Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Abstract:
Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) systems, has launched production of novel, innovative plasma enhanced ALD (PEALD) systems based on highly advanced, customer-proven "ion-free" remote plasma source. Various excited species such as oxygen, nitrogen and hydrogen radicals with zero charge can be generated to broaden the range of ALD process chemistries - especially metal and metal nitride thin films can be deposited at low temperatures with activated species - and the remote source enables processing of even fragile substrates and delicate device structures without plasma damage due to very low ion count but still high reactive species flux.

Picosun's plasma enhanced ALD (PEALD) systems sold on three continents

Espoo, Finland | Posted on April 10th, 2011

The novel Picoplasma™ source system (*) can be mounted on existing SUNALE™ ALD reactors or the whole PEALD system can be installed as one compact, small footprint deposition unit of easy implementation, quick maintenance and low cost of ownership. The system can also be fully automated by integrating it into the Picoplatform™ cluster tool with cassette-to-cassette loading via a vacuum load lock. Fast matching and stable power delivery of the plasma unit enable high yields with fast process speed and excellent film uniformity (thickness STD 1.3 % with Al2O3 on silicon, deposited from TMA and oxygen radicals) and conformality in deep trenches up to AR of 48:1. In short, the novel Picosplasma™ tool increases the already top level versatility, customizability and upscalability of Picosun's existing ALD systems.

ALD was invented by Picosun Board Member Dr. Tuomo Suntola in Finland in the early seventies. Picosun Oy is a Finnish, globally operating manufacturer of state-of-the-art ALD systems for micro- and nanotechnology applications, representing continuity to over three decades of ALD reactor design. Picosun's SUNALE™ ALD process tools are used by high profile industries and top research organizations across four continents and the company has redistributors in ca. 30 countries. Picosun Oy is based in Espoo, its manufacturing facilities are located in Kirkkonummi and U.S. headquarters in Detroit, Michigan. Picosun Oy is a part of Stephen Industries Inc Oy.

(*) Multiple patents pending

####

For more information, please click here

Contacts:
Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012
E-mail:

Copyright © Picosun Oy

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Instant-start computers possible with new breakthrough December 19th, 2014

Aculon Hires New Business Development Director December 19th, 2014

Thin films

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

New way to move atomically thin semiconductors for use in flexible devices November 13th, 2014

Graphene Frontiers Partners with Madico to Accelerate Material Production: Deal to ignite and fulfill demand for industrial scale graphene film that supports energy, consumer electronics, membranes/filtration, solar and other applications November 12th, 2014

New materials for more powerful solar cells: Major breakthrough in solar energy November 11th, 2014

Chip Technology

Instant-start computers possible with new breakthrough December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

Pb islands in a sea of graphene magnetise the material of the future December 16th, 2014

Stanford team combines logic, memory to build a 'high-rise' chip: Today circuit cards are laid out like single-story towns; Futuristic architecture builds layers of logic and memory into skyscraper chips that would be smaller, faster, cheaper -- and taller December 15th, 2014

Announcements

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Instant-start computers possible with new breakthrough December 19th, 2014

Aculon Hires New Business Development Director December 19th, 2014

Tools

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

ORNL microscopy pencils patterns in polymers at the nanoscale December 17th, 2014

Patents/IP/Tech Transfer/Licensing

Silicon Valley-Based Foresight Valuation Launches STR-IP™, a New Initiative for Startups to Discover the Value of Their Intellectual Property December 18th, 2014

Chemists Fabricate Novel Rewritable Paper: An attractive alternate to regular paper, UC Riverside-developed technology helps address increasing problems in environment and resource sustainability December 2nd, 2014

Dicerna Announces License Agreement with Tekmira to Advance Dicerna’s PH1 Development Program November 17th, 2014

First genetic-based tool to detect circulating cancer cells in blood: NanoFlares light up individual cells if breast cancer biomarker is present November 17th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE