Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Ultra-low-power readout architecture for MEMS/NEMS sensors

Figure MEMSreadout: Microphotographs of the accelerometer, strain sensor and readout ASIC and topology of a single channel capacitive readout.
Figure MEMSreadout: Microphotographs of the accelerometer, strain sensor and readout ASIC and topology of a single channel capacitive readout.

Abstract:
Imec and Holst Centre report an ultralow-power readout ASIC for capacitive MEMS/NEMS-based sensors. The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the SNR (signal-to-noise) ratio. We achieved a figure-of-merit of 4.41×10-20 F√(W/Hz) for a sensor range of ±2.0g and ±20,000με over a 100Hz bandwidth. The system has also been designed to cancel residual motion artifacts.

Ultra-low-power readout architecture for MEMS/NEMS sensors

Leuven, Belgium | Posted on August 22nd, 2011

With the growing number of MEMS sensors for all types of applications, there is a need for innovative, flexible and power-efficient readout architectures. These have to be able to read signals from a wide range of capacitive devices (such as accelerometers and strain sensors with different actuation voltages, sensitivities and resolutions). One particular interesting application field is the monitoring of building integrity, where the sensors have to measure displacements and stresses, as an indication for the integrity of structures during e.g. seismic events. Such applications impose resolution requirements of 1mg and 10με for the accelerometer and strain sensor respectively, and a range of ±2.0g and ±20,000με over a 100Hz bandwidth.

Most of the existing readout chips are custom-made for a particular sensor, which usually has a large sensitivity in a narrow band. Our architecture can interface with a variety of sensors without jeopardizing the power consumption. This is important for monitoring building integrity, which requires battery-operated systems to keep working for several years. It's also a cost-effective solution, since the same readout can be used for both accelerometers and strain sensors. Last, the system's flexibility is a major asset: sensors with different sensitivities, offsets and mismatch can easily be handled by modifying the timing and duty cycle of the excitation pulses.

Our readout architecture has the lowest reported equivalent acceleration noise level and the highest bandwidth. It offers a unique tradeoff between SNR, bandwidth, and power. The design was fabricated on TSMC 0.25μm CMOS with metal-insulator-metal capacitors. The total power consumption of the 3 channels is 15μW. The clock and excitation voltages for the sensors are external.

####

About IMEC
Imec performs world-leading research in nano-electronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society.

Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, USA, China and Japan. Its staff of about 1,900 people includes more than 500 industrial residents and guest researchers. In 2010, imec's revenue (P&L) was 285 million euro.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.).

For more information, please click here

Contacts:
Hanne Degans
External Communications Officer
T: +32 16 281 769
Mobile: +32 486 065 175

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Dartmouth team creates new method to control quantum systems May 24th, 2016

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

Attosecond physics: A switch for light-wave electronics May 24th, 2016

Supercrystals with new architecture can enhance drug synthesis May 24th, 2016

NEMS

Nano-photonics meets nano-mechanics: Controlling on-chip nano-optics by graphene nano-opto-mechanics January 22nd, 2016

Mechanical quanta see the light January 20th, 2016

Nanodevices at one-hundredth the cost: New techniques for building microelectromechanical systems show promise December 20th, 2015

Nano-mechanical study offers new assessment of silicon for next-gen batteries September 25th, 2015

MEMS

New research unveils graphene 'moth eyes' to power future smart technologies: New ultra-thin, patterned graphene sheets will be essential in designing future technologies such as 'smart wallpaper' and Internet-of-things applications March 1st, 2016

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

MEMS & Sensors Industry Group Previews “Internet of MEMS & Sensors” at CES 2016 -- Global industry association invites CE OEMS/integrators to conference track on January 7 January 6th, 2016

SITRI and Accelink Announce Cooperative Agreement on Opto-Electronic Communication December 31st, 2015

Sensors

Dartmouth team creates new method to control quantum systems May 24th, 2016

Electronic device detects molecules linked to cancer, Alzheimer's and Parkinson's: An inexpensive portable biosensor has been developed by researchers at Brazil's National Nanotechnology Laboratory with FAPESP's support May 20th, 2016

Making organs transparent to improve nanomedicine (video) May 13th, 2016

Scientists take a major leap toward a 'perfect' quantum metamaterial: Berkeley Lab, UC Berkeley researchers lead study that uses trapped atoms in an artificial crystal of light May 13th, 2016

Discoveries

Dartmouth team creates new method to control quantum systems May 24th, 2016

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

Attosecond physics: A switch for light-wave electronics May 24th, 2016

Supercrystals with new architecture can enhance drug synthesis May 24th, 2016

Announcements

Dartmouth team creates new method to control quantum systems May 24th, 2016

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

Attosecond physics: A switch for light-wave electronics May 24th, 2016

Supercrystals with new architecture can enhance drug synthesis May 24th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic