Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > National Science Center of Greece selects nano-research technology from Vistec

Abstract:
Vistec Lithography Inc., a leading supplier of electron-beam lithography systems, received a major order from Greece. The National Center for Scientific Research (NCSR Demokritos) has bought an EBPG5000plusES system for one of its associated Institutes. Installed at the Institute of Microelectronics (IMEL), the system will be the first 100kV lithography system in Greece and assure multidisciplinary cutting-edge nano-research.

National Science Center of Greece selects nano-research technology from Vistec

Greece | Posted on March 3rd, 2011

IMEL is one of Europe's leading Research Institutes in the field of Silicon technologies that performs multidisciplinary research. Professor Dimitris Tsoukalas, Director of IMEL, explains: "Due to the different fields of research carried out at the IMEL we had very special demands for the new patterning system. It not only had to be capable of a multi user environment but also had to provide high class and efficient nano-lithography in all areas of our activities spanning from nanoelectronic devices to sensors and MEMS/NEMS. The EBPG5000plusES is the perfect match to these requirements and it will allow IMEL to further improve its position at the nanotechnology forefront."



The Vistec EBPG5000plusES is a high-performance lithography tool based on reliable and well-proven system architecture. Due to its electron-optical column the system can expose various substrate types. The system provides a spot size down to <2.2nm, which allows the routinely generation of nano-dimensional features below 8nm. The system incorporates an interactive graphical user interface (GUI) that provides ease of use for diverse ?multi user environments."


Due to its expertise and infrastructure IMEL is the key institution for top-down nano-research in Greece. Rainer Schmid, General Manager at Vistec Lithography comments the order: "We are honoured to have received an order from an institute with such a reputation. The EBPG5000plusES will be the first 100kV system in Greece. That will not only enable the institute to maintain its leading role in national nano-research but also to participate in European research projects, networks of excellence, and technology platforms at the highest level."

####

About Vistec
The Vistec Electron Beam Lithography Group is a world leader in the design and manufacture of electron beam lithography systems and provides leading edge technology solutions for a wide range of applications.

The Group provides systems to both key semiconductor manufacturers as well as to Universities and Centres of Excellence. The application areas span a wide range of existing and emerging semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research, integrated optics and several new emerging markets.

For more information, please click here

Contacts:
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49 3641 651 955
Fax: +49 3641 651 922
pr(at)vistec-semi.com

PR Agency
Tower PR
Leutragraben 1
D-07743 Jena (Germany)
Tel.: +49 3641 507 081
vistec(at)tower-pr.com

Copyright © Vistec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanobotmodels present metastasis and angiogenesis medical animation October 1st, 2014

Breakthrough in ALD-graphene by Picosun technology October 1st, 2014

Novel approach to magnetic measurements atom-by-atom October 1st, 2014

Nanoparticles Accumulate Quickly in Wetland Sediment: Aquatic food chains might be harmed by molecules "piggybacking" on carbon nanoparticles October 1st, 2014

Chip Technology

Breakthrough in ALD-graphene by Picosun technology October 1st, 2014

Graphene chips are close to significant commercialization October 1st, 2014

Speed at its limits September 30th, 2014

Research mimics brain cells to boost memory power September 30th, 2014

Announcements

'Stealth' nanoparticles could improve cancer vaccines October 1st, 2014

Stressed Out: Research Sheds New Light on Why Rechargeable Batteries Fail October 1st, 2014

New Absorber Will Lead to Better Biosensor: Biosensors are more sensitive and able to detect smaller changes in the environment October 1st, 2014

Graphene chips are close to significant commercialization October 1st, 2014

Tools

Breakthrough in ALD-graphene by Picosun technology October 1st, 2014

Novel approach to magnetic measurements atom-by-atom October 1st, 2014

Stressed Out: Research Sheds New Light on Why Rechargeable Batteries Fail October 1st, 2014

Yale University and Leica Microsystems Partner to Establish Microscopy Center of Excellence: Yale Welcomes Scientists to Participate in Core Facility Opening and Super- Resolution Workshops October 20 Through 31, 2014 September 30th, 2014

New-Contracts/Sales/Customers

Fullerex: Talga Resources Joins INSCX™ Exchange September 4th, 2014

Global Energy Systems Signs Master Sales Agreement with China Aviation Supplies Group September 4th, 2014

East China University of Science and Technology Purchases Nanonex Advanced Nanoimprint Tool NX-B200 July 30th, 2014

University of Manchester selects Anasys AFM-IR for coatings and corrosion research July 30th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE