Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) systems, has launched production of novel, innovative plasma enhanced ALD (PEALD) systems based on highly advanced, customer-proven "ion-free" remote plasma source. Various excited species such as oxygen, nitrogen and hydrogen radicals with zero charge can be generated to broaden the range of ALD process chemistries - especially metal and metal nitride thin films can be deposited at low temperatures with activated species - and the remote source enables processing of even fragile substrates and delicate device structures without plasma damage due to very low ion count but still high reactive species flux.

Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Espoo, Finland | Posted on April 10th, 2011

The novel Picoplasma™ source system (*) can be mounted on existing SUNALE™ ALD reactors or the whole PEALD system can be installed as one compact, small footprint deposition unit of easy implementation, quick maintenance and low cost of ownership. The system can also be fully automated by integrating it into the Picoplatform™ cluster tool with cassette-to-cassette loading via a vacuum load lock. Fast matching and stable power delivery of the plasma unit enable high yields with fast process speed and excellent film uniformity (thickness STD 1.3 % with Al2O3 on silicon, deposited from TMA and oxygen radicals) and conformality in deep trenches up to AR of 48:1. In short, the novel Picosplasma™ tool increases the already top level versatility, customizability and upscalability of Picosun's existing ALD systems.

ALD was invented by Picosun Board Member Dr. Tuomo Suntola in Finland in the early seventies. Picosun Oy is a Finnish, globally operating manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of ALD reactor design. Picosun's SUNALE™ ALD process tools are used by high profile industries and top research organizations across four continents and the company has redistributors in ca. 30 countries. Picosun Oy is based in Espoo, its manufacturing facilities are located in Kirkkonummi and U.S. headquarters in Detroit, Michigan. Picosun Oy is a part of Stephen Industries Inc Oy.

(*) Multiple patents pending

####

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

New Absorber Will Lead to Better Biosensor: Biosensors are more sensitive and able to detect smaller changes in the environment October 1st, 2014

Graphene chips are close to significant commercialization October 1st, 2014

Production of Filters for Separation of Water from Petroleum Products in Iran October 1st, 2014

Yale University and Leica Microsystems Partner to Establish Microscopy Center of Excellence: Yale Welcomes Scientists to Participate in Core Facility Opening and Super- Resolution Workshops October 20 Through 31, 2014 September 30th, 2014

Thin films

Southampton scientists grow a new challenger to graphene September 23rd, 2014

Beneq launches nFOG™ wet coating technology September 3rd, 2014

Picosun joins forces with IMEC for novel, industrial ALD applications August 25th, 2014

An Inkjet-Printed Field-Effect Transistor for Label-Free Biosensing August 11th, 2014

Chip Technology

Graphene chips are close to significant commercialization October 1st, 2014

Speed at its limits September 30th, 2014

Research mimics brain cells to boost memory power September 30th, 2014

'Pixel' engineered electronics have growth potential: Rice, Oak Ridge, Vanderbilt, Penn scientists lead creation of atom-scale semiconducting composites September 29th, 2014

Announcements

New Absorber Will Lead to Better Biosensor: Biosensors are more sensitive and able to detect smaller changes in the environment October 1st, 2014

Graphene chips are close to significant commercialization October 1st, 2014

Production of Filters for Separation of Water from Petroleum Products in Iran October 1st, 2014

Chemical interactions between silver nanoparticles and thiols: A comparison of mercaptohexanol again September 30th, 2014

Tools

Yale University and Leica Microsystems Partner to Establish Microscopy Center of Excellence: Yale Welcomes Scientists to Participate in Core Facility Opening and Super- Resolution Workshops October 20 Through 31, 2014 September 30th, 2014

Park Systems Announces Outsourced Analytical Services Including AFM Surface Imaging, Data Analysis and Interpretation September 30th, 2014

Iranian Scientists Determine Grain Size, Minimize Time of Nanocomposite Synthesis September 29th, 2014

Oxford Instruments launches 3rd annual Indian nanotechnology seminars in Kolkata and Delhi - sharing expertise with Nanotechnology researchers in India September 25th, 2014

Patents/IP/Tech Transfer/Licensing

‘Small’ transformation yields big changes September 16th, 2014

Berkeley Lab Licenses Boron Nitride Nanotube Technology: New material has unique mechanical and electronic properties September 13th, 2014

Secure Computing for the ‘Everyman': Quantum computing goes to market in tech transfer agreement with Allied Minds September 2nd, 2014

New analytical technology reveals 'nanomechanical' surface traits August 29th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE