years of Scanning Electron Microscopy from ZEISS: ZEISS celebrates the birth of the first commercial scanning electron microscope in 1965 August 26th, 2015

Announcing Oxford Instruments and School of Physics signing a Memorandum of Understanding August 26th, 2015

Kwansei Gakuin University in Hyogo, Japan, uses Raman microscopy to study crystallographic defects in silicon carbide wafers August 25th, 2015

Chip Technology

Nanometrics to Participate in the Citi 2015 Global Technology Conference August 26th, 2015

Kwansei Gakuin University in Hyogo, Japan, uses Raman microscopy to study crystallographic defects in silicon carbide wafers August 25th, 2015

A little light interaction leaves quantum physicists beaming August 25th, 2015

'Magic' sphere for information transfer: Professor at the Lomonosov Moscow State University made the «magic» sphere for information transfer August 24th, 2015

Announcements

Nanotech could rid cattle of ticks, with less collateral damage September 1st, 2015

Scientists 'squeeze' light one particle at a time: A team of scientists have measured a bizarre effect in quantum physics, in which individual particles of light are said to have been 'squeezed' -- an achievement which at least one textbook had written off as hopeless September 1st, 2015

An engineered surface unsticks sticky water droplets August 31st, 2015

New material science research may advance tech tools August 31st, 2015

Tools

Nanolab Technologies LEAPS Forward with High-Performance Analysis Services to the World: Nanolab Orders Advanced Local Electrode Atom Probe (LEAP®) Microscope from CAMECA Unit of AMETEK Materials Analysis Division August 27th, 2015

Nanometrics to Participate in the Citi 2015 Global Technology Conference August 26th, 2015

50 Years of Scanning Electron Microscopy from ZEISS: ZEISS celebrates the birth of the first commercial scanning electron microscope in 1965 August 26th, 2015

Announcing Oxford Instruments and School of Physics signing a Memorandum of Understanding August 26th, 2015

Alliances/Trade associations/Partnerships/Distributorships

National Space Society Welcomes Janet Ivey As New NSS Governor: Janet Ivey of Janet's Planet is NOW IN ORBIT as a member of the Board of Governors of the National Space Society August 27th, 2015

National Space Society Welcomes Geoff Notkin As New NSS Governor August 26th, 2015

XEI Scientific appoints EM Resolutions as Distributor for the UK & Irish markets August 11th, 2015

Omni Nano and Time Warner Cable Partner to Provide Nanotechnology Education to the Boys & Girls Clubs of Los Angeles: A $10,000 Donation to Benefit Youth of Los Angeles County's Boys & Girls Clubs August 4th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic