Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > National Science Center of Greece selects nano-research technology from Vistec

Abstract:
Vistec Lithography Inc., a leading supplier of electron-beam lithography systems, received a major order from Greece. The National Center for Scientific Research (NCSR Demokritos) has bought an EBPG5000plusES system for one of its associated Institutes. Installed at the Institute of Microelectronics (IMEL), the system will be the first 100kV lithography system in Greece and assure multidisciplinary cutting-edge nano-research.

National Science Center of Greece selects nano-research technology from Vistec

Greece | Posted on March 3rd, 2011

IMEL is one of Europe's leading Research Institutes in the field of Silicon technologies that performs multidisciplinary research. Professor Dimitris Tsoukalas, Director of IMEL, explains: "Due to the different fields of research carried out at the IMEL we had very special demands for the new patterning system. It not only had to be capable of a multi user environment but also had to provide high class and efficient nano-lithography in all areas of our activities spanning from nanoelectronic devices to sensors and MEMS/NEMS. The EBPG5000plusES is the perfect match to these requirements and it will allow IMEL to further improve its position at the nanotechnology forefront."



The Vistec EBPG5000plusES is a high-performance lithography tool based on reliable and well-proven system architecture. Due to its electron-optical column the system can expose various substrate types. The system provides a spot size down to <2.2nm, which allows the routinely generation of nano-dimensional features below 8nm. The system incorporates an interactive graphical user interface (GUI) that provides ease of use for diverse ?multi user environments."


Due to its expertise and infrastructure IMEL is the key institution for top-down nano-research in Greece. Rainer Schmid, General Manager at Vistec Lithography comments the order: "We are honoured to have received an order from an institute with such a reputation. The EBPG5000plusES will be the first 100kV system in Greece. That will not only enable the institute to maintain its leading role in national nano-research but also to participate in European research projects, networks of excellence, and technology platforms at the highest level."

####

About Vistec
The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems and provides leading edge technology solutions for a wide range of applications.

The Group provides systems to both key semiconductor manufacturers as well as to Universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

For more information, please click here

Contacts:
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49 3641 651 955
Fax: +49 3641 651 922
pr(at)vistec-semi.com

PR Agency
Tower PR
Leutragraben 1
D-07743 Jena (Germany)
Tel.: +49 3641 507 081
vistec(at)tower-pr.com

Copyright © Vistec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Non-Enzyme Sensor Determines Level of Blood Sugar July 29th, 2015

Flexible Future of Point-of-Care Disease Diagnostic July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Chip Technology

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Short wavelength plasmons observed in nanotubes: Berkeley Lab researchers create Ludinger liquid plasmons in metallic SWNTs July 28th, 2015

Announcements

Non-Enzyme Sensor Determines Level of Blood Sugar July 29th, 2015

Flexible Future of Point-of-Care Disease Diagnostic July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Detecting small metallic contaminants in food via magnetization: A practical metallic-contaminant detecting system using three high-Tc RF superconducting quantum interference devices (SQUIDs) July 29th, 2015

Tools

Publication on Atomic Force Microscopy based nanoscale IR Spectroscopy (AFM-IR) persists as a 2015 top downloaded paper July 29th, 2015

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

New-Contracts/Sales/Customers

Liquipel Debuts Eyesight-Saving ION-Glass Blue Light Protection for iPhones and Androids at RadioShack Stores Nationwide: Liquipel's Unique Protective Screen, Available at RadioShack, Cuts Harmful Blue Light Implicated in Macular Degeneration by 10x July 28th, 2015

Dais Analytic's Business Affiliate in China Announces Ten-Year Strategic Energy Efficiency Business Arrangement With COFCO: Dais Beijing to Perform Feasibility Study on Over 80 Buildings to Improve Efficiencies as Part of Overall Hotel Energy-Savings Project July 23rd, 2015

Renishaw adds Raman analysis to Scanning Electron Microscopy at the University of Sydney, Australia July 9th, 2015

Oxford Instrumentsí TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project