Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International

Wikipedia Affiliate Button

Home > Press > Imec produces high-quality EUV sensors for ASMLís next-generation lithography tools

Wafer with EUV sensor dies, produced on imecís 200mm CMORE line
Wafer with EUV sensor dies, produced on imecís 200mm CMORE line

Abstract:
Imec announces that it has successfully qualified a chipset consisting of custom high-quality EUV sensor dies. These are now being integrated in ASML's NXE:3100 EUV lithography tools in the field, improving the tools' overlay and critical dimension (CD) tool performance. With this milestone achievement, imec confirms that its CMORE business line is ready to provide its partners with custom specialty chip solutions.

Imec produces high-quality EUV sensors for ASMLís next-generation lithography tools

Leuven, Belgium | Posted on October 11th, 2011

The sensors were processed according to ASML's custom designs and specifications, with focus on superior lifetime and sensitivity to direct and high EUV irradiation doses. Two of the sensors are designed to calibrate, align, and focus tool's lens systems. They have been integrated in functional sensor modules, and are being integrated in the NXE:3100 machines in the field. A third sensor is designed to monitor the NXE:3300's EUV dose. The next milestone in progress is to build and qualify the different sensors for the NXE:3300 by the end of 2011.

Via its CMORE initiative, imec offers companies all the services needed to turn innovative ideas into smart packaged microsystem products. The CMORE toolbox contains a wide variety of device technologies on 200mm (e.g. CMOS, Si-photonics, MEMS, image sensors, packaging ...) as well as design, testing and reliability. Next to these EUV sensors, imec CMORE is developing several other customer chip solutions. They include technology from all imec's strategic areas such as bio-sensing, energy- and power management, and high-end specialty imaging, photolithography among others.

Imec's services range from feasibility studies over design and technology development to prototyping and low-volume manufacturing. And through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of about 1,900 people includes more than 500 industrial residents and guest researchers. In 2010, imec's revenue (P&L) was 285 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nutĒ), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

For more information, please click here

Contacts:
Hanne Degans
External Communications Officer
T: +32 16 28 17 69
M: +32 486 065 175


Barbara Kalkis
Maestro Marketing & PR
T : +1 408 996 9975

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Perfect diamagnetism observation of high-temperature superconductivity in compressed H2S June 14th, 2019

Mysterious Majorana quasiparticle is now closer to being controlled for quantum computing: Princeton researchers detect a robust Majorana quasiparticle and show how it can be turned on and off June 14th, 2019

University of Konstanz researchers create uniform-shape polymer nanocrystals: Researchers from the University of Konstanz's CRC 1214 'Anisotropic Particles as Building Blocks: Tailoring Shape, Interactions and Structures' generate uniform-shape nanocrystals using direct polymeriz June 14th, 2019

Small currents for big gains in spintronics: A new low-power magnetic switching component could aid spintronic devices June 14th, 2019

Chip Technology

Mysterious Majorana quasiparticle is now closer to being controlled for quantum computing: Princeton researchers detect a robust Majorana quasiparticle and show how it can be turned on and off June 14th, 2019

Small currents for big gains in spintronics: A new low-power magnetic switching component could aid spintronic devices June 14th, 2019

UCI scientists create new class of two-dimensional materials: Fabrication could help unlock new quantum computing and energy technologies June 6th, 2019

Analog Bits and GLOBALFOUNDRIES Deliver Differentiated Analog and Mixed Signal IP for High-Performance Mobile and Compute Applications: Analog Bitsí Analog and Mixed Signal IPs Including Various PLLs, PCIe Reference Clock, Sensors and Power Circuits with GLOBALFOUNDRIES 12nm Fin June 5th, 2019

Sensors

New Video Highlights Specific Topics Sought in Call for Papers for the 2019 IEEE International Electron Devices Meeting (IEDM) June 13th, 2019

Kanazawa University research: Opposite piezoresistant effects of rhenium disulfide in two principle directions June 13th, 2019

Shaking hands with human or robot? Nanotubes make them alike as never before June 6th, 2019

Good vibrations: Using piezoelectricity to ensure hydrogen sensor sensitivity May 24th, 2019

Announcements

Perfect diamagnetism observation of high-temperature superconductivity in compressed H2S June 14th, 2019

Mysterious Majorana quasiparticle is now closer to being controlled for quantum computing: Princeton researchers detect a robust Majorana quasiparticle and show how it can be turned on and off June 14th, 2019

University of Konstanz researchers create uniform-shape polymer nanocrystals: Researchers from the University of Konstanz's CRC 1214 'Anisotropic Particles as Building Blocks: Tailoring Shape, Interactions and Structures' generate uniform-shape nanocrystals using direct polymeriz June 14th, 2019

Small currents for big gains in spintronics: A new low-power magnetic switching component could aid spintronic devices June 14th, 2019

Tools

University of Aberdeen use the Deben CT5000 to observe compressive damage mechanisms in syntactic foam June 14th, 2019

2D crystals conforming to 3D curves create strain for engineering quantum devices June 7th, 2019

nPoint piezo driven nanopositioning flexure stages now available from Elliot Scientific June 4th, 2019

New Argonne coating could have big implications for lithium batteries May 14th, 2019

Printing/Lithography/Inkjet/Inks/Bio-printing/Dyes

No ink needed for these graphene artworks: Artist employs Rice University lab's laser-induced graphene as medium for ultramodern art May 3rd, 2019

Researchers grow cells in 'paper organs' May 1st, 2019

Tuneable reverse photochromes in the solid state April 3rd, 2019

New composite advances lignin as a renewable 3D printing material December 28th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project