Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Imec produces high-quality EUV sensors for ASMLís next-generation lithography tools

Wafer with EUV sensor dies, produced on imecís 200mm CMORE line
Wafer with EUV sensor dies, produced on imecís 200mm CMORE line

Abstract:
Imec announces that it has successfully qualified a chipset consisting of custom high-quality EUV sensor dies. These are now being integrated in ASML's NXE:3100 EUV lithography tools in the field, improving the tools' overlay and critical dimension (CD) tool performance. With this milestone achievement, imec confirms that its CMORE business line is ready to provide its partners with custom specialty chip solutions.

Imec produces high-quality EUV sensors for ASMLís next-generation lithography tools

Leuven, Belgium | Posted on October 11th, 2011

The sensors were processed according to ASML's custom designs and specifications, with focus on superior lifetime and sensitivity to direct and high EUV irradiation doses. Two of the sensors are designed to calibrate, align, and focus tool's lens systems. They have been integrated in functional sensor modules, and are being integrated in the NXE:3100 machines in the field. A third sensor is designed to monitor the NXE:3300's EUV dose. The next milestone in progress is to build and qualify the different sensors for the NXE:3300 by the end of 2011.

Via its CMORE initiative, imec offers companies all the services needed to turn innovative ideas into smart packaged microsystem products. The CMORE toolbox contains a wide variety of device technologies on 200mm (e.g. CMOS, Si-photonics, MEMS, image sensors, packaging ...) as well as design, testing and reliability. Next to these EUV sensors, imec CMORE is developing several other customer chip solutions. They include technology from all imec's strategic areas such as bio-sensing, energy- and power management, and high-end specialty imaging, photolithography among others.

Imec's services range from feasibility studies over design and technology development to prototyping and low-volume manufacturing. And through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of about 1,900 people includes more than 500 industrial residents and guest researchers. In 2010, imec's revenue (P&L) was 285 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nutĒ), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

For more information, please click here

Contacts:
Hanne Degans
External Communications Officer
T: +32 16 28 17 69
M: +32 486 065 175


Barbara Kalkis
Maestro Marketing & PR
T : +1 408 996 9975

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

The power of perovskite: OIST researchers improve perovskite-based technology in the entire energy cycle, from solar cells harnessing power to LED diodes to light the screens of future electronic devices and other lighting applications August 18th, 2017

Gold nanostars and immunotherapy vaccinate mice against cancer: New treatment cures, vaccinates mouse in small proof-of-concept study August 18th, 2017

Researchers printed graphene-like materials with inkjet August 17th, 2017

Chip Technology

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

Freeze-dried foam soaks up carbon dioxide: Rice University scientists lead effort to make novel 3-D material August 16th, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Surprise discovery in the search for energy efficient information storage August 10th, 2017

Sensors

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

Researchers printed graphene-like materials with inkjet August 17th, 2017

Sensing technology takes a quantum leap with RIT photonics research: Office of Naval Research funds levitated optomechanics project August 10th, 2017

Giant enhancement of electromagnetic waves revealed within small dielectric particles: Scientists have done for the first time direct measurements of giant electromagnetic fields July 8th, 2017

Announcements

Silk could improve sensitivity, flexibility of wearable body sensors August 20th, 2017

The power of perovskite: OIST researchers improve perovskite-based technology in the entire energy cycle, from solar cells harnessing power to LED diodes to light the screens of future electronic devices and other lighting applications August 18th, 2017

Gold nanostars and immunotherapy vaccinate mice against cancer: New treatment cures, vaccinates mouse in small proof-of-concept study August 18th, 2017

Researchers printed graphene-like materials with inkjet August 17th, 2017

Tools

Scientists from the University of Manchester and Diamond Light Source work with Deben to develop and test a new compression stage to study irradiated graphite at elevated temperatures August 15th, 2017

FRITSCH ē Milling and Sizing! Innovations at POWTECH 2017 - Hall 2 ē Stand 227 August 9th, 2017

Thermo Fisher Scientific Advances Cryo-EM Leadership to Drive Structural Biology Discoveries: New Thermo Scientific Krios G3i raises bar for performance, automation and time-to-results Breakthrough Thermo Scientific Glacios provides a cryo-EM entry path for a broader range of res August 8th, 2017

New Quattro Field Emission ESEM Emphasizes Versatility and Ease of Use: Thermo Scientific Quattro ESEM allows materials science researchers to study nanoscale structure in almost any material under a range of environmental conditions August 8th, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Researchers printed graphene-like materials with inkjet August 17th, 2017

Simultaneous Design and Nanomanufacturing Speeds Up Fabrication: Method enhances broadband light absorption in solar cells August 5th, 2017

Meniscus-assisted technique produces high efficiency perovskite PV films July 7th, 2017

Carbodeon demonstrates NanoDiamond nickel coatings with enhanced tribological properties June 7th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project