Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) systems, has launched production of novel, innovative plasma enhanced ALD (PEALD) systems based on highly advanced, customer-proven "ion-free" remote plasma source. Various excited species such as oxygen, nitrogen and hydrogen radicals with zero charge can be generated to broaden the range of ALD process chemistries - especially metal and metal nitride thin films can be deposited at low temperatures with activated species - and the remote source enables processing of even fragile substrates and delicate device structures without plasma damage due to very low ion count but still high reactive species flux.

Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Espoo, Finland | Posted on April 10th, 2011

The novel Picoplasma™ source system (*) can be mounted on existing SUNALE™ ALD reactors or the whole PEALD system can be installed as one compact, small footprint deposition unit of easy implementation, quick maintenance and low cost of ownership. The system can also be fully automated by integrating it into the Picoplatform™ cluster tool with cassette-to-cassette loading via a vacuum load lock. Fast matching and stable power delivery of the plasma unit enable high yields with fast process speed and excellent film uniformity (thickness STD 1.3 % with Al2O3 on silicon, deposited from TMA and oxygen radicals) and conformality in deep trenches up to AR of 48:1. In short, the novel Picosplasma™ tool increases the already top level versatility, customizability and upscalability of Picosun's existing ALD systems.

ALD was invented by Picosun Board Member Dr. Tuomo Suntola in Finland in the early seventies. Picosun Oy is a Finnish, globally operating manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of ALD reactor design. Picosun's SUNALE™ ALD process tools are used by high profile industries and top research organizations across four continents and the company has redistributors in ca. 30 countries. Picosun Oy is based in Espoo, its manufacturing facilities are located in Kirkkonummi and U.S. headquarters in Detroit, Michigan. Picosun Oy is a part of Stephen Industries Inc Oy.

(*) Multiple patents pending

####

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Leading European communications companies and research organizations have launched an EU project developing the future 5th Generation cellular mobile networks August 28th, 2014

Ultra-Low Frequency Vibration Isolation Stabilizes Scanning Tunneling Microscopy at UCLA’s Nano-Research Group August 28th, 2014

Novel 'butterfly' molecule could build new sensors, photoenergy conversion devices August 28th, 2014

New technique uses fraction of measurements to efficiently find quantum wave functions August 28th, 2014

Thin films

Picosun joins forces with IMEC for novel, industrial ALD applications August 25th, 2014

An Inkjet-Printed Field-Effect Transistor for Label-Free Biosensing August 11th, 2014

Advanced thin-film technique could deliver long-lasting medication: Nanoscale, biodegradable drug-delivery method could provide a year or more of steady doses August 6th, 2014

New Material Allows for Ultra-Thin Solar Cells August 4th, 2014

Chip Technology

Scientists craft atomically seamless, thinnest-possible semiconductor junctions August 26th, 2014

RMIT delivers $30m boost to micro and nano-tech August 26th, 2014

Competition for Graphene: Berkeley Lab Researchers Demonstrate Ultrafast Charge Transfer in New Family of 2D Semiconductors August 26th, 2014

Symphony of nanoplasmonic and optical resonators leads to magnificent laser-like light emission August 26th, 2014

Announcements

Leading European communications companies and research organizations have launched an EU project developing the future 5th Generation cellular mobile networks August 28th, 2014

Ultra-Low Frequency Vibration Isolation Stabilizes Scanning Tunneling Microscopy at UCLA’s Nano-Research Group August 28th, 2014

Novel 'butterfly' molecule could build new sensors, photoenergy conversion devices August 28th, 2014

New technique uses fraction of measurements to efficiently find quantum wave functions August 28th, 2014

Tools

Ultra-Low Frequency Vibration Isolation Stabilizes Scanning Tunneling Microscopy at UCLA’s Nano-Research Group August 28th, 2014

Measure Both Elastic and Viscous Properties with AFM Using Asylum Research’s Exclusive AM-FM Viscoelastic Mapping Mode August 28th, 2014

Malvern specialists to deliver inaugural short course on polymer characterization at Interplas 2014 August 27th, 2014

Scientists craft atomically seamless, thinnest-possible semiconductor junctions August 26th, 2014

Patents/IP/Tech Transfer/Licensing

AQUANOVA receives Technology Leadership Award 2014 FROST & SULLIVAN honors NovaSOL® Technology again August 12th, 2014

Blacktrace Holdings Ltd. to in-license PerkinElmer Technology August 8th, 2014

Silicene Labs Announces the Launch of Patent-Pending, 2D Materials Composite Index™ : The Initial 2D Materials Composite Index™ for Q2 2014 Is: 857.3; Founders Include World-Renowned Physicist and Seasoned Business and IP Professionals July 24th, 2014

UCF Nanotech Spinout Developing Revolutionary Battery Technology: Power the Next Generation of Electronics with Carbon July 23rd, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE