Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) systems, has launched production of novel, innovative plasma enhanced ALD (PEALD) systems based on highly advanced, customer-proven "ion-free" remote plasma source. Various excited species such as oxygen, nitrogen and hydrogen radicals with zero charge can be generated to broaden the range of ALD process chemistries - especially metal and metal nitride thin films can be deposited at low temperatures with activated species - and the remote source enables processing of even fragile substrates and delicate device structures without plasma damage due to very low ion count but still high reactive species flux.

Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Espoo, Finland | Posted on April 10th, 2011

The novel Picoplasma™ source system (*) can be mounted on existing SUNALE™ ALD reactors or the whole PEALD system can be installed as one compact, small footprint deposition unit of easy implementation, quick maintenance and low cost of ownership. The system can also be fully automated by integrating it into the Picoplatform™ cluster tool with cassette-to-cassette loading via a vacuum load lock. Fast matching and stable power delivery of the plasma unit enable high yields with fast process speed and excellent film uniformity (thickness STD 1.3 % with Al2O3 on silicon, deposited from TMA and oxygen radicals) and conformality in deep trenches up to AR of 48:1. In short, the novel Picosplasma™ tool increases the already top level versatility, customizability and upscalability of Picosun's existing ALD systems.

ALD was invented by Picosun Board Member Dr. Tuomo Suntola in Finland in the early seventies. Picosun Oy is a Finnish, globally operating manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of ALD reactor design. Picosun's SUNALE™ ALD process tools are used by high profile industries and top research organizations across four continents and the company has redistributors in ca. 30 countries. Picosun Oy is based in Espoo, its manufacturing facilities are located in Kirkkonummi and U.S. headquarters in Detroit, Michigan. Picosun Oy is a part of Stephen Industries Inc Oy.

(*) Multiple patents pending

####

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Thin films

Laser sintering optimized for printed electronics: New study sheds (laser) light on the best means of laying down thin-film circuitry September 13th, 2018

Carbon in color: First-ever colored thin films of nanotubes created: A method developed at Aalto University, Finland, can produce large quantities of pristine single-walled carbon nanotubes in select shades of the rainbow; the secret is a fine-tuned fabrication process -- and a s August 29th, 2018

Stress-free ALD from Picosun August 28th, 2018

CTI Materials drives nano commercialization with it's patented surfactant free nanoparticle dispersions August 15th, 2018

Chip Technology

Researchers managed to prevent the disappearing of quantum information September 14th, 2018

New devices based on rust could reduce excess heat in computers: Physicists explore long-distance information transmission in antiferromagnetic iron oxide September 14th, 2018

New photonic chip promises more robust quantum computers September 14th, 2018

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Announcements

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Tools

Carbon nanodots do an ultrafine job with in vitro lung tissue: New experiments highlight the role of charge and size when it comes to carbon nanodots that mimic the effect of nanoscale pollution particles on the human lung. September 12th, 2018

Terahertz spectroscopy enters the single-molecule regime September 7th, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

Patents/IP/Tech Transfer/Licensing

Silvaco, Purdue team up to bring scalable atomistic TCAD solutions for next generation semiconductor devices and materials August 24th, 2018

CTI Materials drives nano commercialization with it's patented surfactant free nanoparticle dispersions August 15th, 2018

Sirrus's Issued Patent Portfolio Continues To Accelerate July 18th, 2018

Changing the grocery game: Manufacturing process provides low-cost, sustainable option for food packaging June 26th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project