Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > CEA-Leti Announces Major Improvement in 200mm RF MEMS Switch Manufacturing Process

Abstract:
CEA-Leti announced today that its RF MEMS switch technology has reached a new level of maturity, allowing it to provide customers with a significantly improved manufacturing process.

CEA-Leti Announces Major Improvement in 200mm RF MEMS Switch Manufacturing Process

San Francisco, CA | Posted on July 13th, 2011

A major advance has been achieved in the reliability of the devices' electrostatic actuators. CEA-Leti's new switch design uses a dielectric-less solution in which an air gap prevents contact between the electrodes when the bridge is down, thanks to small dielectric dots placed under the mobile electrode. As a result, long-term tests show a drastic improvement in reliability and no pull-down voltage drift has been observed during the tests.

Contact reliability has been improved by replacing the gold-based contacts that exhibited poor reliability and high sensitivity to stiction with better-performing ruthenium-based contacts. A hermetic thin-film packaging process also has been developed to prevent organic contamination and to maintain low contact resistance.

The new switch-manufacturing process has been demonstrated on 200mm silicon wafers at the MINATEC dedicated MEMS fabrication platform. Yields close to industrial standards have been achieved, providing thousands of working devices per wafer.

CEA-Leti's RF MEMS switches - which offer excellent RF performance, low power consumption, small size and light weight - offer numerous opportunities to increase the functionality and reconfigurability of microwave telecommunication systems. Leti's industrial partners are currently evaluating samples of these switches for use in efficient reflect-array antennas and redundancy switching matrices.

####

About CEA-Leti
Leti is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defence and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics. NEMS and MEMS are at the core of its activities. An anchor of the MINATEC campus, CEA-Leti operates 8,000-m˛ of state-of-the-art clean room space on 200mm and 300mm wafer platforms. It employs 1,400 scientists and engineers and hosts more than 190 Ph.D. students and 200 assignees from partner companies. CEA-Leti owns more than 1,700 patent families.

For more information, please click here

Contacts:
CEA-Leti
Thierry Bosc
+33 4 38 78 31 95


Agency
Amélie Ravier
+33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Graphene key to growing 2-dimensional semiconductor with extraordinary properties August 30th, 2016

University of Akron researchers find thin layers of water can become ice-like at room temperature: Results could lead to an assortment of anti-friction solutions August 30th, 2016

Nanocatalysis for organic chemistry: This research article by Dr. Qien Xu et al. is published in Current Organic Chemistry, Volume 20, Issue 19, 2016 August 30th, 2016

Continuous roll-process technology for transferring and packaging flexible LSI August 29th, 2016

MEMS

STMicroelectronics Earns MEMS Manufacturer of the Year Award August 1st, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

New research unveils graphene 'moth eyes' to power future smart technologies: New ultra-thin, patterned graphene sheets will be essential in designing future technologies such as 'smart wallpaper' and Internet-of-things applications March 1st, 2016

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

Chip Technology

Graphene key to growing 2-dimensional semiconductor with extraordinary properties August 30th, 2016

Continuous roll-process technology for transferring and packaging flexible LSI August 29th, 2016

A nanoscale wireless communication system via plasmonic antennas: Greater control affords 'in-plane' transmission of waves at or near visible light August 27th, 2016

A promising route to the scalable production of highly crystalline graphene films August 26th, 2016

Announcements

Graphene key to growing 2-dimensional semiconductor with extraordinary properties August 30th, 2016

University of Akron researchers find thin layers of water can become ice-like at room temperature: Results could lead to an assortment of anti-friction solutions August 30th, 2016

Nanocatalysis for organic chemistry: This research article by Dr. Qien Xu et al. is published in Current Organic Chemistry, Volume 20, Issue 19, 2016 August 30th, 2016

Meteorite impact on a nano scale August 29th, 2016

Patents/IP/Tech Transfer/Licensing

Industrial Nanotech, Inc. Provides Shareholder Update August 22nd, 2016

Starpharma initiates new DEP™ drug delivery program with AstraZeneca July 27th, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

Research team led by NUS scientists develop plastic flexible magnetic memory device: Novel technique to implant high-performance magnetic memory chip on a flexible plastic surface without compromising performance July 21st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic